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A calibrated instrumental setup was specially developed for the purposes of accurate measurements of absolute X-ray spectra emitted by modern micro-focus, low-power X-ray tubes. By knowing all the instrumental parameters the spectra measured with the 16 m long setup are recalculated into emitted X-ray tube spectra in photons per eV per msr per nA per s.
Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM
(2009)
Both electron and polychromatic photon excitations (micro-focus X-ray source) at a scanning electron microscope (SEM) are used to determine the efficiency of an energy dispersive X-ray spectrometer up to 50 keV by means of a calibrated X-ray spectrometer and reference materials (RM) specially selected for this purpose.