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Monitoring of repositories for radioactive waste requires techniques which can be applied long-term under harsh conditions. In this work, the reliability and suitability of materials and a capacitive sensor for measuring relative humidity are investigated, which are to be embedded in the special concrete components for the closure structures of underground repository. Preliminary tests with accelerated aging of the materials used, validation of the sensors under difficult conditions, investigations of the surfaces after aging by pH 14 solution, defined exposure of the sensors in a climatic chamber and the microscope images are discussed. The results will be used for further development and optimization of the RFID based sensor systems which can be applied to monitor the condition of different building structures without cabling.