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Niedrigsinternde Glas-Keramik-Komposite (LTCC, low temperature co-fired ceramics) werden erfolgreich als kompakte, mehrlagige Schaltungsträger in der Automobilindustrie und Hochfrequenztechnik eingesetzt. Dazu werden sie mit Verfahren der Folien- und Multilayertechnik verarbeitet und gemeinsam mit aufgedruckten Metallisierungen bei Temperaturen bis 900 °C co-gesintert. Besonders bei hohen Anforderungen an die Reproduzierbarkeit der Sinterschwindung hat sich das Sintern mit axialer Druckunterstützung etabliert, wodurch unter anderem die Schwindung in der Ebene der Einzelfolien unterdrückt werden kann. Ziel der vorliegenden Arbeit war es, die LTCC-Drucksintertechnologie unter zwei Gesichtspunkten weiterzuentwickeln:
• Erarbeitung eines einfachen und praktikablen Verfahrens zur Modellierung und Simulation des Verfahrens,
• prozessintegrierte Erzeugung maßgeschneiderter, speziell dünnfilmfähiger Oberflächenstrukturen.
Für die Simulation der Sinterung wurde das Modell der Mastersinterkurve ausgewählt. Die Eignung des Modells zur Beschreibung von LTCC-Werkstoffen wird zunächst ohne Druckunterstützung nachgewiesen. Dabei werden die Mastersinterkurven von frei gesinterten Pulverpresslingen und Folienlaminaten, deren Schwindung in der Ebene unterdrückt ist, quantitativ gegenübergestellt. Außerdem wird eine Methode vorgeschlagen und experimentell bestätigt, mit der die Schwindungsfehlpassung von Werkstoffkombinationen bei druckloser Co-Sinterung von berechnet werden kann. Die Modellierung der druckunterstützten Sinterung basiert auf thermomechanischen Analysen eines verbreitet angewendeten, kommerziellen LTCC-Werkstoffs (DuPont GreenTape DP951) im Druckbereich von 2 kPa bis 500 kPa. Die Auswertung der Messwerte und Entwicklung der Mastersinterkurven erfolgt unter Berücksichtigung der Kriechverformung des Werkstoffs unter Druck und wird durch grundlegende Untersuchungen zur für dieses Modell obligatorischen Bestimmung der Aktivierungsenergie ergänzt. Mit einer konstanten Aktivierungsenergie von 400 kJ/mol werden Mastersinterkurven für verschiedene Drücke aufgestellt und mit Anpassungsfunktionen modelliert. Die mit Hilfe der Anpassungsfunktionen simulierten Sinterkurven stimmen gut mit den Messungen überein. Das Modell wird als geeignet und praktikabel bewertet.
Die prozessintegrierte Erzeugung maßgeschneiderter Oberflächenstrukturen erfolgt über die im Drucksinterprozess eingesetzten Brennhilfsmittel. Zur Einstellung gewünschter Rautiefen auf den gesinterten Oberflächen werden Opferfolien aus Al2O3 mit unterschiedlichen Partikelgrößenverteilungen und eine Opferfolie aus hexagonalem BN vorgestellt, die über Rückstandsschichten auf der LTCC-Oberfläche die Oberflächenstruktur bestimmen. Der Zusammenhang von Opferfolieneigenschaften und Oberflächencharakteristika wird an verschiedenen LTCC-Werkstoffen beschrieben. Die Rauheit einer druckgesinterten LTCC-Oberfläche kann über die Partikelgröße der Opferfolien gezielt verändert werden. Zur Herstellung dünnfilmkompatibler, rückstandsfreier Oberflächen im Drucksinterprozess wird glasartiger Kohlenstoff als Brennhilfsmittel eingeführt. Damit wird eine Regelung des Sauerstoffpartialdrucks während des Brandes erforderlich. Eine vollständige thermische Entbinderung der Grünfolien ist aufgrund von Kohlenstoffrückständen auf den Partikeloberflächen erst oberhalb 500 °C möglich. Einflüsse der Prozessparameter Druck und Haltezeit auf die resultierende Oberflächenstruktur werden aufgeklärt und optimale Prozessfenster für die untersuchten Werkstoffe angegeben. Mit dem entwickelten Verfahren können zum ersten Mal verschiedene LTCC-Substrate mit dünnfilmfähigen Oberflächen nacharbeitsfrei durch Drucksintern hergestellt werden.
Die Ergebnisse zur Modellierung und Simulation leisten einen wertvollen Beitrag zur Einsparung von Energie, Zeit und Kosten bei der Gestaltung von Drucksinterprozessen. Die erarbeiteten Brennhilfsmittelkonzepte können ressourcenaufwändige Nacharbeit teilweise ersetzen und eröffnen durch die Dünnfilmeignung der Oberflächen neue Anwendungsgebiete der Drucksintertechnologie in der Sensor und Mikrosystemtechnik.
Co-firing of low temperature co-fired ceramics (LTCC) and functional ceramics like ferrites is a promising approach to increase the level of integration in future microsystems, and to create new applications for LTCC technology. Besides the development of compatible material combinations, the configuration of the sintering process is an important issue for successful co-firing. A method is presented to derive the linear shrinkage mismatch of a material combination based on density data calculated from the master sintering curves (MSCs) of the individual materials. The influence of the firing profile on the constraint in the combined multilayer can be anticipated using this method. To investigate and improve the co-firing of ferrite and dielectric tape, the shrinkage mismatch with respect to heating rate was studied. A significant reduction of shrinkage mismatch was found for increased heating rates. The calculated results are verified by lateral shrinkage measurements on combined laminates.
