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The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
Glass-ceramic composites as insulation material for thermoelectric oxide multilayer generators
(2021)
Thermoelectric generators can be used as energy harvesters for sensor applications.
Adapting the ceramic multilayer technology, their production can be
highly automated. In such multilayer thermoelectric generators, the electrical insulation material, which separates the thermoelectric legs, is crucial for the performance of the device. The insulationmaterial should be adapted to the thermoelectric regarding its averaged coefficient of thermal expansion α and its sintering temperature while maintaining a high resistivity.
In this study, starting from theoretical calculations, a glass-ceramic Composite material adapted for multilayer generators fromcalciummanganate and Calcium cobaltite is developed. The material is optimized towards an α of 11 × 10−6 K−1 (20–500◦C), a sintering temperature of 900◦C, and a high resistivity up to 800◦C.
Calculated and measured α are in good agreement. The chosen glass-ceramic composite with 45 vol.% quartz has a resistivity of 1 × 107 Ωcm and an open porosity of <3%. Sintered multilayer samples from tape-cast thermoelectric oxides and screen-printed insulation show only small reaction layers. It can be concluded that glass-ceramic composites are a well-suited material class for insulation layers as their physical properties can be tuned by varying glass composition or dispersion phases.
Reliable measurement of the size of polydisperse, complex-shaped commercial nanopowders is a difficult but necessary task, e.g., for regulatory requirements and toxicity risk assessment. Suitable methods exist for the accurate characterization of the size of non-aggregated, stabilized, spherical and monodisperse nanoparticles. In contrast, industrial nanoscale powders usually require dedicated sample preparation procedures developed for the analysis method of choice. These nano-powders tend to agglomerate and/or aggregate, a behavior which in combination with an innate broad particle size distribution and irregular shape often significantly alters the achievable accuracy of the measured size parameters. The present study systematically tests two commercially available nanoscale powders using different sample preparation methods for correlative analysis by scanning electron microscopy, dynamic light scattering, Brunauer–Emmet–Teller method and differential mobility analysis. One focus was set on the sample preparation by embedding nanoparticles in carbon-based hot-mounting resin. Literature on this topic is scarce and the accuracy of the data extracted from cross sections of these particles is unclearly stated. In this paper systematic simulations on the deviation of the size parameters of well-defined series of nanoparticles with different shapes from the nominal value were carried out and the contributing factors are discussed.
Graphene and graphene-oxide (GO) are used for instance in catalysis, biomedical applications, in inks and as composite materials. To ensure product quality and safe-by-design principles within the various application fields, the commercial material must be characterized and specified through well-known and standardized procedures. The accurate morphological characterization of 2D materials is a challenging task, requiring careful sample preparation on a substrate either as a powder or from liquid suspension. These must be isolated, homogeneously distributed, with good statistics of the counted particles. Various sample preparation approaches have been reported in the literature, e.g. electrospray, substrate surface treatment, embedding the particulate material and polishing the cross-section, or addition of ligands to the suspended nanostructures. In this study, a novel deposition procedure for graphene-related 2D materials (GR2Ms) was systematically tested for its efficacy. The quantitative analysis of the size and shape distribution of the materials was conducted using electron microscopy and was successfully tested in XPS and EDS experiments. The technique is an extension of the conventional drop-casting method and has been designated "wire-print" deposition.
The result of such a wire-print deposition for a graphene-based suspension is shown in Figure, where various treatment conditions have been tested with a repetition of up to 10 times per condition, all together 86 spots on a silicon wafer of 10 mm².
Electron microscopy applied in different operating modes, e.g., SEM, TEM or STEM-in-SEM, is the gold standard method to investigate the exact size and shape of individual nanoparticles. However, when fine nanoparticles with a non-monodisperse size distribution and non-spherical shapes are analysed, achieving an accurate result is challenging. Deviations in size measurements of more than 10% may occur. Understanding of the contrasts and sensitivities characteristic to the individual operating modes of an electron microscope is key in interpreting and evaluating quantitatively the measurement uncertainties needed for an eventual certification of specific nanoparticles via traceable results. Further, beyond the pure measurement, the other components in the analysis workflow with significant impact on the overall measurement uncertainties are the sample preparation and the image segmentation. In the present study the same areas of selected iron oxide fine nanoparticles (<25 nm) as reference nanomaterial (candidate) prepared on substrate for electron microscopy imaging are analysed correlatively with SEM, STEM-in-SEM and TEM with respect to their size and shape distribution. Individual significant measurement uncertainties are discussed, e.g., the sensitivity of secondary electron detectors of InLens-type to the surface morphology, particularly to the presence of an ultrathin organic coating or signal saturation effects on the particle edges, to electron beam exposure, to surface contamination, or the selection of the threshold for image segmentation. Another goal of this study is to establish a basis of analysis conditions which shall guarantee accurate results when both manual and particularly (semi-)automated segmentation approaches are applied. Advantages as well as limitations of the use of different electron microscopy operating modes, applied individually and correlatively, are highlighted.
Background, Motivation and Objective
Nanomaterials are at the core of some of the 21st century’s most promising technologies. In order to utilize and rationally design materials at the nanoscale the reliable characterization of their physico-chemical properties is highly important. Furthermore, the European Commission has taken measures via the REACH Regulations to control the classification of nanomaterials. REACH Annexes which entered into force in January 2020 require manufacturers to register nanomaterials that are traded in larger quantities (at least 1 ton). Every powder or dispersion where 50% (number distribution) of the constituent particles have sizes ≤ 100 nm in at least one dimension are defined as a nanomaterial. This creates a need for both industrial manufacturers and research and analytical service facilities to reliably characterize potential nanomaterials. Currently, BAM is working on developing reference nanoparticles, which shall expand the scarce list of worldwide available nano reference materials certified for particle size distribution, but also targeting other key parameters such as shape, structure (including porosity) and functional properties. Thus, candidate materials are considered to complement the already available spherical and monodisperse silica, Au and polystyrene reference nanoparticles, e.g. iron oxide and titanium oxide, with an average atomic number between those of silica and gold. Particularly for the imaging by electron microscopies, new nanoparticles of well-defined size in the range of 10 nm are decisive for the accurate particle segmentation by setting precise thresholds.
