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Eingeladener Vortrag
- nein (15)
Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM
(2009)
Both electron and polychromatic photon excitations (micro-focus X-ray source) at a scanning electron microscope (SEM) are used to determine the efficiency of an energy dispersive X-ray spectrometer up to 50 keV by means of a calibrated X-ray spectrometer and reference materials (RM) specially selected for this purpose.