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In this work, the effect of the pressure-assisted sintering process on buried thick film resistors integrated in LTCC multilayer has been studied. Four commercial resistor pastes with sheet resistivities between 10 kΩ and 10 MΩ/cm were analyzed. First they were characterized by SEM/EDX, XRD and Laser diffraction to determine composition and particle distribution. The pastes consist of isolating particles and of Ruthenium based particles that are supposed to build the conductive phase. The pastes were screen printed on LTCC green tape (DP 951) and buried in four layer laminates. Sintering was done in two ways, pressureless (PLS) and also pressure-assisted (PAS). The pressureless sintered resistors showed electrical resistance values roughly in the range of the nominal sheet resistivity and only relatively small fluctuation within one sample. The PAS samples on the other hand showed significantly higher resistances and larger deviations. The microstructure of the sintered resistors was again investigated by SEM and XRD. It seems that the resistivity is determined by the ratio of the two Ruthenium phases RuO2 and Pb2Ru2O6.5, where RuO2 has the higher conductivity. Buried resistors cannot be trimmed by a laser to adjust the resistance. But we discovered that a refiring step will reduce and normalize the resistivity of the PAS resistors significantly.
Continuously tuneable liquid crystal based stripline phase shifter realised in LTCC technology
(2015)
This work presents the design, fabrication and measurements of a low temperature cofired ceramic (LTCC) integrated liquid crystal (LC) phase shifter. The effective permittivity of the phase shifter and therefore its differential phase shift can be tuned continuously by orienting the LC directors with electric fields. The phase-shift demonstrator is designed for Ka-band frequencies around 30 GHz and represents a stripline filled with LC, embedded inside an LTCC multilayer structure, which provides a space-qualified and hermetically-sealed LC cavity within an RF-capable material system. The total length of the device is 37 mm while the phase shifting LC section has a length of 14.6 mm. At 30 GHz it exhibits a differential phase shift of 60° with an insertion loss around 6 dB, resulting in a figure of merit around 10°/dB. An advantage is that the insertion loss is nearly independent of the tuning state of the LC. The response time of the phase shifter, depending on the desired LC orientation, is between 62 ms and 37 s.
The sintering behavior of sub-micron Ni0.30Cu0.20Zn0.52Fe1.98O3.99 ferrite with and without Bi2O3 addition was studied. Ferrites with 0.5 wt% Bi2O3 exhibit enhanced shrinkage at T < 900 °C with significant grain growth. Additive-free ferrite powders also sinter to high density at 900 °C, however, grain growth is very limited. Both ferrites exhibit a permeability of µ = 400–450. Multilayers consisting of ferrite and low-k dielectric LTCC layers were prepared by co-firing at 900–915 °C. The shrinkage and thermal expansion characteristics of ferrite and LTCC tapes are similar. However, the permeability of integrated ferrite layers, made from ferrite tapes with Bi2O3 additive, significantly drops after co-firing with LTCC layers compared to separately fired monolithic ferrite multilayers. Contrarily, the permeability of integrated, Bi2O3-free ferrite layers, co-fired with dielectric tapes, is identical to that of monolithic ferrite multilayers. This finding is an important step toward ferrite integration into complex LTCC multilayer architectures.
At high temperatures and in harsh environments ceramic springs are often superior to metallic ones and allow for innovative solutions. A further application was proposed by using ceramic springs as capacitive force sensor. Lower and upper coil surfaces are coated by electrically conducting layers. Deformation of such spring results in a change of capacity. Sensor application calls for helical springs with rectangular cross-section, a linear stress-strain characteristic over entire deformation range and low manufacturing tolerances relating to inner and outer diameter, coil cross section and spring pitch. Furthermore, complex spring design with integrated connecting elements has to be realized.
Alumina, zirconia (Y-TZP) and silicon nitride springs were produced by hard machining starting from sintered hollow cylinders. After external and internal cylindrical grinding the hollow cylinders were filled with hard wax, followed by multi-stage cutting of spring coils with custom-made cutting discs. Finally, hard wax was removed by melting and burnout. Best surface and edge qualities of springs were reached using Y-TZP material and hot isostatic pressed alumina. Y-TZP springs produced with material-specifically selected cutting discs and optimized process parameters show sharp coil edges without spallings and mean roughness values of inner surfaces < 0.2 μm. Manufacturing tolerances of spring diameters, spring pitch, height and width of coil cross section are in the range of ± 10 microns. Good reproducibility of spring geometry by optimized hard machining technology allows for production of Y-TZP springs with spring constants differing less than ± 1 % within a series.
