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- Zeitschriftenartikel (20) (entfernen)
Schlagworte
- Lateral resolution (6)
- Nanometrologie (4)
- Nanotechnologie (4)
- Oberflächenanalytik (4)
- Zertifiziertes Referenzmaterial (4)
- BAM-L200 (3)
- Laterale Auflösung (3)
- SIMS (3)
- XPS (3)
- AES (2)
Organisationseinheit der BAM
Zusammenfassung
Some methods of nano-scale analysis are on the threshold of being a standard method in industry and therefore quality assurance becomes important. But, at the present time, there are deficits in standardisation and validation of these methods. Therefore, we have organised method comparisons and interlaboratory comparisons to overcome these deficits. We report the results of an interlaboratory comparison in step-height determination by atomic force microscopy and the development of a reference material for laterally resolving methods of material analysis.
A new type of test sample for the determination of lateral resolution in surface analysis is presented. The certified reference material BAM-L002 Nanoscale strip pattern for length calibration and testing of lateral resolution is an embedded cross-section of epitaxially grown layers of AlxGa1-xAs and InxGa1-xAs on GaAs substrate. The surface of the sample provides a flat pattern with strip widths of 0.4-500 nm. The combination of gratings, isolated narrow strips and sharp edges of wide strips offers improved possibilities for the calibration of a length scale, the determination of lateral resolution and the optimization of instrument settings. The feasibility of the reference material for an analysis of lateral resolution is demonstrated for SIMS.
Materialien mit Maß
(2005)