Filtern
Dokumenttyp
- Zeitschriftenartikel (18)
- Beitrag zu einem Tagungsband (4)
- Vortrag (2)
Sprache
- Englisch (24)
Schlagworte
- Electron backscatter diffraction (11)
- EBSD (8)
- Kikuchi patterns (4)
- Simulation (4)
- Cross-correlation (2)
- Dynamical simulation (2)
- Friedel's rule (2)
- GaP (2)
- Kikuchi pattern (2)
- Non-centrosymmetry (2)
- Pattern matching (2)
- Pattern simulation (2)
- Pyrite (2)
- Antiphase boundary (1)
- Background processing (1)
- Backscattered electrons (1)
- Band detection (1)
- Beugungsmuster-Simulation (1)
- Bimodal distribution (1)
- Center of mass (1)
- Channeling (1)
- Channeling-in (1)
- Chirality (1)
- Composition (1)
- Crystal lattice (1)
- Crystal structure analysis (1)
- Crystallography (1)
- Dynamical electron diffraction simulation (1)
- Dynamical theory (1)
- EBSD pattern (1)
- EDS (1)
- EDX (1)
- Electron Rutherford backscattering (1)
- Electron diffraction (1)
- Enantiomorphy; polarity (1)
- GaAs (1)
- GaN (1)
- Geometrical model (1)
- Hematite (1)
- Hough transformation (1)
- Image processing (1)
- Intensity (1)
- Intergrowth (1)
- Kinematic approach (1)
- Kinematic theory (1)
- Kristall (1)
- Laue groups (1)
- Log-normal distribution (1)
- Magnetite (1)
- Martensite (1)
- Microstrain (1)
- Microstructure (1)
- Misindexing (1)
- Misorientation (1)
- Non-centrosymmetric crystals (1)
- Orientation mapping (1)
- Orientation precision (1)
- Orientation relationship (1)
- Phase identification (1)
- Point groups (1)
- Polarity (1)
- Projective geometry (1)
- Pseudo symmerty (1)
- Pseudosymmetry (1)
- Quartz (1)
- Raman microspectroscopy (1)
- Rasterelektronenmikroskopie (1)
- Realstruktur (1)
- Rückstreukoeffizient (1)
- SEM (1)
- Scanning electron microscopy (1)
- Semiconductor (1)
- Thermo-mechanical loading (1)
- Thin film (1)
- TiO2 (1)
- Transformation (1)
- X-ray microdiffraction (1)
- atomic imaging (1)
- electron backscattering (1)
- electron diffraction (1)
- holography (1)
- photoemission (1)
Organisationseinheit der BAM
Eingeladener Vortrag
- nein (2)
EBSD is nowadays a common technique for the characterization of crystalline microstructures in scanning electron microscopy. The diffraction patterns are often interpreted by superimposing individual Kikuchi bands which are geometrically described by band edges derived from Braggs law. For the typically very simple crystal structures of technically applied materials, such a simplification of the Kikuchi pattern interpretation works sufficiently well, especially for orientation determinations as a main application of EBSD. The more complex crystal structures, however, are a challenge for EBSD indexing routines which in such cases often fail unpredictably. The use of only the intensities of single reflectors for a description of the Kikuchi band intensity and as a cut-off criterion for a pre-selection of the strongest bands are not satisfactory. Often the result will match too many phases, or there are certain deviations in the intensity prediction which must be adapted manually. This is already problematic if one is absolutely sure that the patterns are originating from the expected phase and it becomes a very questionable procedure for an unknown phase.
Advanced structural characterisation techniques which are rapid to use, non-destructive and structurally definitive on the nanoscale are in demand, especially for a detailed understanding of extended-defects and their influence on the properties of materials. We have applied the electron
backscatter diffraction (EBSD) technique in a scanning electron microscope to non-destructively
characterise and quantify antiphase domains (APDs) in GaP thin films grown on different (001)Si substrates with different offcuts. We were able to image and quantify APDs by relating the asymmetrical intensity distributions observed in the EBSD patterns acquired experimentally and comparing the same with the dynamical electron diffraction simulations. Additionally mean angular error maps were also plotted using automated cross-correlation based approaches to image APDs.
Samples grown on substrates with a 4° offcut from the [110] do not show any APDs, whereas samples grown on the exactly oriented substrates contain APDs. The procedures described in our work can be
adopted for characterising a wide range of other material systems possessing non-centrosymmetric point groups.