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- AFM (4)
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We present dynamic plowing nanolithography on polymethylmethacrylate films, performed with a scan-linearized atomic force microscope able to scan up to 250 μm with high resolution. Modifications of the surface are obtained by plastically indenting the film surface with a vibrating tip. By changing the oscillation amplitude of the cantilever, i.e., the indentation depth, surfaces can be either imaged or modified. A program devoted to the control of the scanning process is also presented. The software basically converts the gray scale of pixel images into voltages used to control the dither piezo driving cantilever oscillations. The advantages of our experimental setup and the dependence of lithography efficiency on scanning parameters are discussed. Some insights into the process of surface modifications are presented.
Antimony clusters of different shapes and dimensions have been obtained by evaporating antimony on graphite. The dependence of the shape and dimensions of the particles on the evaporation parameters (effective layer thickness, temperature, pressure) is discussed. A characterisation of the different structures is presented. In particular, the decoration of graphite steps is discussed. Clusters have been dislocated by means of dynamic plowing nanolithography, both in vector and in image pattern mode. The dependence of the energy needed to dislocate a cluster on its dimensions and position is discussed.
Two different methods of nanolithography, namely dynamic plowing lithography (DPL) and indentation by means of force-displacement curves (FDI), have been compared by performing them on two different polymers, poly (methylmethacrylate) and polystyrene. No fundamental differences can be found out in the efficiency of the two methods, i.e., in the depth of the lithographed structure as a function of the scanning parameters. The main drawback of FDI is that it is much more time consuming than DPL. On the other hand, when the sample is lithographed with DPL, the border walls that surround the lithographed structure are very much bigger than the border walls created through FDI. The physicochemical properties of the border walls created through DPL have been investigated. Several experimental data reveal that such border walls are very much softer and looser than unmodified polymers and suggest that during DPL the fast oscillating tip is able to break polymer chains. This does not happen with FDI, where border walls are simply made up of the material carved out by the tip. A method to eliminate these undesirable border walls is suggested.
The adhesion of poly(methyl methacrylate) (PMMA) and polystyrene (PS) films, whose surface has been previously structured by dynamic plowing lithography (DPL), has been measured by means of forcedisplacement curves. The different adhesion of modified and unmodified PS leads to the assumption that polymer chains are broken during DPL. After measuring the energy dissipated by the tip during DPL, in order to check that the transferred energy is sufficient to break covalent bonds, the polymer chain scission caused by the lithographic process has been definitely confirmed by size exclusion chromatography measurements of the lithographed films.
Poly(methyl methacrylate) (PMMA) surfaces have been modified by dynamic plowing lithography. The resulting modified structures, presenting regions of different densities and stiffnesses, have been studied by forcedisplacement curves. The elasto-plastic response, the stiffness, and the adhesion of the modified samples have been characterized. Forcedisplacement curves are able to distinguish between unmodified PMMA and two different structures resulting from the lithography, i.e. compressed PMMA and low density PMMA. In particular, the low density regions are made up of cluster-like globular particles, whose elasto-plastic response and adhesion are measured and whose contribution to the total elasto-plastic response and to the adhesion has been studied in detail.
Force-displacement curves have been obtained with a commercial atomic force microscope (AFM) at different temperatures and probe rates on a thick film of poly(n-butyl methacrylate) (PnBMA). The analysis of the force-displacement curves has been focused on the contact portion of the curves, giving information about the stiffness of the sample and its Young's modulus. A novel model of sample deformations that extends the basic equations of the elastic continuum contact theories to the plastic deformations is presented. This model gives several insights into the processes of deformation of soft samples and permits to calculate not only the parameters of the Williams-Landel-Ferry equation but also the Young's modulus and the yielding force of the polymer as a function of temperature and/or probe rate. These quantities have been measured in a wide range of temperatures (70 K) and probe rates (6 decades) for the first time with the AFM, and the results are in very good agreement with measurements performed with customary techniques, such as broadband spectroscopy and dynamic mechanical analysis.