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- LTCC (21)
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Organisationseinheit der BAM
Eingeladener Vortrag
- nein (50)
Röntgen-Refraktions-Topographie als neue Methode zur Charakterisierung von keramischen Werkstoffen
(1996)
Integration of magnetic functional components in LTCC Circuit boards calls for co-firing of dielectric and ferrite tapes. Ni-Cu-Zn ferrites with permeability of p=900 were developed which can be fully densified at the Standard LTCC sintering temperature of 900 °C. Successful co-firing of this ferrite with dielectric tapes requires the adaptation of the shrinkage behavior of the materials as well as the thermal expansion during the cooling period - especially in the temperature range below the transformation point of the glassy phase of the dielectric tape. To match these preconditions, a new dielectric LTCC material with steep sintering curve and high thermal expansion coefficient was designed. Sintered multilayer composed of Ni-Cu-Zn ferrite and tailored dielectric tapes are free of cracks and possess no open porosity. No significant interdiffusion between the ferrite and dielectric tapes was found by EDX measurements. Compared to pure ferrite laminates the permeability of co-sintered Ni-Cu-Zn ferrite layers is drastically reduced to 400, i.e. a decrease of more than 50 %.
To investigate the origin of this permeability reduction, Ni-Cu-Zn ferrite laminates were sintered separately, and in combination with alumina release tapes or dielectric tapes, respectively. SEM and EDX analysis of co-fired laminates reveal differences in the ferrite grain growth behavior. Ferrite laminates with homogeneous microstructure and grain size up to 50 pm exhibit large permeability. However, growth of ferrite grains does not take place near the interface between ferrite and release or dielectric tapes. There is a strong correlation between high permeability and volume fraction of large ferrite grains. Regions of fine and coarse grains inside the ferrite layers show different bismuth concentration; the Bi-content is larger in regions of fine ferrite grains.
Further miniaturization of electronic packaging calls for integration of magnetic functional components into LTCC modules. For integration of magnetic function into LTCC, low fired MnZn- and NiCuZn-ferrites which can be fully densified at the standard LTCC sintering temperature of 900°C were developed. To co-fire these ferrite tapes with dielectric tapes the sintering shrinkage and the coefficient of thermal expansion of ferrite and dielectric tapes must be matched. For each ferrite material a new LTCC dielectric material was designed. The embedded ferrite tapes into new LTCC dielectric tapes can be sufficiently densified during co-firing at 900°C without any cracking. Compared to separately sintered ferrites the permeability of embedded ferrite tapes is reduced. For embedded NiCuZn ferrites permeabilities between 230 and 570 (at 2 MHz) according to the thickness of the embedded ferrite layer were measured. For embedded MnZn ferrites a permeability of 300 was measured.
Recent advances in the development of high gauge factor thin-films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion and a low modulus of elasticity for the application as support material for thin-film sensors. Constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering and subsequent lamination of the metal foil on the planar ceramic substrates. The sensors were mounted on a strain gauge beam arrangement and load curves and creep behavior were evaluated. The accuracy of the assembled load cells correspond to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the LTCC substrates for fabrication of accurate strain gauges. To facilitate the deposition of thin film sensor structures onto the LTCC substrates, the pressure-assisted sintering technology has been refined. By the use of smooth setters instead of release tapes substrates with minimal surface roughness were fabricated. Metallic thin films deposited on these substrates exhibit low surface resistances comparable to thin films on commercial alumina thin-film substrates. The presented advances in material design and manufacturing technology are important to promote the development of high performance thin-film strain gauges.
We studied sintering of LTCC-type glass matrix composites (GMCs) consisting of small glass and alumina particles of equal size. Primarily, crystals act as rigid inclusions, decelerating the densification rate. In later stages, they also dissolve, partially increasing the viscosity. Release of alumina finally induces crystallization of alumosilicates, which enables post-firing stability. To study both effects, two model GMCs were prepared: an α-Al2O3 + barium alumoborosilicate glass (BABS)GMC, which shows neither significant dissolution nor crystallization, and an α-Al2O3 + calcium alumoborosilicate glass (CABS)GMC, which dissolves readily and promotes crystallization. The kinetics of shrinkage for both GMC were modeled by utilizing Frenkel theory for the early stage and MackenzieShuttleworth theory for the late stage, assuming that sintering is superimposed by the weighted contributions of triparticle glasscrystal clusters, their random occurrence (ideal mixing), and a shrinkage rate controlled by the GMC effective viscosity. In agreement with modeling, the experimental results showed that the shrinkage rate of BABSGMC decreases progressively for crystal volume fractions Φ > 0.15. The attainable shrinkage is reduced by up to 8% for Φ = 0.45. For the CABSGMC with Φ = 0.25, a reduction of Φ to 0.20 was evident due to partial α-Al2O3 dissolution. This effect was found able to increase the sintering temperature by ~5060 K.
