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- Haftfestigkeit (4)
- Klebfestigkeit (3)
- Mehr-Proben-Vorbehandeln/Kleben/Prüfen (2)
- ALD-Abscheidungen (1)
- Adhesion (1)
- Adhesives and adhesive tapes (1)
- Amorphization (1)
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- Certified reference material (1)
- Crystallization (1)
Organisationseinheit der BAM
Adhesion and other mechanical behaviour of coatings is at present routinely tested in industry and research organisations using the scratch test. The test has been the subject of a European Standard prEN 1071-3:2000 established by the European Standards Committee CEN TC184 WG5. A previous European project on the development and validation of test methods for thin hard coatings—FASTE—revealed that uncertainties in the Rockwell C stylus tip shape represent a major source of error for the scratch-test method. Therefore a follow-up project—REMAST—was started to develop and certify a reference material as a quality control tool for the testing and qualification of scratch-test instruments. In addition, a considerable effort was devoted to improve the scratch stylus manufacturing process. This paper presents the results of the REMAST project. During a feasibility study, two candidate materials—titanium nitride (TiN) and diamond-like carbon (DLC) coatings both on high speed steel substrates—were evaluated. Because of the lower sensitivity to styli tip shape variations and higher data scatter observed for the TiN coating, DLC was chosen as the reference material to be certified. One thousand samples were produced, as well as qualified styli to carry out the certification campaign, including homogeneity and stability testing. Nine independent laboratories were involved in the certification exercise, and the data were statistically analysed to obtain the certified critical load values and their uncertainty ranges. A certified reference material BCR-692 is available for verification purposes. This presents three repeatable failure events at certified critical load intervals and can provide a good indication of overall scratch-test instrument performance, including stylus condition and calibration. It is also useful as a diagnostic tool, providing a means of sensitive monitoring of machine and stylus performance over extended periods. Considerable improvement of the quality of scratch styli was achieved by the strict control of all manufacturing steps.
Aufzählung der wichtigsten wissenschaftlich-technischen und anderer wesentlicher Ergebnisse
• ALD Abscheidungen auf Polymeren (PE, PP, PTFE) unter Atmosphärendruck und im Vakuum mit Ozon als Oxidationsmittel wurden durchgeführt:
- Mit Variation der Schichtdicke
- Mit Variation der Zykluszeit
- Mit und ohne Ozon Vorbehandlung der Oberfläche
• ALD Abscheidungen auf (PE, PP, PTFE) in Vakuum mit O2- und H2-Plasma Vorbehandlung wurden durchgeführt.
- Mit Variation der Schichtdicke
- Mit Variation der Zykluszeit
- Mit und ohne Plasma Vorbehandlung der Oberfläche
• Die ALD Prozesse wurden mit in situ Laserellipsometrie untersucht.
• Die ALD Schichten wurden für die Haftfestigkeit bei der BAM ausgewerte
Decorative hard coatings: interdependence of optical, stoichiometric and structural properties
(1993)
Decorative optical coatings
(1994)
Nanotechnologien werden gegenwärtig als leistungsfähige Oberflächentechniken in erheblichem Umfange industriell genutzt. Dabei spielen dünne Schichten und deren Kenndaten eine wesentliche Rolle, z.B. als Röntgenspiegel oder optische und magnetooptische Datenträger. Die Schichtdicke zählt hierbei zu den technologisch wichtigen Parametern. Abgeleitet von Anwenderinteressen, werden für die Röntgenreflektometrie (XRR bzw. GIXR), Elektronenstrahl-Mikroanalyse (EPMA) und Röntgenfluoreszenzanalyse (XRF) einerseits und die Ellipsometrie andererseits zugeschnittene Schichtdickenmaßverkörperungen (SDM) entwickelt, gefertigt und untersucht. Das Ziel ist die Bereitstellung praxistauglicher, kalibrierter SDM, im weiteren Schichtdickennormale (SDN) genannt. SDN sind Maßverkörperungen, für die der Schichtdickenwert mit einer definierten Messunsicherheit bekannt und auf ein metrologisch anerkanntes Längennormal zurückgeführt ist. Berichtet wird über die Herstellung und messtechnische Charakterisierung der beiden spezifischen Varianten von Maßverkörperungen.
Three effects have been observed in wet-thermally grown structures under bombardement with energetic 15N ions: (1) Out-diffusion of H from the SiO2/Si system through the surface, (2) Accumulation of H at the SiO2/Si interface, (3) Changes in the optical fingerprint spectra of Ψ and Δ in dependence on λ (wavelength) obtained by ellipsometric measurements.
The multiple-sample approach by means of centrifugal adhesion testing (CAT-technology) allows the determination of bonding strength of adhesive-bonded joints on a statistical basis of up to eight samples. Therefore, it is obvious to ensure the continuous handling and identical processing of an octet of samples within the entire process chain of wet-chemical cleaning, plasma-chemical pre-treatment, bonding of samples, and testing of bonding strength. Within the multiple-sample bonding set-up (MPKV-technology) a defined bonding pressure can be adjusted regardless the actual number of samples. A comparison of single- and multiple-sample approach is made for bonding strength of selected adhesives, double-sided adhesive tapes and different material combinations [stainless steel (V2A) vs. stainless steel, polyamide (PA), or polypropylene (PP)]. It is shown that both technologies improve reliability of results
High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force microscopy (SFM), grazing incidence X-ray reflectometry (GIXR), or X-ray fluorescence analysis (XRF). The measurement results achieved with these methods are based on different interactions between the film and the probe. A key question in nanotechnology is how to achieve consistent results on a level of uncertainty below one nanometre with different techniques.
Two different types of thickness standards are realised. Metal film standards for X-ray techniques in the thickness range 10 to 50 nm are calibrated by GIXR with monochromatised synchrotron radiation of 8048 eV. The results obtained at four different facilities show excellent agreement. SiO2 on Si standards for SE and SFM in the thickness range 6 to 1000 nm are calibrated by GIXR with monochromatised synchrotron radiation of 1841 eV and with a metrological SFM. Consistent results within the combined uncertainties are obtained with the two methods. Surfaces and interfaces of both types of standards are additionally investigated by transmission electron microscopy (TEM).
Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon
(2021)
Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn.
SMT4-CT98-2238 - A certified reference material for the scratch test - REMAST - Synthesis report
(2002)
Die Bestimmung der Haftfestigkeit von Lackierungen, Beschichtungen oder Klebungen ist wichtig für die Beurteilung von entsprechenden Fertigungsabläufen. Unter Verwendung einer neuen Zentrifugentechnik wurde jetzt ein neues Mehr-Proben-Konzept zur schnellen Validierung von Klebverbindungen entwickelt.
Die Bestimmung der Haftfestigkeit von Lackierungen, Beschichtungen oder Klebeverbunden ist ein wichtiges Analyseinstrument bei der Beurteilung von entsprechenden Fertigungsabläufen. Unter Verwendung einer neuen Zentrifugentechnologie wurde in einem AiF Forschungsprojekt OKTETT die gesamte Prozesskette Vorbehandlung - Verklebung - Prüfung validiert.