According to DIN 2090 spring constant for rectangular coil cross section is proportional to the square of height and width of coil cross section and indirectly proportional to number of active coils and to the cube of the mean spring diameter. Hence, spring constants can be tailored over a range of many orders of magnitude by changing the spring dimensions. Good agreement was reached between calculated target spring constants and measured values on produced springs.
Alumina and zirconia springs were characterized relating to deformation behavior under dynamic compression load with various deformation speeds and under static tensile loads over long periods of time. Contrary to alumina springs, a non-linear stress-strain behavior of TZP springs was proved in both test series. It is supposed, that pseudoelasticity caused by stress-induced transformation of tetragonal to monoclinic phase is responsible for this special feature of TZP springs. Therefore, TZP material cannot be used for capacitive spring sensors.
Calcium cobaltite (Ca3Co4O9) is considered as one of the most promising thermoelectric p-type oxides for energy harvesting applications at temperatures above 500 °C. It is challenging to sinter this material as its stability is limited to 920 °C. To facilitate a practicable and scalable production of Ca3Co4O9 for multilayer generators, a systematic study of the influence of powder calcination, Bi-doping, reaction sintering, and pressure-assisted sintering (PAS) on microstructure and thermoelectric properties is presented. Batches of doped, undoped, calcined, and not calcined powders were prepared, tape-cast, and sintered with and without uniaxial pressure at 900 °C. The resulting phase compositions, microstructures and thermoelectric properties were analysed. It is shown that the beneficial effect of Bi-doping observed on pressureless sintered samples cannot be transferred to PAS. Liquid phase formation induces distortions and abnormal grain growth. Although the Seebeck coefficient is increased to 139 µV/K by Bi-doping, the power factor is low due to poor electrical conductivity. The best results were achieved by PAS of calcined powder. The dense and textured microstructure exhibits a high power factor of 326 µW/mK² at 800 °C but adversely high thermal conductivity in the relevant direction. The figure of merit is higher than 0.08 at 700 °C.
Glass-ceramic composites as insulation material for thermoelectric oxide multilayer generators
(2021)
Thermoelectric generators can be used as energy harvesters for sensor applications.
Adapting the ceramic multilayer technology, their production can be
highly automated. In such multilayer thermoelectric generators, the electrical insulation material, which separates the thermoelectric legs, is crucial for the performance of the device. The insulationmaterial should be adapted to the thermoelectric regarding its averaged coefficient of thermal expansion α and its sintering temperature while maintaining a high resistivity.
In this study, starting from theoretical calculations, a glass-ceramic Composite material adapted for multilayer generators fromcalciummanganate and Calcium cobaltite is developed. The material is optimized towards an α of 11 × 10−6 K−1 (20–500◦C), a sintering temperature of 900◦C, and a high resistivity up to 800◦C.
Calculated and measured α are in good agreement. The chosen glass-ceramic composite with 45 vol.% quartz has a resistivity of 1 × 107 Ωcm and an open porosity of <3%. Sintered multilayer samples from tape-cast thermoelectric oxides and screen-printed insulation show only small reaction layers. It can be concluded that glass-ceramic composites are a well-suited material class for insulation layers as their physical properties can be tuned by varying glass composition or dispersion phases.
The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
The influence of the atomization technique on the suitability of granules for dry pressing is the focus of the presented investigations. Therefore, destabilized alumina, zirconia, and zirconia toughened alumina (ZTA) slurries were spray dried and the obtained granules were used to fabricate green and finally sintered bodies for evaluation.
Granules made in a laboratory spray dryer with a two-fluid nozzle served as a reference. An ultrasonic atomizer was integrated into the same spray dryer and the influence on the granule properties was evaluated. Untapped bulk density, granule size distribution, and flowability are among the evaluated granule-related properties as well as the granule yield which is used as an indicator of the process efficiency.
Yield and flowability as most important granule properties are clearly improved when atomization is realized with ultrasound. The investigated sinter body properties include porosity, sinter body density, and biaxial strength and are as well positively affected by switching the atomization technique to ultrasound. Therefore, the Approach to improve the compressibility of granules by ultrasonic atomization, which leads to an improved microstructure, density, and strength of sintered bodies, has proven to be successful for single-component ceramics (alumina and zirconia) as well as for the multicomponent ceramic ZTA.
