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Eingeladener Vortrag
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Integration of screen-printed tunable BST thick films in LTCC modules for microwave applications
(2017)
Reconfigurable microwave components play an important role in modern communication systems to meet the increasing demands for functionality and flexibility of the systems. Various technologies, such as semiconductor technology, microelectromechanical systems (MEMS) or ferroelectric thin and thick films, are suitable for the realization of tunable microwave components. Ferroelectric materials are characterized by high tuning speeds, negligible power consumption and low manufacturing costs. In particular, ferroelectric thick films based on barium strontium titanate (BaxSr1-xTiO3, BST) are promising systems for use in the frequency range up to approx. 12 GHz. However, due to the high sintering temperatures above 1100°C for pure BST thick films, the fabrication of tunable components based on silver or gold electrodes is limited to planar structures, which are applied after the sintering process.
In this presentation, it will be shown the development of BST-ZnO-B2O3 composite materials for reducing the sintering temperature to 850-900°C. Furthermore, the material and component properties of these composites or rather corresponding MIM (metal-insulator-metal) varactors are presented and compared to planar-structured varactors. The LTCC integration potential of such fully screen-printed MIM varactors based on the developed low sintering BST composites are investigated by the fabrication of phase shifters embedded in LTCC modules.
Implementation of Ba0.6Sr0.4TiO3-ZnO-B2O3 based tunable microwave phase shifters in LTCC technology
(2017)
Tunable dielectric Ba0.6Sr0.4TiO3-ZnO-B2O3 thick-films were analyzed regarding their integration potential into the LTCC technology. Therefore, tunable loaded line phase shifters based on metal-insulator-metal varactors with single- and double- printed BST thick-films were fabricated and co-sintered inside a four layer LTCC module. Microstructural and chemical investigations showed a sufficient compatibility and adhesion between the silver, BST composite and LTCC layers and a resulting morphology depending on the processing route. The microwave characterization of the LTCC-embedded phase shifters revealed comparable results to phase shifters with the same design on alumina substrates.