Über das Sintern von LTCC
(2007)
Silver in LTCC - Interfacial Reactions, Tranpsort Processes and Influence on Properties of Ceramics
(2009)
LTCC-Modules with integrated ferrite layers - Strategies for material development and co-sintering
(2009)
The integration of passive components (resistors, capacitors, inductors) into LTCC modules is a challenging task in multilayer ceramics technology. We report on multilayer assemblies consisting of combined layers of ferrite and dielectric LTCC tapes. Ni-Cu-Zn ferrites with maximum shrinkage at 900°C were processed to green tapes and laminated with dielectric LTCC tapes. Cosintering at 900°C led to multilayers with different defects such as incomplete densification of the ferrite layers, cracks, and warpage. Since ferrite tapes do not really allow compositional changes without deterioration of magnetic properties, the dielectric tape was modified with the following objectives: (i) matching of the shrinkage curves of dielectric and ferrite materials, (ii) adjusting the coefficients of thermal expansion to avoid cracking during cooling, and (iii) controlling of interface reactions. Using this concept we fabricated dense and defect-free multilayers consisting of dielectric and ferrite layers. However, compositional changes of the individual ferrite tapes require the development of a specific dielectric tape material with tailored properties.
Dieses Strategiepapier zielt darauf ab, Akteuren und Entscheidungsträgern den Status der Digitalisierung in der keramischen Fertigung, erfolgreiche Best-Practice-Beispiele aber auch die Herausforderungen nahezubringen, die es nun anzugehen gilt. Es ist die Vision, die Keramikfertigung durchgehend zu digitalisieren und alle Schritte des Produktkreislaufs lückenlos über die gesamte Wertschöpfungs- und Nutzungskette zu vernetzen: also eine Keramikindustrie 4.0 zu etablieren. Das Strategiepapier erfasst zunächst die Spezifität der keramischen Fertigung und nimmt eine Analyse des gegenwärtigen Standes der Digitalisierung in der keramischen Industrie vor, auch anhand einiger ausgewählter Beispiele aus der industriellen Praxis. Auf Basis der wesentlichen Bausteine für eine Fertigungsdigitalisierung werden schließlich die Chancen für Keramikproduzenten sowie der erforderliche Forschungs- und Entwicklungsbedarf aufgezeigt.
Plane LTCC substrates can be produced in zeroshrinkage technology by pressure-assisted sintering. The application of axial pressure during sintering supports densification, enhances cofiring of different materials, and restrains deformation. However, the sintered surfaces are affected by the release tapes and by the setters used in the pressure-assisted sintering process. In this study, the effect of release tape particle size on the surface properties of sintered substrates was investigated. Moreover, the substitution of release tape by the use of a vitreous carbon setter was tested. Surface roughness and sheet resistances of metallic thin films on the respective samples were determined. It was found that the roughness of the substrates is not directly correlated with the adequacy of the surface for thin-film deposition. Compared with a freely sintered sample with an average roughness (Ra) of 0.31 μm, pressure-assisted sintering created smoother surfaces using finegrained release tapes (Ra = 0.18 μm) and rougher surfaces using coarse release tapes (Ra = 0.46 μm). Still, sheet resistances were higher on all sinter-pressed samples. The vitreous carbon setter created unusual trenched surface structures, characterized by varying roughness values and intermediate sheet resistances on the LTCCs tested.
We have studied the integration of Ni-Cu-Zn ferrite spinels as well as substituted hexagonal Co2Y-and M-type ferrites into LTCC (Low Temperature Ceramic Co-firing) modules. The cofiring behavior and the magnetic properties of these materials were investigated and evaluated for multilayer applications. Ni-Cu-Zn ferrites exhibit permeabilities of µ=300–500 for operating frequencies in the MHz range. Cu-substituted Y-type ferrites Ba2Co2-x-yZnxCuyFe12O22 in combination with sintering additives display sufficient shrinkage and densification at 900°C. A permeability of µ=10 is observed; however, substituted Co2Y-type ferrites do not exhibit long-term stability at 900°C. Co/Ti-substituted M-type ferrites BaFe12-2yCoyTiyO19 (y=1.2) with planar magneto-crystalline anisotropy exhibit excellent soft magnetic behavior. Using sintering additives, complete densification is reached at 900°C and a permeability of µ=15 and a resonance frequency of larger than 1?GHz are observed. Integration of ferrite multilayer inductor components into LTCC modules using free and constrained cofiring technologies is demonstrated.
