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Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot Embossing
(2015)
A novel technology for the structuring of low temperature co-fired ceramic (LTCC) surfaces is introduced. The commercial LTCC Ceramtape GC is shaped in a zero-shrinkage process by embossing a glass-like carbon mold into the softened LTCC during pressure-assisted sintering. Diverse raised and lowered structures including rings, grids, and characters were fabricated. It was found that de-airing of mold cavities is crucial for the molding of embossments. De-airing is possible through pore channels in the LTCC if embossing is performed at intermediate temperatures. The influence of LTCC viscosity on the mold filling behavior during the formation of raised structures is discussed. For accurate molding and proper densification of the LTCC, hot embossing with 0.41 MPa at 775 °C and subsequent heating under load to 850 °C is proposed. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised bars and characters is demonstrated. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
A wide range of solid-state synthesis routes for calcium manganate is reported in the literature, but there is no systematic study about the influence of the solid-state synthesis conditions on thermoelectric properties. Therefore, this study examined the influence of calcination temperature and calcination cycles on the Seebeck coefficient, electrical conductivity, and thermal conductivity. Higher calcination temperatures and repeated calcination cycles minimized the driving force for sintering of the synthesized powder, leading to smaller shrinkage and lower densities of the sintered specimens. As the electrical conductivity increased monotonously with increasing density, a higher energy input during calcination caused deterioration of electrical conductivity. Phase composition and Seebeck coefficient of sintered calcium manganate were not influenced by the calcination procedure. The highest thermoelectric properties with the highest power factors and figures of merit were obtained by means of reaction-sintering of uncalcined powder.
Shrinkage measurements of miniaturized low temperature co-fired ceramics (LTCC) samples under load typically lead to collapsing of the samples, which hampers the characterization of shrinkage up to full densification. In this paper, a measurement setup is presented, which allows for in situ shrinkage measurements of practical, large LTCC panels during pressure-assisted sintering in a sintering press. The shrinkage behavior of two commercial LTCC systems (GreenTape 951 and Ceramtape GC) has been measured under loads of up to 1 MPa. No crushing of the specimens was observed and reproducible characterization of shrinkage up to full densification has been performed. Based on comparisons to thermomechanical analyzer measurements in this and other studies, it was found that the in situ approach is much better suited for shrinkage characterization of LTCC under load.
Reproducibility and accuracy of the method are discussed and practical as well as more academic applications are proposed.
Plane LTCC substrates can be produced in zero-shrinkage technology by pressure-assisted sintering. The application of axial pressure during sintering supports densification, enhances cofiring of different materials, and restrains deformation. However, the sintered surfaces are affected by the release tapes and by the setters used in the pressure-assisted sintering process. In this study, the effect of release tape particle size on the surface properties of sintered substrates was investigated. Moreover, the substitution of release tape by the use of a vitreous carbon setter was tested. Surface roughness and sheet resistances of metallic thin films on the respective samples were determined. It was found that the roughness of the substrates is not directly correlated with the adequacy of the surface for thin-film deposition. Compared with a freely sintered sample with an average roughness (Ra) of 0.31 μm, pressure-assisted sintering created smoother surfaces using fine-grained release tapes (Ra = 0.18 μm) and rougher surfaces using coarse release tapes (Ra = 0.46 mm). Still, sheet resistances were higher on all sinter-pressed samples. The vitreous carbon setter created unusual trenched surface structures, characterized by varying roughness values and intermediate sheet resistances on the LTCCs tested.
Plane LTCC substrates can be produced in zeroshrinkage technology by pressure-assisted sintering. The application of axial pressure during sintering supports densification, enhances cofiring of different materials, and restrains deformation. However, the sintered surfaces are affected by the release tapes and by the setters used in the pressure-assisted sintering process. In this study, the effect of release tape particle size on the surface properties of sintered substrates was investigated. Moreover, the substitution of release tape by the use of a vitreous carbon setter was tested. Surface roughness and sheet resistances of metallic thin films on the respective samples were determined. It was found that the roughness of the substrates is not directly correlated with the adequacy of the surface for thin-film deposition. Compared with a freely sintered sample with an average roughness (Ra) of 0.31 μm, pressure-assisted sintering created smoother surfaces using finegrained release tapes (Ra = 0.18 μm) and rougher surfaces using coarse release tapes (Ra = 0.46 μm). Still, sheet resistances were higher on all sinter-pressed samples. The vitreous carbon setter created unusual trenched surface structures, characterized by varying roughness values and intermediate sheet resistances on the LTCCs tested.
A novel process to structure the surfaces of low temperature co-fired ceramics (LTCC) is presented. Lowered and raised structures are formed by hot-embossing with glass-like carbon molds during pressure-assisted sintering. Molding is driven by viscous flow of the LTCC glassy phase above the glass transition temperature. For accurate molding of embossments on the LTCC surface, proper filling of cavities in the glass-like carbon mold is necessary. Therefore, de-airing of the mold cavity has to be assured. Two strategies have been investigated: (i) hot-embossing at 850 °C after termination of LTCC shrinkage with de-airing through vent holes in the mold; and (ii) hot-embossing of open porous LTCC at 775 °C with dense molds, de-airing through pore channels in the LTCC, and subsequent densification by further heating to 850 °C. Circular embossments with 10 mm diameter were molded on a commercially available LTCC (Ceramtape GC, CeramTec GmbH, Marktredwitz, Germany). The sintered height was measured using optical profilometry. Image processing was used to evaluate porosity distributions in the sintered structures. The influence of embossing temperature on LTCC viscosity and mold filling behavior is discussed. Successful molding of 47 µm high raised grids and characters by hot embossing with 0.41 MPa at 775 °C and further heating to 850 °C under constant load is demonstrated. Thereby, the high potential of hot-embossing for precise structuring of LTCC surfaces is illustrated.
The development of competitive thermoelectric generators using oxide ceramics and multilayer technology requires the investigation of suitable sintering procedures. The sintering of Ca3Co4O9, which is the most promising p-type oxide regarding its figure of merit, is a special challenge, as the material starts to decompose at 926 °C. Pressure-assisted sintering (PAS), as known from large-scale production of low temperature co-fired ceramics, was used to sinter multilayers of Ca3Co4O9 green tape at 900 °C with different pressures and dwell times. In-situ shrinkage measurements, microstructural investigations and electric measurements were performed. Relative density increases from 57.4 % after free sintering for 24 h to 93.7 % after 2 h of PAS with 10 MPa axial load. The combination of tape casting and PAS induces a pronounced alignment of the anisotropic grains. In comparison to freely sintered multilayers, the electrical conductivity in the casting direction is thereby strongly increased by a factor of 5. With respect to dry-pressed bars, the improvement amounts to a factor of 15. This study shows that PAS is a proper technique to produce dense Ca3Co4O9 panels with good thermoelectric properties similar to hot-pressed tablets, even in large-scale production.