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Organisationseinheit der BAM
- 6 Materialchemie (3)
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The use of a fibre-based light sensor for the calibration of Scanning Probe Microscopy piezos
(1999)
We present dynamic plowing nanolithography on polymethylmethacrylate films, performed with a scan-linearized atomic force microscope able to scan up to 250 μm with high resolution. Modifications of the surface are obtained by plastically indenting the film surface with a vibrating tip. By changing the oscillation amplitude of the cantilever, i.e., the indentation depth, surfaces can be either imaged or modified. A program devoted to the control of the scanning process is also presented. The software basically converts the gray scale of pixel images into voltages used to control the dither piezo driving cantilever oscillations. The advantages of our experimental setup and the dependence of lithography efficiency on scanning parameters are discussed. Some insights into the process of surface modifications are presented.
Antimony clusters of different shapes and dimensions have been obtained by evaporating antimony on graphite. The dependence of the shape and dimensions of the particles on the evaporation parameters (effective layer thickness, temperature, pressure) is discussed. A characterisation of the different structures is presented. In particular, the decoration of graphite steps is discussed. Clusters have been dislocated by means of dynamic plowing nanolithography, both in vector and in image pattern mode. The dependence of the energy needed to dislocate a cluster on its dimensions and position is discussed.