LTCC-modules with integrated ferrite layers - Strategies for material development and co-sintering
(2008)
Novel approaches of tunable devices for millimeter wave applications based on liquid crystal (LC) are presented. In the first part of the paper, a novel concept of a tunable LC phase shifter realized in Low Temperature Cofired Ceramics technology is shown while the second part of the paper deals with a tunable high-gain antenna based on an LC tunable reflectarray. The reflectarray features continuously beam scanning in between ±25°. Also first investigations on radiation hardness of LCs are carried out, indicating that LCs might be suitable for space applications.
Silver in LTCC - Interfacial reactions, transport processes and influence on properties of ceramics
(2009)
Due to addition of minor amounts of suitable additive combinations to BaTiO3 powder the sintering temperature was reduced to 900 °C. Excellent densification (more than 98% of theoretical density) and good dielectric properties were achieved after sintering at 900 °C for 2 hours. Dielectric properties can be improved by modifying the composition of sintering additives and additon of further dopants. The low sintering temperature of newly developed capacitor material allows a co-sintering with pure silver electrodes. No interfacial reaction between silver electrodes and ceramics was observed by microprobe analysis. The dielectric constants of about 1200 to 3000 and the dielectric losses of about 0.008 to 0.02 were measured (f = 1 kHz, T = 25 °C). The temperature dependency of dielectric constant for new capacitor materials is low, almost X7R characteristics. Furthermore, the densification and the dielectric properties of embedded capacitors in LTCC were investigated.
Die Bestimmung der Partikelgrößenverteilung mittels Laserstreulichtverfahren hat sich bei den verschiedensten Pulvern im Mikrometer- und Submikrometerbereich insbesondere wegen der kurzen Messdauer und des breiten Messbereichs zu einem der führenden Verfahren entwickelt. In den letzten Jahren gab es eine Reihe von gerätetechnischen Weiterentwicklungen durch die Hersteller, die der Tatsache Rechnung tragen, dass die Anwender immer feinere Ausgangsprodukte einsetzen und damit auch charakterisieren wollen. Die aktualisierte Fassung der ISO 13320 von 2009, welche die normative Basis der Methode bildet, gilt grundsätzlich im Größenbereich von 3000 gm bis hinunter zu 0,1 gm. Es sind aber zusätzliche Ausstattungsmerkmale beschrieben, die diesen Bereich unter Umständen erweitern können.
Weltweit gibt es etwa zehn etablierte Hersteller von Lasergranulometern, deren modernste Modelle jeweils über derartige Zusatzeinrichtungen verfügen. Die eingesetzten Geräte unterscheiden sich in ihrem Aufbau damit nicht nur zwischen den einzelnen Herstellern, sondern auch innerhalb verschiedener Gerätegenerationen ein und desselben Herstellers. Hinzu kommt der mathematische Prozess der Konvertierung der gewonnenen Streulichtdaten in eine Partikelgrößenverteilung (Dekonvolution), bei dem die Hersteller verschiedene Ansätze und Glättungsmethoden nutzen. Seit 2004 hat die Bundesanstalt für Materialforschung und -prüfung drei Ringversuche zur Bestimmung der Partikelgrößenverteilung mittels Laserstreulichtverfahren initiiert. Neben dem eigentlichen Zweck - der Eignungsbewertung der teilnehmenden Labore - wurden die erhobenen Daten genutzt, um Aussagen zur Präzision der Ergebnisse zu gewinnen und Ursachen für Abweichungen zu finden.
Die Wiederholbarkeit der Messergebnisse innerhalb der Labore war unabhängig vom eingesetzten Gerätetyp sehr gut und erfüllte die Anforderungen der ISO 13320. Geringe Abweichungen bei der Reproduzierbarkeit wurden nur zwischen Laboren gefunden, die identische Gerätetypen desselben Herstellers verwendeten. Über alle Labore betrachtet, ergaben sich Vergleichstandardabweichungen, die in Abhängigkeit von der Größe der gemessenen
In der Keramikfertigung werden verschiedene druckunterstützte Sintertechnologien wie heißisostatisches Pressen, Gasdrucksintern und uniaxiales Heißpressen eingesetzt. Eine Variante des uniaxialen Heißpressens stellt das druckunterstützte Sintern von LTCC-Modulen dar. Es wird mit einem gegenüber dem klassischen Heißpressen deutlich reduzierten Druck von nur etwa 1 MPa operiert. Mit der Einführung der Drucksintertechnik wurde es möglich, großflächige, ebene LTCC-Schichtverbunde ohne laterale Schwindung dicht zu sintern und so eine kostengünstige Fertigung im Nutzen zu realisieren.