Recent advances in the development of high gauge factor thin films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion (9.4 ppm/K) and a low modulus of elasticity (82 GPa) for the application as support material for thin-film sensors. In the first part, constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering, and subsequent lamination of the metal foil on the planar ceramic substrates. The accuracy of the assembled load cells corresponds to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the low-temperature co-fired ceramic (LTCC) substrates for fabrication of accurate strain gauges. In the second part, to facilitate the deposition of thin-film sensor structures to the LTCC substrates, pressure-assisted sintering step is modified using smooth setters instead of release tapes, which resulted in fabrication of substrates with low average surface roughness of 50 nm. Titanium thin films deposited on these substrates as test coatings exhibited low surface resistances of 850 Ω comparable to thin films on commercial alumina thin-film substrates with 920 Ω. The presented material design and advances in manufacturing technology are important to promote the development of high-performance thin-film strain gauges.
Recent advances in the development of high gauge factor thin-films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion and a low modulus of elasticity for the application as support material for thin-film sensors. Constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering and subsequent lamination of the metal foil on the planar ceramic substrates. The sensors were mounted on a strain gauge beam arrangement and load curves and creep behavior were evaluated. The accuracy of the assembled load cells correspond to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the LTCC substrates for fabrication of accurate strain gauges. To facilitate the deposition of thin film sensor structures onto the LTCC substrates, the pressure-assisted sintering technology has been refined. By the use of smooth setters instead of release tapes substrates with minimal surface roughness were fabricated. Metallic thin films deposited on these substrates exhibit low surface resistances comparable to thin films on commercial alumina thin-film substrates. The presented advances in material design and manufacturing technology are important to promote the development of high performance thin-film strain gauges.
Aufgrund ihres spezifischen Eigenschaftsprofils sind keramische Federn attraktiv für Spezialanwendungen in Maschinenanlagen, Metrologie und Sensortechnik. Durch Hartbearbeitung keramischer Hohlzylinder können Spiralfedern mit rechteckigem Windungsquerschnitt präzise gefertigt werden. Dabei kann durch gezielte Auslegung der Federgeometrie die Federkonstante über mehrere Größenordnungen variiert werden. Der Vortrag gibt einen Überblick über den Herstellungsprozess, verschiedene Eigenschaften keramischer Federn und Anwendungsbeispiele.
Roughening of zirconia dental implants is a common clinical practice to improve ingrowth behavior. It depends on the manufacturer of the implant at which stage of the manufacturing process and by which method the surface is roughened. Systematic studies on this topic are rarely found in the literature. Therefore, the influence of surface treatment on the strength of a dental zirconia was investigated as part of a research project on the development of ceramic implants. The material under test was a commercial zirconia consisting of a Y-TZP matrix and Ce-TZP inclusions in the sintered state. This material is characterized by a slightly higher fracture toughness and slightly reduced strength compared to typical 3Y-TZP. Sets of samples were sandblasted in the white-fired or sintered condition. The ball-on-three-ball-strength of these samples was measured and compared to the strength of as-fired samples and polished samples. The complete study was performed two times for validation of the results. It is found that the average strength of TZP ceramics differs by almost 500 MPa depending on the surface treatment. Conventionally sintered specimens with as-fired surface exhibit a strength of 880 MPa. Sandblasting in the white fired state reduces the strength to 690 MPa. Both polishing and sandblasting in the sintered condition result in an increase in strength to about 1180 MPa. Comparative microstructural investigations, roughness measurements and X-ray phase analyses were carried out to determine the causes of these huge differences in strength. These findings may challenge the practice of white body surface treatment and give reason for further investigations on other commercial dental TZP materials.
Glass-ceramic composites as insulation material for thermoelectric oxide multilayer generators
(2021)
Thermoelectric generators can be used as energy harvesters for sensor applications.
Adapting the ceramic multilayer technology, their production can be
highly automated. In such multilayer thermoelectric generators, the electrical insulation material, which separates the thermoelectric legs, is crucial for the performance of the device. The insulationmaterial should be adapted to the thermoelectric regarding its averaged coefficient of thermal expansion α and its sintering temperature while maintaining a high resistivity.
In this study, starting from theoretical calculations, a glass-ceramic Composite material adapted for multilayer generators fromcalciummanganate and Calcium cobaltite is developed. The material is optimized towards an α of 11 × 10−6 K−1 (20–500◦C), a sintering temperature of 900◦C, and a high resistivity up to 800◦C.
Calculated and measured α are in good agreement. The chosen glass-ceramic composite with 45 vol.% quartz has a resistivity of 1 × 107 Ωcm and an open porosity of <3%. Sintered multilayer samples from tape-cast thermoelectric oxides and screen-printed insulation show only small reaction layers. It can be concluded that glass-ceramic composites are a well-suited material class for insulation layers as their physical properties can be tuned by varying glass composition or dispersion phases.
The relationship between fracture toughness and Yttria content in modern zirconia ceramics was revised. For that purpose, we evaluated here 10 modern Y2O3-stabilized zirconia (YSZ) materials currently used in biomedical applications, namely prosthetic and implant dentistry. The most relevant range between 2-5 mol% Y2O3 was addressed by selecting from conventional opaque 3 mol% YSZ up to more translucent compositions (4-5 mol% YSZs). A technical 2YSZ was used to extend the range of our evaluation. The bulk mol% Y2O3 concentration was measured by X-Ray Fluorescence Spectroscopy. Phase quantification by Rietveld refinement considered two tetragonal phases or an additional cubic phase. A first-account of the fracture toughness (KIc) of the pre-sintered blocks is given, which amounted to 0.4 – 0.7 MPa√m. In the fully-densified state, an inverse power-law behavior was obtained between KIc and bulk mol% Y2O3 content, whether using only our measurements or including literature data, challenging some established relationships. A linear relationship between KIc and the fraction of the transformable t-phase was established within the range of 30–70 vol%.
