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The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1–xAs and InxGa1–xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface-analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too. BAM-L200 fully supports the implementation of the revised International Standard ISO 18516 (in preparation) which is based on knowledge outlined in the Technical Report ISO/TR 19319:2013.
Reference nanomaterials
(2016)
This chapter reviews relevant aspects of the still less explored field of RNMs. In the first part, definition of RMs according to different metrological levels was presented as well as the general strategy on their development. In the second part, the importance of RNMs in material science and nanotoxicology is explained and considerations on the use of silica nano-objects as potential future reference material was discussed. Overall, several points should be highlighted from this chapter: Definition of a reference material depends on the level of standardization. Certified reference material represents the highest level of traceability. Different types of reference materials, standard materials and certified reference materials are available, as shown in Table 3.1. The preparation of nano-objects with well-defined mechanical properties is still an unsolved issue and thus needs further R&D activities. Nevertheless, amorphous silica seems to be a promising candidate for reaching this objective. Traceable properties of nanomaterials are still limited to few cases such as primary particle size and thickness measurements of very thin films. In general, developed RMs are monoparametric thus, only one characteristic of the nano-objects is reported. In nanotoxicology, the challenge is in the development of suitable RNM that bears similarities to the measurements made on the sample analysed.