Mit dem Trend zur Miniaturisierung und Funktionserweiterung von Schaltungsträgern sind Applikationskonzepte entwickelt worden, die eine Integration von Mikrowellen-, Kondensator-, Piezo- und Ferritmaterialien durch Co-Sinterung beinhalten. Kavitäten und Kanäle werden benötigt, um LTCC-Schichtverbunde auch in der Sensorik und Mikrofluidik einzusetzen. Die Umsetzung dieser Konzepte erfordert häufig diffizile Sinterprogramme mit temperaturgesteuerter Einstellung von uniaxialem Druck und Sauerstoffpartialdruck.
Basierend auf den Ergebnissen zahlreicher F+E-Vorhaben werden Möglichkeiten und Grenzen der Drucksintertechnologie für die Herstellung dieser LTCC-Schichtverbunde illustriert. Vorgestellt wird ein weiterentwickeltes Drucksinteraggregat. Durch Integration von in-situ Schwindungsmessung sowie Mess- und Regeleinrichtungen für den Sauerstoffpartialdruck stehen erweiterte Möglichkeiten für die Optimierung des Drucksinterprozesses von LTCC-Schichtverbunden zur Verfügung.
Helical springs with a rectangular cross-section have been machined from sintered and grinded hollow cylinders with high geometrical precision and good reproducibility. Such springs made from tetragonal zirconia polycrystal (TZP) ceramic show excellent edge quality because of high fracture toughness and bending strength of the starting material. Hence, springs with desired geometric dimension and tailored spring constant can be manufactured for highly demanding applications at high temperatures and in harsh environments.
Prior to any practical use, application limits of springs under mechanical and thermal load have to be analyzed. Therefore, different displacement experiments were carried out on the helical TZP springs.
- Dynamic displacement tests at various temperatures from -15°C to +60°C using a piezo actor to load/unload springs with frequencies between 1 and 40 Hz: Springs remained undamaged and the spring constants were not altered, even after more than one million cycles of compression loading.
- Long-time displacement measurements under static tensile loading at room temperature with a high-precision interferometer test facility: Significant spring elongation under constant strain was surprisingly proved over a period of many hours already at room temperature.
- Creeping experiments for 48 h under static compression load at different temperatures up to 1000 °C: After cooling down and load removing no permanent length reduction of springs was observed for test temperatures up to 700 °C. However, reshaping of TZP springs by plastic deformation is possible at higher temperatures and opens up additional possibilities for spring design and manufacturing.
The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
A novel process to structure the surfaces of low temperature co-fired ceramics (LTCC) is presented. Lowered and raised structures are formed by hot-embossing with glass-like carbon molds during pressure-assisted sintering. Molding is driven by viscous flow of the LTCC glassy phase above the glass transition temperature. For accurate molding of embossments on the LTCC surface, proper filling of cavities in the glass-like carbon mold is necessary. Therefore, de-airing of the mold cavity has to be assured. Two strategies have been investigated: (i) hot-embossing at 850 °C after termination of LTCC shrinkage with de-airing through vent holes in the mold; and (ii) hot-embossing of open porous LTCC at 775 °C with dense molds, de-airing through pore channels in the LTCC, and subsequent densification by further heating to 850 °C. Circular embossments with 10 mm diameter were molded on a commercially available LTCC (Ceramtape GC, CeramTec GmbH, Marktredwitz, Germany). The sintered height was measured using optical profilometry. Image processing was used to evaluate porosity distributions in the sintered structures. The influence of embossing temperature on LTCC viscosity and mold filling behavior is discussed. Successful molding of 47 µm high raised grids and characters by hot embossing with 0.41 MPa at 775 °C and further heating to 850 °C under constant load is demonstrated. Thereby, the high potential of hot-embossing for precise structuring of LTCC surfaces is illustrated.
In this work, the effect of the pressure-assisted sintering process on buried thick film resistors integrated in LTCC multilayer has been studied. Four commercial resistor pastes with sheet resistivities between 10 kΩ and 10 MΩ/cm were analyzed. First they were characterized by SEM/EDX, XRD and Laser diffraction to determine composition and particle distribution. The pastes consist of isolating particles and of Ruthenium based particles that are supposed to build the conductive phase. The pastes were screen printed on LTCC green tape (DP 951) and buried in four layer laminates. Sintering was done in two ways, pressureless (PLS) and also pressure-assisted (PAS). The pressureless sintered resistors showed electrical resistance values roughly in the range of the nominal sheet resistivity and only relatively small fluctuation within one sample. The PAS samples on the other hand showed significantly higher resistances and larger deviations. The microstructure of the sintered resistors was again investigated by SEM and XRD. It seems that the resistivity is determined by the ratio of the two Ruthenium phases RuO2 and Pb2Ru2O6.5, where RuO2 has the higher conductivity. Buried resistors cannot be trimmed by a laser to adjust the resistance. But we discovered that a refiring step will reduce and normalize the resistivity of the PAS resistors significantly.