Der Vortrag gibt einen Überblick über die Materialklasse Keramik, insbesondere Technische Keramik. Nach einem kurzen Überblick über typische Anwendungen und Werkstoffe wird die keramische Prozesskette erläutert. Am Beispiel von Festigkeit wird der für Keramik typische, enge Zusammenhang zwischen Technologie, Mikrostruktur und Eigenschaften herausgearbeitet. Daraus werden Anforderungen für eine erfolgreiche Digitalisierung abgeleitet.
This study combines three different approaches to lower the sintering temperature of Sm-doped CaMnO3 to save energy in production and facilitate co-firing with other low-firing oxides or metallization. The surface energy of the powder was increased by fine milling, sintering kinetics were enhanced by additives, and uniaxial pressure during sintering was applied. The shrinkage, density, microstructure, and thermoelectric properties were evaluated. Compared to micro-sized powder, the use of finely ground powder allows us to lower the sintering temperature by 150 K without reduction of the power factor. By screening the effect of various common additives on linear shrinkage of CaMnO3 after sintering at 1100 ○C for 2 h, CuO is identified as the most effective additive. Densification at sintering temperatures below 1000 ○C can be significantly increased by pressure-assisted sintering. The power factor at room temperature of CaMnO3 nano-powder sintered at 1250 ○C was 445 μW/(m K2). Sintering at 1100 ○C reduced the power factor to 130 μW/(m K2) for CaMnO3 nano-powder, while addition of 4 wt.% CuO to the same powder led to ∼290 μW/(m K2). The combination of fine milling, CuO addition, and pressureassisted sintering at 950 ○C resulted in a power factor of ∼130 μW/(m K2). These results show that nano-sized powder and CuO addition are successful and recommendable strategies to produce CaMnO3 with competitive properties at significantly reduced temperatures and dwell times.
Dielectric breakdown of insulators is a combined electrical, thermal, and mechanical failure. The exact breakdown mechanism in ceramics and the formulation of useful models are still subject of investigation. Recent studies highlighted that several experimental aspects of dielectric breakdown strength testing affect the test results, and thus impede the recognition of fundamental principles.
Excess field strength near the electrode can lead to premature breakdown in the insulating liquid. This would cause superficial damage to the test specimen and thus falsify the measurement results.
The field strength distribution is influenced by the ratio of permittivity of the sample and the surrounding insulating liquid. Premature breakdown depends on the breakdown strength of the liquid and the actual test voltage. The test voltage again depends on the specimen thickness.
To systematically investigate these relations, a numerical simulation study (FEM) of the electric field distribution in a typical testing rig with cylindrical electrodes was performed. The permittivity of the sample and the insulating liquid was parameterized, as well as the sample thickness. The electric field distribution was calculated for increasing test voltage. Field strength maxima are compared to experimental breakdown strength of typical insulating liquids and experimental breakdown locations on alumina. Strategies are discussed to adjust the insulation liquid and the sample thickness to reduce the influence of the testing setup on the dielectric breakdown strength results.
Advancements in pressure-assisted sintering technology for low temperature co-fired ceramics (LTCC)
(2016)
Steadily increasing demands on design and dimensional accuracy of ceramic multilayer modules, as well as the processing of new materials, require continuous improvements of manufacturing technology, especially thermal processes. The capabilities of pressure-assisted sintering (PAS) for the manufacturing of highly integrated low temperature co-fired ceramics (LTCC) multilayer have been considerably extended in the last years by procedural and device-related advancements. A lambda probe has been integrated in a sintering press prototype to monitor and control the process atmosphere. Thereby, the development of oxygen partial pressure during binder burnout of real modules can be observed. On the other hand, the oxygen partial pressure can be regulated during densification, for example to prevent diffusion of silver from circuit paths into the surrounding LTCC. Thin-film capable surfaces can be produced without post-processing by using setter plates made of glass-like carbon in an advanced PAS process under nitrogen. A newly developed advancement of this approach enables in-situ hot-embossing of LTCC during PAS by using structured glass-like carbon molds. The prototype press is further extended by a sensitive displacement transducer for monitoring the thickness shrinkage of real modules with an edge length of up to 8 inch.
