Filtern
Erscheinungsjahr
Dokumenttyp
- Zeitschriftenartikel (21)
- Vortrag (8)
- Sonstiges (5)
- Posterpräsentation (4)
- Beitrag zu einem Tagungsband (3)
- Beitrag zu einem Sammelband (1)
Sprache
- Englisch (42) (entfernen)
Schlagworte
- Mechanical properties (8)
- IIT (4)
- Nanoindentation (4)
- ISO 14577 (3)
- Instrumented indentation testing (3)
- Calibration (2)
- Dynamic testing (2)
- Friction (2)
- Instrumented Indentation Testing (2)
- Multilayer (2)
Organisationseinheit der BAM
- 6 Materialchemie (6)
- 6.7 Materialsynthese und Design (5)
- 6.2 Material- und Oberflächentechnologien (2)
- 9 Komponentensicherheit (2)
- 9.5 Tribologie und Verschleißschutz (2)
- 5 Werkstofftechnik (1)
- 5.1 Mikrostruktur Design und Degradation (1)
- 6.1 Oberflächen- und Dünnschichtanalyse (1)
- 6.6 Physik und chemische Analytik der Polymere (1)
Eingeladener Vortrag
- nein (8)
The authors describe and interpret curvature-related changes to the ellipsometric readout. As model system for a concave curvature, a set of three spherical microscopic indents in silicon (100) of different sizes was prepared by instrumented indentation testing using a spherical indenter. For reference, these samples were characterized by AFM to reveal the topography of each structure. The concavelike indents were analyzed by Mueller-Matrix imaging ellipsometry to extract lateral intensity images of 12 elements of the Mueller-Matrix. As a result of the detailed analysis of the image elements m22, m23, and m14, it was possible to correlate intensity changes and symmetry properties to depolarization and cross polarization induced by the edge threshold and the curved surface of the indent.
The accuracy and comparability of nanoindentation results depend significantly on the calibration of area function and instrument compliance. The area function results should not depend on the reference material used or on the calibration method (direct or indirect). This has been investigated for 18 different Berkovich tips. A novel calibration method is proposed that confirms the material independence of the area function and gives a force-dependent instrument compliance function. An agreement between direct and indirect calibration could only be achieved by considering a radial displacement correction. Further, it is shown that the transition range from a spherical cap to the correct face angle of the pyramid can extend to a depth of more than 250 nm. A better parameter for the indenter than the tip radius is the offset of the contact radius to the radius of an ideal tip at a depth where the correct face angle is reached.