The sintering behaviour of one microcrystalline and several nanocrystalline TiN powders was investigated by means of a gas pressure furnace with an integrated dilatometer. The investigated nanocrystalline powders strongly differ in the sintering activity. It can be concluded from the experiments, that small grain size, narrow grain size distribution and a low oxygen content are the most important prerequisites for high sintering activity of the nanocrystalline TiN powders.
The extraordinary sintering activity of the best TiN powder makes it possible to produce a dense (< 2 % porosity), pure (no sintering aids) and nanostructured (mean diameter of crystals about 100 nm) TiN bodies.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot Embossing
(2015)
A novel technology for the structuring of low temperature co-fired ceramic (LTCC) surfaces is introduced. The commercial LTCC Ceramtape GC is shaped in a zero-shrinkage process by embossing a glass-like carbon mold into the softened LTCC during pressure-assisted sintering. Diverse raised and lowered structures including rings, grids, and characters were fabricated. It was found that de-airing of mold cavities is crucial for the molding of embossments. De-airing is possible through pore channels in the LTCC if embossing is performed at intermediate temperatures. The influence of LTCC viscosity on the mold filling behavior during the formation of raised structures is discussed. For accurate molding and proper densification of the LTCC, hot embossing with 0.41 MPa at 775 °C and subsequent heating under load to 850 °C is proposed. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised bars and characters is demonstrated. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
This paper presents, the investigation of tunable components based on LTCC technology, implementing ferroelectric tunable thick-film dielectric. The tunable loaded line phase shifters are fabricated with metal-insulator-metal (MIM) varactors to demonstrate the capabilities of this method for packaging of the tunable components. The MIM varactors consist of one tunable dielectric paste layer that is printed between two silver layers. The tunable ferroelectric paste is optimized for LTCC sintering temperature around 850°C. The phase shifters are fabricated in two different process. They were achieved a figure of merit of 24°/dB (phase shift 192°) at 3 GHz and 18°/dB (phase shift 98°) at 4.4 GHz by using seven unit cells that each unit cell consisting of two MIM varactors.
Das Ziel des Gesamtvorhabens bestand darin, einen neuartigen kapazitiven Sensortyp zur hochauflösenden Bestimmung von Masse- und Gravitationskraftänderungen zu entwickeln. Bisherige Technologien nutzten dafür Federn oder Biegebalken aus gehärteten metallischen Werkstoffen, deren Alterungsverhalten die Präzision der Kräftemessung begrenzen. Grundprinzip des neuen Sensortyps ist es, eine auf die keramische Feder einwirkenden Änderung der Gewichts- oder Gravitationskraft durch eine Erfassung der Kapazitätsänderung am Sensor zu bestimmen. Dazu muss die durch Stauchung oder Dehnung der Feder entstehende Kapazitätsänderung mit hoher Auflösung reproduzierbar gemessen werden. Neben einem geeigneten Sensordesign waren Lösungen für Messsignalerfassung und -auswertung (Elektronik/Software) und die Systemintegration zu entwickeln.
Die wichtigsten im Rahmen des BAM-Teilvorhabens erzielten Ergebnisse sind:
- Ausgehend von kommerziellen High-end Keramikpulvern wurden durch Optimierung der keramischen Technologie nahezu porenfreie Al2O3, ZrO2 und Si3N4-Werkstoffe hergestellt und bezüglich Gefüge und Phasenbestand sowie mechanischen, thermischen und elektrischen Eigenschaften bewertet. Insbesondere die defektfreie Herstellung von nanostrukturierten Werkstoffen erforderte umfangreiche Variationen der Prozessparameter. Geeignete Werkstoffvarianten wurden für die Federherstellung ausgewählt.
- Gemeinsam mit den Projektpartnern wurden Layoutvarianten für Schraubendruckfedern mit rechteckigem Windungsquerschnitt und für die Federeinbindung in das Sensorsystem erarbeitet.