Plane LTCC substrates can be produced in zeroshrinkage technology by pressure-assisted sintering. The application of axial pressure during sintering supports densification, enhances cofiring of different materials, and restrains deformation. However, the sintered surfaces are affected by the release tapes and by the setters used in the pressure-assisted sintering process. In this study, the effect of release tape particle size on the surface properties of sintered substrates was investigated. Moreover, the substitution of release tape by the use of a vitreous carbon setter was tested. Surface roughness and sheet resistances of metallic thin films on the respective samples were determined. It was found that the roughness of the substrates is not directly correlated with the adequacy of the surface for thin-film deposition. Compared with a freely sintered sample with an average roughness (Ra) of 0.31 μm, pressure-assisted sintering created smoother surfaces using finegrained release tapes (Ra = 0.18 μm) and rougher surfaces using coarse release tapes (Ra = 0.46 μm). Still, sheet resistances were higher on all sinter-pressed samples. The vitreous carbon setter created unusual trenched surface structures, characterized by varying roughness values and intermediate sheet resistances on the LTCCs tested.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot-Embossing
(2015)
Druckunterstützendes Sintern glaskeramischer Komposite mit Opferfolie aus hexagonalem Bornitrid
(2015)
Pressure-assisted sintering (PAS) is an established procedure for the production of low-temperature cofired ceramics (LTCC) without lateral shrinkage and minimal shrinkage tolerances for automotive and high-frequency applications. To develop a feasible model for the prediction of densification during that process, master sintering curves (MSCs) for the commercial LTCC DP951 were generated from thermomechanical analysis (TMA) data in the pressure regime from 2 to 500 kPa. Strain mainly related to creep deformation of the LTCC was identified by evaluation of the strain rate and was discarded for the determination of MSC parameters. It was found that no creep occurred at any pressure up to a relative density of 0.9. Different pressure levels can be modeled with the same activation energy of 400 kJ/mol. Densification curves predicted by the model were in good agreement with experimental data. Based on MSCs, the pressure-assisted master sintering surface was compiled to illustrate the influence of pressure on densification. The results show that the MSC approach is a suitable method to feasibly predict the densification of LTCC during PAS.
New Setter Materials for the Pressure-Assisted Sintering of Low Temperature Co-Fired Ceramics
(2015)
Prägeverfahren bieten eine interessante Alternative zur Strukturierung keramischer Folien und Laminate. Im Gegensatz zur etablierten Stanz- oder Laserbearbeitung von Einzelfolien sind damit einerseits Strukturtiefen realisierbar, die nicht einem Vielfachen der Einzelfoliendicke entsprechen, andererseits können Strukturierungsgrade erzielt werden, bei denen perforierte Einzelfolien nicht mehr handhabbar sind. Heißprägen grüner Folien und Laminate erfolgt bei Temperaturen um 130 °C mit Metallstempeln. Die plastische Verformung erfolgt zeitabhängig. Dabei sind die Fließeigenschaften des polymeren Binders der Grünfolie maßgeblich für die Konturtreue der Prägung. Randeinzug und Gründichtegradienten um den Eindruck können zu Defekten im Sintergefüge führen. Je nach Sinterverfahren muss die Schwindung der geprägten Struktur berücksichtigt werden, eine Kombination dieses Verfahrens mit zero-shrinkage Techniken ist aber möglich. Sinterprägen stellt eine Erweiterung der Drucksintertechnologie für glaskeramische Komposite dar. Dabei wird ein Pressstempel aus glasartigem Kohlenstoff während des Brandes in die erweichte Glasphase des Komposits gedrückt. Die Abformung erfolgt durch viskosen Fluss der Glasphase. Mit Kenntnis des Dichte- und Viskositätsverlaufs des Werkstoffs kann das Verfahren so gestaltet werden, dass die Pressform konturtreu abgeformt wird. Mittels Sinterprägen lassen sich auch erhabene Strukturen realisieren, wobei diese häufig eine erhöhte Porosität aufweisen.
Calcium cobaltite is one of the most promising oxide p-type thermoelectric materials. The solid-state reaction (or calcination, respectively), which is well known for large-scale powder synthesis of functional materials, can also be used for the synthesis of thermoelectric oxides. There are various calcination routines in literature for Ca3Co4O9 powder synthesis, but no systematic study has been done on the influence of calcination procedure on thermoelectric properties. Therefore, the influence of calcination conditions on the Seebeck coefficient and the electrical conductivity was studied by modifying calcination temperature, dwell time, particle size of raw materials and number of calcination cycles. This study shows that elevated temperatures, longer dwell times, or repeated calcinations during powder synthesis do not improve but deteriorate the thermoelectric properties of calcium cobaltite. Diffusion during calcination leads to idiomorphic grain growth, which lowers the driving force for sintering of the calcined powder. A lower driving force for sintering reduces the densification. The electrical conductivity increases linearly with densification. The calcination procedure barely influences the Seebeck coefficient. The calcination procedure has no influence on the phase formation of the sintered specimens.
Today, more than 12% of the primary energy is lost in the form of waste heat. Thermoelectric generators (TEGs) can convert waste heat directly into electrical power by utilizing the Seebeck effect. The performance of such a generator is defined by a dimensionless figure of merit ZT of the thermoelectric pairs and the resistance R of the metallic contacts between these pairs. The figure of merit of thermoelectric oxides is considerably smaller compared to semiconductors. Still, thermoelectric oxides like calcium cobaltite (Ca3Co4O9) are attractive for applications at elevated temperatures in air. In contrast to the established π-type architecture of common TEGs, tape casting and multilayer technology may be applied for cost-effective manufacturing of oxide TEGs. Promising demonstrations of multilayer TEGs have been published in the last years. Still, the development of reliable and scalable manufacturing processes and proper material combinations is necessary. The aim of our project is to evaluate the feasibility of low temperature co-fired ceramics (LTCC) technology for a practical manufacturing of oxide multilayer TEGs of Ca3Co4O9 (p-type) and calcium manganate (CaMnO3, n-type). Ca3Co4O9 exhibits an undesired phase decomposition at 926 °C. Because of that, the application of sintering strategies and interconnect concepts well known from LTCC technology is a promising approach. We present results of pressure-assisted sintering of Ca3Co4O9 multilayer at 900 °C and axial pressures of up to 7.5 MPa. Ca3Co4O9 was produced by solid state reaction of CaCO3 and cobalt(II,III)oxide at 900 °C. Green tapes were prepared by a doctor-blade process, manually stacked and laminated by uniaxial thermocompression. Sintering was conducted in a LTCC sintering press between SiC setter plates. The thickness shrinkage was recorded by an in-situ technique. After sintering under 7.5 MPa, the microstructure of the single phase material shows a high density of 95 % and an advantageous alignment of the platelet grains. This results in good electrical conductivity and a comparatively high ZT of 0.018 at room temperature. However, the lowering of CaMnO3 sintering temperature from above 1200 °C to below 920 °C remains a challenge. To select a proper metal paste for interconnections of an oxide TEG, several pastes have been investigated regarding contact resistance of internal and external (soldered) connections in a preliminary study. Commercial pastes containing Ag, Au, Au/Pt, Ag/Pd, and Ag/Pd/Bi were manually applied and post-fired on sintered test bars of Ca3Co4O9 and CaMnO3 at 900 °C for 2 h. All tested pastes formed mechanically stable metallization after firing. For resistance measurement, 4-wire method and a custom-made probe head were used. The contacts on Ca3Co4O9 exhibit significantly (2-sample t-test, α = 5%) higher resistance compared to contacts on CaMnO3. Pure silver paste exhibits the lowest resistance for internal contacts on both materials, lower than 5 mΩ on CaMnO3. Ag/Pd/Bi paste resulted in conspicuously high variance of resistance. EDX analyses clarified an enrichment of Bi in the thermoelectric material near the interface and thereby the formation of an oxide layer with probably high electrical resistance. The thickness of that layer varies with the thickness of metallization. In conclusion, the use of Bi containing pastes is not advisable. Pure Ag paste shows the best results regarding resistance and solderability.