Statement of Contribution/Methods
Synthesis: Highly monodisperse iron oxide nanoparticles can be synthesized in large quantities by thermal decomposition of iron oleate or iron acetylacetonate precursors in high boiling solvents such as octadecene or dioctyl ether in the presence of oleic acid and oleylamine as capping agents.
Scanning Electron Microscope: An SEM of type Supra 40 from Zeiss has been used including the dedicated measurement mode transmission in SEM (STEM-in-SEM) with a superior material contrast for the nanoparticle analysis. The software package ImageJ has been used for the analysis of the STEM-in-SEM images and to determine the particle size distribution.
Dynamic Light scattering (DLS): Particles in suspension were measured in comparison by means of Zetasizer Nano (Malvern Panalytical; cumulants analysis) and NanoFlex (Microtrac; frequency power spectrum).
Results/Discussion
In this study iron oxide nanoparticles synthesized at BAM and pre-characterized by DLS, SEM (including the transmission mode STEM-in-SEM) are presented. The particles are spherical and highly monodisperse with sizes slightly larger than 10 nm.
Graphene and graphene-oxide (GO) are advanced materials which – similar to other graphene-related 2D materials (GR-2M) - are already used for instance in catalysis processes, biomedical applications, in inks and resins, or as composite materials for the aviation industry. The lateral/structural characterization of graphene oxide (GO) flakes is a challenging task, with steps like sample preparation, representative image selection and exact determination of the particle size distribution of well-defined size and shape descriptors being crucial for an accurate analysis. To ensure that safe-by-design principles are met within the various application fields, the commercial material must be thoroughly characterized and specified through well-known and standardized procedures.
GO flakes with different degrees of complexity were selected to assess the requirements for an accurate evaluation of their physico-chemical properties. These samples show inherent features with complex nanoscale characteristics such as porosity and edge roughness; further, the lateral size (quantified via equivalent circular diameter (ECD), minimum Feret and maximum Feret) of isolated and overlapping particles deposited on a substrate span over several orders of magnitude (nano to micron scale). The samples showed different degrees of agglomeration (and possible aggregation) with sizes ranging between submicron to a few tens of micrometers.
One focus is the automated segmentation and evaluation of images obtained by electron microscopy. The GO samples appear translucent with well-defined contrast between single and overlapping flakes both with the secondary electron detector of type InLens as well as with SEM in the transmission mode (STEM) utilizing a dedicated sample holder. To this end it is of utmost importance for the accurate image segmentation to carefully select thresholds both manually and through semi-automatic approaches using well-known threshold algorithms such as “IsoData” and pre-defined segmentation applications such as the ParticleSizer software package.
Further specific challenges in identifying and extracting key features of selected graphene oxide flakes are being discussed and approaches towards accurate and representative characterization are presented.
The recently certified reference material (CRM) BAM-N012 as cubical iron oxide FeOx nanoparticles (NPs) of 8 nm area equivalent square edge length (ESL) and the RM candidate BAM-N013 as nearly spherical NPs of 22 nm size were analyzed in detail by electron microscopy (EM).
For the metrological characterization with SEM, STEM in SEM and TEM, the understanding of the imaging contrasts and sensitivities, and the correct interpretation of the (art)effects which are inherent to each detection mode is necessary.
The same sample areas with NPs deposited on a TEM grid were analyzed by two SEM acquisition modes, i. e. SE InLens and STEM in SEM using a dedicated transmission sample holder, and further, correlatively, analyzed with TEM.
With increasing kV, SE InLens shows increasing particle size (unless overcharging at the particle boundaries is filtered), as a known effect. For STEM-in-SEM the particle size decreases significantly and individual particles are identified easier (at 2 kV only a few single particles can be detected automatically).
❑ Documentation of the sample preparation and measurement conditions (including optimization process) is important for reproducibility.
❑ Plasma cleaning, analysis in the transmission mode at SEM is recommended for FeOx NPs.
❑ Selection of the threshold algorithm can significantly alter the reported ECD.
The recently certified reference material (CRM) BAM-N012 as cubical iron oxide FeOx nanoparticles (NPs) of 8 nm area equivalent square edge length (ESL) and the RM candidate BAM-N013 as nearly spherical NPs of 22 nm size were analyzed in detail by electron microscopy (EM).
For the metrological characterization with SEM, STEM in SEM and TEM, the understanding of the imaging contrasts and sensitivities, and the correct interpretation of the (art)effects which are inherent to each detection mode is necessary.
The same sample areas with NPs deposited on a TEM grid were analyzed by two SEM acquisition modes, i. e. SE InLens and STEM in SEM using a dedicated transmission sample holder, and further, correlatively, analyzed with TEM.
With increasing kV, SE InLens shows increasing particle size (unless overcharging at the particle boundaries is filtered), as a known effect. For STEM-in-SEM the particle size decreases significantly and individual particles are identified easier (at 2 kV only a few single particles can be detected automatically).
❑ Documentation of the sample preparation and measurement conditions (including optimization process) is important for reproducibility.
❑ Plasma cleaning, analysis in the transmission mode at SEM is recommended for FeOx NPs.
❑ Selection of the threshold algorithm can significantly alter the reported ECD