- 4 Federvarianten wurden an der BAM durch Hartbearbeitung von gesinterten Hohlzylindern umgesetzt. Fertigungstoleranzen von < ±10 µm für Windungsbreite, Windungshöhe und Windungsabstand und dünnfilm-kompatible innere Windungsflächen (Ra < 0,2 µm) wurden erreicht. Al2O3- und ZrO2-Federn können rissfrei und mit sehr guter Kantenqualität gefertigt werden, bei Si3N4-Federn konnten Kantenschädigungen nicht vollständig verhindert werden.
- Mit der entwickelten Herstellungstechnologie können sowohl „harte“ als auch sehr „weiche“ Federn produziert werden. Federkonstanten zwischen 0,02 N/mm und 10 N/mm wurden realisiert. Die Reproduzierbarkeit der Federfertigung ist gegeben, innerhalb einer Charge unterschieden sich die Federkonstanten der gefertigten Federn nur um etwa +/- 1%.
- An einem speziell entwickelten Versuchsstand wurden die Federn unter zyklischer Druckbelastung im Temperaturbereich von -20 bis +80 °C untersucht. An den Al2O3- und ZrO2-Federn wurden keine Schädigungen beobachtet, die Federkonstante wird durch die zyklische Langzeitbelastung nicht verändert.
- Die Eignung der keramischen Federn für den Applikationsfall wurde mit zahlreichen Spannungs-Dehnungs-Experimenten, teilweise an speziell aufgebauten Versuchsapparaturen, untersucht. An Al2O3- und Si3N4-Federn wurde – wie erwartet – gefunden, dass die Federkonstante unabhängig von der Belastungsgeschwindigkeit ist und unter konstanter Last auch über lange Zeiträume keine Verformung auftritt. Überraschenderweise zeigten ZrO2 (TZP)-Federn ein zeitabhängiges Verhalten unter Last. Dieses ist besonders stark bei Y-stabilisierten Werkstoffvarianten ausgebildet, wurde aber mit Hochpräzisionsmessungen auch bei Ce-stabilsierten Werkstoffen nachgewiesen. Die Deformation ist reversibel, eine vollständige Relaxation wird erst nach Tagen erreicht. Aufgrund der zeitabhängigen Verformung können ZrO2 (TZP)-Federn, trotz ihrer hervorragenden Festigkeit und Bruchzähigkeit, nicht für die konzipierten Sensorfedern eingesetzt werden.
- Das durch die Fa. Siegert TFT entwickelte Metallisierungs-Schichtsystem, bestehend aus aufgesputterten Ti-, Pt- und Au-Schichten verstärkt durch eine galvanisch aufgebrachte Au-Schicht, wurde an der BAM umfassend bewertet. Die Schichten sind untereinander und mit der Keramik weitgehend defektfrei verbunden, die lokale Schichtdicke schwankt jedoch bedingt durch Abschattungseffekte während der Beschichtungsvorgang. Es wurden Schichtwiderstände zwischen 50 und 90 Ohm und damit die Zielvorgabe des Projektes (< 100 Ohm) erreicht. In statischen und dynamischen Belastungstests wurden keine Veränderungen der Leitungswiderstände festgestellt.
- Zur Erhöhung der Kapazität des Kondensators kann der Raum zwischen den Federwindungen statt mit Luft mit einer Flüssigkeit mit hoher Dielektrizitätskonstante gefüllt werden. Als geeignete Flüssigkeit wurde Propylencarbonat mit einer Dielektrizitätskonstante von 65, einem hohen Siedepunkt und einer geringen Viskosität identifiziert. Um eine noch höhere Dielektrizitätskonstante zwischen den Federwindungen zu erreichen. wurden Suspensionen aus Silikonöl und nanokristallinem Bariumtitanat hergestellt und bezüglich ihrer Langzeitstabiltät charakterisiert.
- Gemäß den Anforderungen des Projektpartners KOMPASS wurden maßgeschneiderte Al2O3-Federn mit einer Federkonstante < 0,1 N/mm hergestellt und für den Aufbau des finalen Demonstrator eingesetzt.
Die prinzipielle Funktionsfähigkeit des neuen Sensorkonzeptes auf Basis keramischer Federn wurde mit dem im Projekt aufgebauten Demonstrator nachgewiesen. Die Umsetzung der F+E-ergebnisse in eine industrielle Nutzung zur Herstellung von Gravimetern wird vom Projektpartner KOMPASS angestrebt und ist bereits mit detaillierten Zeitplänen untersetzt.