The sintering behavior and the thermoelectric performance of Ca3Co4O9 multilayer laminates were studied, and a multilayer thermoelectric generator was fabricated. Compacts and multilayer samples with anisotropic microstructure and residual porosity were obtained after conventional sintering at 920 °C, whereas dense and isotropic multilayer samples were prepared by firing at 1200 °C and reoxidation at 900 °C. A hot-pressed sample has a dense and anisotropic microstructure. Samples sintered at 920 °C exhibit low electrical conductivity due to the low density, whereas the Seebeck coefficient is not sensitive to preparation conditions. However, thermal conductivity of multilayers is very low, and, hence acceptable ZT values are obtained. A ransversal multilayer thermoelectric generator (TMLTEG) was fabricated by stacking layers of Ca3Co4O9 green tapes, AgPd conductor printing, and co-firing at 920 °C. The TMLTEG has a power output of 3 mW at ΔT =200 K in the temperature interval of 25 °C to 300 °C.
Dielectric strength testing of ceramics is simple and yet challenging. The execution of a breakthrough voltage measurement of a given sample is fast and straightforward. ASTM D149 describes the standardized procedure. But, there are versatile effects of test conditions and sample properties that affect the result of such a measurement. As one example, ASTM D149 allows different sizes of test electrodes and does not unambiguously prescribe the condition of the electrodes. Thus, different electrode configurations are used in the field. We conducted several test series on alumina samples to comprehensively quantify the effect of test conditions and sample properties on dielectric strength results. In our study, testing of alumina substrates using different electrode configurations resulted in differences of mean values of up to 20%. Further test series on alumina focused on the effect of voltage ramp rate. The results are complemented by calculations of failure probability at different voltage levels and corresponding withstand voltage tests. We conclude that a communication and comparison of single dielectric strength values is insufficient and may be misleading. A meaningful comparison of dielectric strength studies from different sources requires a thorough consideration of test conditions.
The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
Practical breakdown voltage calculations using dielectric breakdown strength reference values
(2020)
Dielectric breakdown is a catastrophic failure of ceramic substrates and insulators. The use of dielectric breakdown strength (DBS) reference values for the dimensioning of such components is not straightforward, as the DBS depends on sample thickness and electrode area. This fact also hampers a valid comparison of data taken from different literature sources. Based on the empirically confirmed proportionality of DBS to the reciprocal square root of sample thickness and an approach to account for the influence of electrode area on the failure probability, a practical equation is derived to calculate the breakdown voltage for arbitrary sample thickness and electrode area from one set of DBS reference data. To validate the equation, the AC DBS of commercial alumina substrates with thicknesses ranging from 0.3 mm to 1.0 mm was performed using different printed electrodes with varying areas. The breakdown voltages comprise a range from 18 kV for thick samples to 8.5 kV for thin samples, resulting in DBS values from 17 kV/mm for 1.0 mm thick samples to 29 kV/mm for 0.3 mm thin samples, all made from the same material. The influence of electrode area is comparatively smaller. The results calculated with the proposed equation are in reasonable accordance with the measured data. Thus, the equation can be applied for a proper comparison of literature DBS data measured in different setups and for a reasonable estimation of breakdown voltages in DBS tests and applications based on reference data.
The influence of the atomization technique on the suitability of granules for dry pressing is the focus of the presented investigations. Therefore, destabilized alumina, zirconia, and zirconia toughened alumina (ZTA) slurries were spray dried and the obtained granules were used to fabricate green and finally sintered bodies for evaluation.
Granules made in a laboratory spray dryer with a two-fluid nozzle served as a reference. An ultrasonic atomizer was integrated into the same spray dryer and the influence on the granule properties was evaluated. Untapped bulk density, granule size distribution, and flowability are among the evaluated granule-related properties as well as the granule yield which is used as an indicator of the process efficiency.
