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In the last years, a lot of research work has been performed in the field of surface coatings and thin films technology, often supported by governmental research programs, as i.e. in Germany, the Thin Film Technology and OSTec research programs. But up until now, there is still a lack in transfer of this large amount of knowledge created by research activities on to industrial application and commercialization. To overcome this problem, a new web based information system has been developed (http://www.schichttechnik.net), which in a first step will make the whole content of the German OSTec research program (approx. 180 research reports) of the last 10 years available. In further steps, data from products of coating suppliers and other research programs will be taken into account. The database contains the following sections: definition of the coating system, deposition equipment, deposition processes, application properties, test procedures and test equipment, information about standardization and base information about coating processes etc. It will be possible to search for coatings by material properties and functions of coatings, considering also restriction on the substrate. In addition, searching regarding combination of properties, e.g. for wear-resistant, conductive, decorative coatings etc. will also be possible.
The present study investigates the use of imaging and mapping ellipsometry to determine the properties of non-ideal and patterned thin film samples. Samples which are candidates for future references and standards were prepared for this purpose. The samples investigated were lithographically patterned SiO2 and photoresist layers. The thickness and the optical constants of the two materials were determined using spectroscopic ellipsometry in the visible spectral range. On a larger lateral scale of several mm lateral resolution, the homogeneity was investigated using a goniospectral rotating compensator ellipsometer. A nulling imaging ellipsometer was used to determine the properties of the sample on a smaller scale of 25–150 µm.