At high temperatures and in harsh environments ceramic springs are often superior to metallic ones and allow for innovative solutions. A further application was proposed by using ceramic springs as capacitive force sensor. Lower and upper coil surfaces are coated by electrically conducting layers. Deformation of such spring results in a change of capacity. Sensor application calls for helical springs with rectangular cross-section, a linear stress-strain characteristic over entire deformation range and low manufacturing tolerances relating to inner and outer diameter, coil cross section and spring pitch. Furthermore, complex spring design with integrated connecting elements has to be realized.
Alumina, zirconia (Y-TZP) and silicon nitride springs were produced by hard machining starting from sintered hollow cylinders. After external and internal cylindrical grinding the hollow cylinders were filled with hard wax, followed by multi-stage cutting of spring coils with custom-made cutting discs. Finally, hard wax was removed by melting and burnout. Best surface and edge qualities of springs were reached using Y-TZP material and hot isostatic pressed alumina. Y-TZP springs produced with material-specifically selected cutting discs and optimized process parameters show sharp coil edges without spallings and mean roughness values of inner surfaces < 0.2 μm. Manufacturing tolerances of spring diameters, spring pitch, height and width of coil cross section are in the range of ± 10 microns. Good reproducibility of spring geometry by optimized hard machining technology allows for production of Y-TZP springs with spring constants differing less than ± 1 % within a series.
According to DIN 2090 spring constant for rectangular coil cross section is proportional to the square of height and width of coil cross section and indirectly proportional to number of active coils and to the cube of the mean spring diameter. Hence, spring constants can be tailored over a range of many orders of magnitude by changing the spring dimensions. Good agreement was reached between calculated target spring constants and measured values on produced springs.
Alumina and zirconia springs were characterized relating to deformation behavior under dynamic compression load with various deformation speeds and under static tensile loads over long periods of time. Contrary to alumina springs, a non-linear stress-strain behavior of TZP springs was proved in both test series. It is supposed, that pseudoelasticity caused by stress-induced transformation of tetragonal to monoclinic phase is responsible for this special feature of TZP springs. Therefore, TZP material cannot be used for capacitive spring sensors.
At high temperatures and in harsh environments ceramic springs are often superior to metallic springs and allow for innovative solutions. A recently proposed application involves ceramic springs with metallized surfaces as capacitive force sensor. A strictly linear stress-strain characteristic of the spring is a precondition for such a sensor.
Helical ceramic springs with rectangular cross-section have been produced from sintered hollow cylinders. Alumina, ATZ, Y-TZP, and Ce-TZP springs with identical dimensions were characterized and compared regarding deformation behavior.
Spring deformation was investigated under various load scenarios.
Dynamic compression was performed with deformation speeds from 0.3 to 30 mm/min. Spring constants of alumina springs are strain rate independent. By contrast, Y-TZP spring constant increases by approximately 3 % within the experimental framework.
A high-precision test facility was developed to characterize spring displacement in nm range under static tensile load over long periods of time. Spring elongation with asymptotic course was observed for zirconia containing materials at room temperature. This effect is particularly strong in the case of Y-TZP. Up to 0.3 % time-dependent elongation was measured after 24 h under constant load. Deformation is completely reversible after unloading. Alumina springs do not show any time-dependent deformation under identical test conditions.
Contrary to alumina springs, a non-linear stress-strain behavior of TZP springs at room temperature was proved in both test series. It is supposed, that pseudo-elasticity caused by stress-induced phase transformation from tetragonal to monoclinic is responsible for this special behavior of TZP springs.
Die Strukturierung keramischer Grünfolien und Laminate ist ein wesentlicher Prozessschritt in der keramischen Multilayer-Technologie und begründet die funktionelle Vielfalt keramischer Multilayer. Benötigt wird die Grünbearbeitung für die Herstellung elektrischer und thermischer Vias sowie innerer Kavitäten und Kanäle für Transport und Lagerung von Gasen und Flüssigkeiten in hochintegrierten Schaltungsträgern, Sensoren und Reaktoren. Standardverfahren in der industriellen Fertigung sind Heißschneiden, Stanzen und Laserbearbeitung. Darüber hinaus werden auch Bohren, Fräsen, Sägen und Heißprägen verwendet. Über die Erprobung weiterer Verfahren wie Wasserstrahlschneiden, Dampfstrahlätzen und Powder Blasting wird in der Literatur berichtet.
Im Vortrag werden spezifische Vor- und Nachteile der eingesetzten Verfahren beleuchtet. Abschließend werden die Kriterien für die Auswahl des optimalen Strukturierungsverfahrens diskutiert. Zusammensetzung und Gefüge sowie die dadurch bedingten mechanischen und thermomechanischen Eigenschaften sowie das Absorptionsverhalten von Grünfolien sind sehr unterschiedlich. Daraus resultieren unterschiedliche optimale Bearbeitbarkeitsparameter.