Yield and flowability as most important granule properties are clearly improved when atomization is realized with ultrasound. The investigated sinter body properties include porosity, sinter body density, and biaxial strength and are as well positively affected by switching the atomization technique to ultrasound. Therefore, the Approach to improve the compressibility of granules by ultrasonic atomization, which leads to an improved microstructure, density, and strength of sintered bodies, has proven to be successful for single-component ceramics (alumina and zirconia) as well as for the multicomponent ceramic ZTA.
A novel process to structure the surfaces of low temperature co-fired ceramics (LTCC) is presented. Lowered and raised structures are formed by hot-embossing with glass-like carbon molds during pressure-assisted sintering. Molding is driven by viscous flow of the LTCC glassy phase above the glass transition temperature. For accurate molding of embossments on the LTCC surface, proper filling of cavities in the glass-like carbon mold is necessary. Therefore, de-airing of the mold cavity has to be assured. Two strategies have been investigated: (i) hot-embossing at 850 °C after termination of LTCC shrinkage with de-airing through vent holes in the mold; and (ii) hot-embossing of open porous LTCC at 775 °C with dense molds, de-airing through pore channels in the LTCC, and subsequent densification by further heating to 850 °C. Circular embossments with 10 mm diameter were molded on a commercially available LTCC (Ceramtape GC, CeramTec GmbH, Marktredwitz, Germany). The sintered height was measured using optical profilometry. Image processing was used to evaluate porosity distributions in the sintered structures. The influence of embossing temperature on LTCC viscosity and mold filling behavior is discussed. Successful molding of 47 µm high raised grids and characters by hot embossing with 0.41 MPa at 775 °C and further heating to 850 °C under constant load is demonstrated. Thereby, the high potential of hot-embossing for precise structuring of LTCC surfaces is illustrated.
Glass-ceramic composite multilayer structures - modeling of densification and shrinkage mismatch
(2016)
Low temperature co-fired ceramics (LTCC) are glass-ceramic composites that are processed by tape casting and multilayer technology to create multilayer circuit boards and electronic packages for high frequency applications, microsystems, and sensors. Pressure-assisted sintering (PAS) enables the densification of LTCC without lateral shrinkage, and thereby the manufacturing of miniaturized modules with minimal shrinkage tolerances. Co-firing of LTCC with other functional ceramics facilitates the implementation of innovative module concepts. The master sintering curve model is a useful tool to supplement the empirical optimization of such sintering processes. Two applications of the model are presented. Firstly, an algorithm is deduced that allows the simulation of shrinkage mismatch in a combined multilayer structure. Based on this simulation, an optimized process for the co-firing of LTCC and ferrite is derived. Secondly, the pressure-assisted sintering of LTCC is modeled. A comprehensive description of the densification behavior of LTCC during PAS is thereby possible.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot Embossing
(2015)
A novel technology for the structuring of low temperature co-fired ceramic (LTCC) surfaces is introduced. The commercial LTCC Ceramtape GC is shaped in a zero-shrinkage process by embossing a glass-like carbon mold into the softened LTCC during pressure-assisted sintering. Diverse raised and lowered structures including rings, grids, and characters were fabricated. It was found that de-airing of mold cavities is crucial for the molding of embossments. De-airing is possible through pore channels in the LTCC if embossing is performed at intermediate temperatures. The influence of LTCC viscosity on the mold filling behavior during the formation of raised structures is discussed. For accurate molding and proper densification of the LTCC, hot embossing with 0.41 MPa at 775 °C and subsequent heating under load to 850 °C is proposed. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised bars and characters is demonstrated. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
Calcium cobaltite (Ca3Co4O9) is considered as one of the most promising thermoelectric p-type oxides for energy harvesting applications at temperatures above 500 °C. It is challenging to sinter this material as its stability is limited to 920 °C. To facilitate a practicable and scalable production of Ca3Co4O9 for multilayer generators, a systematic study of the influence of powder calcination, Bi-doping, reaction sintering, and pressure-assisted sintering (PAS) on microstructure and thermoelectric properties is presented. Batches of doped, undoped, calcined, and not calcined powders were prepared, tape-cast, and sintered with and without uniaxial pressure at 900 °C. The resulting phase compositions, microstructures and thermoelectric properties were analysed. It is shown that the beneficial effect of Bi-doping observed on pressureless sintered samples cannot be transferred to PAS. Liquid phase formation induces distortions and abnormal grain growth. Although the Seebeck coefficient is increased to 139 µV/K by Bi-doping, the power factor is low due to poor electrical conductivity. The best results were achieved by PAS of calcined powder. The dense and textured microstructure exhibits a high power factor of 326 µW/mK² at 800 °C but adversely high thermal conductivity in the relevant direction. The figure of merit is higher than 0.08 at 700 °C.
The ProboStat is a multi-purpose measurement cell suitable for various electrical and physical measurements under different atmospheres and at high temperatures. Disc and bar shaped samples are sandwiched between platinum electrodes at the top of the tubular cell. The gas tight assembly can be inserted into a furnace. Different gases can be flushed through the tube. For this study, a ProboStat was adapted to measure volume resistivity of ceramic insulators at high temperatures according to standards.
The standardized measurement of volume resistivity of ceramic insulators requires the consideration of many specifications including sample diameter, thickness, electrode design, and the proportion of these characteristics. Measurements are ideally performed in a state of dielectric equilibrium. The time-related slope of resistivity of a specific sample follows a power function. Thus, care must be taken when choosing a charge time or defining the duration of a measurement. As fringing of the guarded electrode occurs under high voltage, the effective electrode area for evaluation of the results should be corrected with respect to sample thickness and electrode design. The demands of effective standards on sample geometry and electrode design are stricter for room temperature measurements than for high temperature measurements.
