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Parameters of TiO2 coatings can greatly influence their final performance in largescale applications such as photocatalytic measurements, orthopedic and/or dental prostheses, cell cultures, and dye-sensitized solar cells. From different film deposition procedures, self-assembly of TiO2 NPs in multiple layers was selected for systematic characterization. EDX, AES and ToF-SIMS analysis have been carried out in order to evaluate the functionalization of several types of TiO2 NPs differing in size, shape and surface area.
The synthesis of TiO2 nanoplatelets with fluorine-containing reactants is carried out using titanium (IV) butoxide as precursor and concentrated HF as shape controller, the final product requires a working up in order to eliminate or at least to reduce the amount of residual fluorides, which is realized here by well-defined thermal treatment of the samples. Bulk and surface sensitive methods namely scanning electron microscopy with energydispersive X-ray spectroscopy (SEM-EDX), Auger electron spectroscopy (AES) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) have been applied to trace the presence of any fluorides in dependence on different information depths and measurement sensitivities of these methods.