Structuring of LTCC substrates by a combination of pressure-assisted sintering and hot-embossing
(2015)
A novel technology for the structuring of LTCC surfaces is introduced. The material is shaped in a zero-shrinkage process by embossing a glassy carbon mold into the softened LTCC directly after termination of the shrinkage. Three commercially available LTCC compositions (Ceramtape GC, Heratape CT707, and DP951) were tested. Diverse raised and lowered structures including rings, grids, and characters were fabricated. Different material behavior was observed for the tested compositions. Promising results were achieved with Ceramtape GC. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised characters is demonstrated. Processing of 100 × 100 mm² substrates is possible. DP951 showed very good moldability, but also unwanted material displacement due to evaporating lead. A high displacement capacity but uneven heights of embossed structures were observed on CT707 samples. SEM investigations proved the precise transfer of surface contours from the mold to the LTCC. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
Die zuverlässige Herstellung von Bauteilen aus Hochleistungskeramik erfordert den Einsatz von prozessbegleitenden Prüfverfahren in allen Fertigungsstufen. Prozessbegleitende Prüfung umfasst sowohl die Bewertung von Ausgangs- und Zwischenprodukten (Pulver, Suspensionen, Grünkörper) als auch die in-situ Überwachung kritischer Fertigungsstufen (Aufbereitung, Formgebung, Entbinderung, Sinterung). Der Arbeitskreis „Prozessbegleitende Prüfverfahren“ im DKG/DGM-Gemeinschaftsausschuss „Hochleistungskeramik“ bietet eine Plattform zum Informationsaustausch über neue Messverfahren und zur Initiierung von Ringversuchen und Referenzmaterialentwicklung.
Als aktuelle Beispiele werden zwei applikationsnahe Verfahren zur in-situ Charakterisierung von Geometrieveränderungen (Schwindung, Verformung) an großformatigen keramischen Schichtverbunden vorgestellt.
Die Hochtemperatur-3D-Laserprofilometrie ermöglicht die Visualisierung und Quantifizierung der lokalen Verformung keramischer Multilayer während der drucklosen Sinterung. Beobachtet wurden an LTCC-Multilayern starke Verformungen bereits während der Entbinderung und in der Abkühlphase. Das Wissen um zwischenzeitliche Verformungen erweitert das Verständnis über die Ursachen von Defekten in Multilayer-Bauteilen.
Die in-situ Messung der Dickenschwindung an realen, großformatigen LTCC-Bauteilen während der druckunterstützten Sinterung wurde erstmals durch die Entwicklung eines LTCC-kompatiblen Drucksinteraggregat mit integriertem Dilatometer ermöglicht. Zusätzlich wurde das Drucksinteraggregat mit einer prozessbegleitende Mess- und Regelungseinrichtung für den Sauerstoffpartialdruck ausgestattet. Durch ein optimiertes Sauerstoffpartialdruckregime konnte an LTCC-Modulen eine qualitätsgefährdende Silberdiffusion aus den Leiterbahnen in das umgebende keramische Dielektrikum drastisch reduziert werden. Das mit einem industriellen Partner entwickelte Drucksinteraggregat eröffnet unikale Möglichkeiten zur Optimierung von Aufheizgeschwindigkeit, Druck und Sinteratmosphäre in allen Phasen des Sinterprozesses.
Spray drying of ceramic slurries aims for soft and free-flowing granules with homogenous microstructure neither containing voids nor hard shells suitable for uniaxial and isostatic pressing.
The controlled destabilization of the slurries was introduced, since the unwanted formation of hard granules with voids donut-like shape could be drastically reduced. Spray drying of such modified slurries resulted in soft granules and finally leaded to sintered bodies with improved microstructure, density and strength.
Optimized slurries were atomized in a laboratory spray dryer (Hi-Tec, Niro, Denmark) both with a commercial two stream nozzle and an adapted ultra sound atomization unit. Potential advantages of the ultra sound nebulization are investigated for model systems of alumina, zirconia and a ZTA composite while focusing on solids content of slurries, yield, and granule properties (size distribution, flowability, shape, microstructure, pressability) as well as the final sinter body properties (density, microstructure, strength).
Using ultrasound nozzles in spray drying of identical slurries, as before tested and optimized for a two stream nozzle atomization process, resulted in a more suitable size distribution for dry pressing (less particles below 20 µm), a better flowability and a higher yield. Furthermore the sinter bodies produced of the ultra sound granules have higher sintered density, more homogenous microstructure without large pores and higher strength.