To perform high temperature measurements on ceramic samples that also fulfill the demands on room temperature measurements, a ProboStat was equipped with a dedicated large sample setup for discs with diameters of up to 60 mm. The volume resistivity of different alumina samples was first measured at room temperature in a standard test fixture and then compared to results obtained with the ProboStat. All measurements were performed for at least 100 min using a 26 mm guarded electrode. High temperature measurements at 500 °C were performed using the same samples. Room temperature values obtained with the standard test fixture are in the order of 10^17 Ohm·cm. The quantitative effect of electrode area correction is presented. Practical issues related to the use of the multi-purpose cell are addressed. These include electrode material selection, application of electrodes, and compensation of leakage currents. High temperature results of volume resistivity of the different alumina samples are presented. The validity is discussed with respect to the suitability of the multi-purpose cell for such measurements.
Ceramic springs offer versatile possibilities for load bearing or sensor applications in challenging environments. Although it may appear unexpected, a wide range of spring constants can be implemented by material selection and especially by the design of the spring. Based on a rectangular cross-section of the windings, it is possible to design a spring geometry that generates the desired spring constant simply by choosing appropriate diameter, height, widths, and number of windings. In a recent research project the calculation of helical compression springs made of rectangular steel (German standard DIN 2090) was applied for the design of ceramic springs. A manufacturing technology has been worked out to fabricate such springs from hollow cylinders of several highly dense technical ceramics by milling. Ceramic springs with precise rectangular section, without edge damage, and mean surface roughness smaller than 0.2 µm were produced after parameter optimization. Tolerances of less than 10 µm were achieved regarding spring diameter, height, and width of cross section. It is shown that the calculations outlined in the standard are valid for a variety of ceramic materials as well. Demonstrator springs with a wide range of spring constants have been fabricated, including zirconia springs with 0.02 N/mm, alumina springs with 1 N/mm and Si3N4 springs with 5 N/mm. A reproducibility study of six zirconia springs with a constant of 0.3 N/mm showed a relative difference in spring constants of less than +/- 1 %. This combination of a valid calculation approach for spring geometry and a reliable manufacturing technology allows for purposeful development and fabrication of ceramic springs with precise mechanical properties and superior chemical stability.
Dielectric breakdown of ceramics is widely believed to originate from microstructural defects. Still, there is no commonly accepted model for the origin and process of dielectric failure that covers all observed phenomena and dependencies. In analogy to mechanical strength, the Weibull distribution is commonly used to evaluate dielectric strength data. This works well for a given group of specimens with constant geometry. But unlike mechanical strength, dielectric strength scales with the inverse square root of sample thickness. This cannot be explained by the classic Weibull concept. The Griffith type energy release rate model of dielectric breakdown proposed by Schneider is based on space charge injection and conducting filaments from the sample surface. This model incorporates the distinct thickness dependence and the pronounced influence of surface defects. Based on this model and the classic Weibull probability of failure, Schneider’s group theoretically derived a probability of breakdown that predicts an increase of failure probability with increasing electrode area. In our study we tested this model with dielectric strength data measured on dense alumina samples using different electrode areas. Weibull modulus and characteristic dielectric strength (scale parameter) were determined for a set of measurements using small electrodes. These values were used to calculate the failure probability under large electrodes according to the model. The calculated data excellently fits the measured values. Thus, our experiments substantiate the assumptions made in the breakdown model and the significance of surface defects for dielectric failure.
Dielectric strength testing of ceramics can be performed with various setups and parameters. Comparisons of results from different sources are often not meaningful, because the results are strongly dependent on the actual testing procedure. The aim of this study is to quantify the influence of voltage ramp rate, electrode size, electrode conditioning, and sample thickness on the measured AC dielectric strength of a commercial alumina. Mean values, Weibull moduli, and failure probabilities determined in standardized short time tests are evaluated and related to withstand voltage tests. Dielectric strength values in the range from 21.6 to 33.2 kV/mm were obtained for the same material using different testing procedures. Short time tests resulted in small standard deviations (< 2 kV/mm) and high Weibull moduli around 30, while withstand tests at voltage levels with low and virtual zero failure probability in short time tests resulted in large scatter of withstand time and Weibull moduli < 1. The strong decrease in Weibull moduli is attributed to progressive damage from partial discharge and depolarization during AC testing. These findings emphasize the necessity of a thorough documentation of testing procedure and highlight the importance of withstand voltage tests for a comprehensive material characterization.
The wireless high-frequency technology requires a robust, cost-effective, and highly integrated substrate technology offering the capability for areas of tailored permittivity. The wet-chemical porosification of low temperature co-fired ceramics (LTCC) substrates offers such an approach by locally embedding air. Porosification of LTCC in both extremely acidic and alkaline media has been investigated in previous works. However, for improving the available knowledge on the porosification of LTCC with H3PO4 as a standard and a widely used etching solution, the impact of solution concentration was systematically investigated and a substantial improvement in the etching performance was achieved. Moreover, in the present study, for the first time, the intermediate pH values, and the impact of pH as a key parameter on the etching process have been investigated. For this purpose, the applicability of phosphate buffer solution (PBS) as a prospective novel etchant mixture for the porosification of a commercially available LTCC tape (Ceramtape GC) was explored. Valuable information about surface morphology, crystalline composition, and the pore structure of the etched LTCCs was gathered employing scanning electron microscopy, transmission electron microscopy, X-ray diffraction analysis, and mercury porosimetry measurements. Based on these findings, the performance of PBS-based etchant systems towards the generation of porous LTCCs combining high depths of porosification with acceptable surface characteristics for subsequent metallization is demonstrated. Based on the obtained results, by application of a 0.2 mol L−1 solution of PBS, the effective relative permittivity of test samples with a thickness of approximately 600 µm and a porosification depth of 186 µm from each side, could be reduced up to 10% of its initial “as fired” value. Also, based on the measurement results and by measuring the depth of porosification, the permittivity of the etched layer was estimated to show a reduction of up to 22% compared to the initial “as fired” value.
Calcium cobaltite Ca3Co4O9, abbreviated Co349, is a promising thermoelectric material for high‐temperature applications in air. Its anisotropic properties can be assigned to polycrystalline parts by texturing. Tape casting and pressure‐assisted sintering (PAS) are a possible future way for a cost‐effective mass‐production of thermoelectric generators. This study examines the influence of pressure and dwell time during PAS at 900°C of tape‐cast Co349 on texture and thermoelectric properties. Tape casting aligns lentoid Co349. PAS results in a textured Co349 microstructure with the thermoelectrically favorable ab‐direction perpendicular to the pressing direction. By pressure variation during sintering, the microstructure of Co349 can be tailored either toward a maximum figure of merit as required for energy harvesting or toward a maximum power factor as required for energy harvesting. Moderate pressure of 2.5 MPa results in 25% porosity and a textured microstructure with a figure of merit of 0.13 at 700°C, two times higher than the dry‐pressed, pressureless‐sintered reference. A pressure of 7.5 MPa leads to 94% density and a high power factor of 326 µW/mK2 at 800°C, which is 11 times higher than the dry‐pressed reference (30 MPa) from the same powder.
Ceramic springs combine attractive properties for applications in machinery, metrology, and sensor technology. They are electrically insulating, non-magnetic, provide a linear stress-strain behavior, and are stable at high temperatures and in corrosive environments. Generally, the precise dimensioning of a ceramic spring with respect to the spring constant is challenging. Different models are described, but many of these calculations do not match the actual spring properties. We demonstrate a reliable approach for the dimensioning and manufacturing of helical compression springs with a rectangular winding cross-section. Based on the German standard DIN 2090, which is referring to metallic springs, the spring constant can be calculated based on shear modulus, diameter, height, widths, and number of windings. Different ceramic springs were produced by milling of sintered hollow cylinders of zirconia, alumina and silicon nitride. The experimental spring constants are in very good agreement with the calculated values. Spring constants of zirconia springs were varied over three orders of magnitude between 0.02 N/mm and 5 N/mm by purposeful adaption of the spring geometry. The combination of dimensioning based on DIN 2090 and precise hard machining offers a reliable technology for the fabrication of tailored ceramic springs for special applications.
The dielectric breakdown strength of ceramics strongly depends on the test conditions. Thus, standardized test procedures and thorough documentation are indispensable. However, during dielectric strength testing the breakdown often occurs near the electrode edge or even outside the specified electrode area. This behavior is similarly observed for printed and cylindrical electrodes. The aim of the presented study was to calculate the electric field strength distribution in a ball-on-plate testing setup for metallized samples and to correlate the field distribution with the observed breakdown locations. Small misalignments in the test setup were also considered in the simulations. Furthermore, the field strength at the breakdown Location should be compared to the experimentally determined dielectric strength. Therefore, Finite Element Models of several test conditions with varying printed electrode areas and sample thicknesses were created and electrostatic calculations of the electric field Distribution were performed. The simulation results were compared to experimental data. Alumina (96 %) was used as test material. The calculations show that the electric field strength maxima match the experimentally observed locations of breakdown. Without any fitting of the model, the maximum calculated field strength is in reasonable agreement with the experimental dielectric strength. The FE analysis is a helpful tool to understand the observations in experimental dielectric strength testing.
Sintern
(2018)
Unter Sintern versteht man allgemein die Überführung eines aus Pulver geformten Rohlings in ein Formteil mit angestrebter Mikrostruktur bzw. gewünschten Gebrauchseigenschaften durch thermische Prozesse. In diesem Kapitel werden die Grundlagen zu Triebkräften und Kinetik sowie die prinzipiellen Mechanismen für Stofftransport und Verdichtung vorgestellt. Die verschiedenen Sintermechanismen Festphasensintern, Flüssigphasensintern und Reaktionssintern werden erläutert und mit einem Überblick über Drucksinterverfahren ergänzt. Abschließend wird ein Überblick über technologische Einflussfaktoren auf die Sinterung gegeben.
The development of competitive thermoelectric generators using oxide ceramics and multilayer technology requires the investigation of suitable sintering procedures. The sintering of Ca3Co4O9, which is the most promising p-type oxide regarding its figure of merit, is a special challenge, as the material starts to decompose at 926 °C. Pressure-assisted sintering (PAS), as known from large-scale production of low temperature co-fired ceramics, was used to sinter multilayers of Ca3Co4O9 green tape at 900 °C with different pressures and dwell times. In-situ shrinkage measurements, microstructural investigations and electric measurements were performed. Relative density increases from 57.4 % after free sintering for 24 h to 93.7 % after 2 h of PAS with 10 MPa axial load. The combination of tape casting and PAS induces a pronounced alignment of the anisotropic grains. In comparison to freely sintered multilayers, the electrical conductivity in the casting direction is thereby strongly increased by a factor of 5. With respect to dry-pressed bars, the improvement amounts to a factor of 15. This study shows that PAS is a proper technique to produce dense Ca3Co4O9 panels with good thermoelectric properties similar to hot-pressed tablets, even in large-scale production.