Das Ziel des Gesamtvorhabens bestand darin, einen neuartigen kapazitiven Sensortyp zur hochauflösenden Bestimmung von Masse- und Gravitationskraftänderungen zu entwickeln. Bisherige Technologien nutzten dafür Federn oder Biegebalken aus gehärteten metallischen Werkstoffen, deren Alterungsverhalten die Präzision der Kräftemessung begrenzen. Grundprinzip des neuen Sensortyps ist es, eine auf die keramische Feder einwirkenden Änderung der Gewichts- oder Gravitationskraft durch eine Erfassung der Kapazitätsänderung am Sensor zu bestimmen. Dazu muss die durch Stauchung oder Dehnung der Feder entstehende Kapazitätsänderung mit hoher Auflösung reproduzierbar gemessen werden. Neben einem geeigneten Sensordesign waren Lösungen für Messsignalerfassung und -auswertung (Elektronik/Software) und die Systemintegration zu entwickeln.
Die wichtigsten im Rahmen des BAM-Teilvorhabens erzielten Ergebnisse sind:
- Ausgehend von kommerziellen High-end Keramikpulvern wurden durch Optimierung der keramischen Technologie nahezu porenfreie Al2O3, ZrO2 und Si3N4-Werkstoffe hergestellt und bezüglich Gefüge und Phasenbestand sowie mechanischen, thermischen und elektrischen Eigenschaften bewertet. Insbesondere die defektfreie Herstellung von nanostrukturierten Werkstoffen erforderte umfangreiche Variationen der Prozessparameter. Geeignete Werkstoffvarianten wurden für die Federherstellung ausgewählt.
- Gemeinsam mit den Projektpartnern wurden Layoutvarianten für Schraubendruckfedern mit rechteckigem Windungsquerschnitt und für die Federeinbindung in das Sensorsystem erarbeitet.
- 4 Federvarianten wurden an der BAM durch Hartbearbeitung von gesinterten Hohlzylindern umgesetzt. Fertigungstoleranzen von < ±10 µm für Windungsbreite, Windungshöhe und Windungsabstand und dünnfilm-kompatible innere Windungsflächen (Ra < 0,2 µm) wurden erreicht. Al2O3- und ZrO2-Federn können rissfrei und mit sehr guter Kantenqualität gefertigt werden, bei Si3N4-Federn konnten Kantenschädigungen nicht vollständig verhindert werden.
- Mit der entwickelten Herstellungstechnologie können sowohl „harte“ als auch sehr „weiche“ Federn produziert werden. Federkonstanten zwischen 0,02 N/mm und 10 N/mm wurden realisiert. Die Reproduzierbarkeit der Federfertigung ist gegeben, innerhalb einer Charge unterschieden sich die Federkonstanten der gefertigten Federn nur um etwa +/- 1%.
- An einem speziell entwickelten Versuchsstand wurden die Federn unter zyklischer Druckbelastung im Temperaturbereich von -20 bis +80 °C untersucht. An den Al2O3- und ZrO2-Federn wurden keine Schädigungen beobachtet, die Federkonstante wird durch die zyklische Langzeitbelastung nicht verändert.
- Die Eignung der keramischen Federn für den Applikationsfall wurde mit zahlreichen Spannungs-Dehnungs-Experimenten, teilweise an speziell aufgebauten Versuchsapparaturen, untersucht. An Al2O3- und Si3N4-Federn wurde – wie erwartet – gefunden, dass die Federkonstante unabhängig von der Belastungsgeschwindigkeit ist und unter konstanter Last auch über lange Zeiträume keine Verformung auftritt. Überraschenderweise zeigten ZrO2 (TZP)-Federn ein zeitabhängiges Verhalten unter Last. Dieses ist besonders stark bei Y-stabilisierten Werkstoffvarianten ausgebildet, wurde aber mit Hochpräzisionsmessungen auch bei Ce-stabilsierten Werkstoffen nachgewiesen. Die Deformation ist reversibel, eine vollständige Relaxation wird erst nach Tagen erreicht. Aufgrund der zeitabhängigen Verformung können ZrO2 (TZP)-Federn, trotz ihrer hervorragenden Festigkeit und Bruchzähigkeit, nicht für die konzipierten Sensorfedern eingesetzt werden.
- Das durch die Fa. Siegert TFT entwickelte Metallisierungs-Schichtsystem, bestehend aus aufgesputterten Ti-, Pt- und Au-Schichten verstärkt durch eine galvanisch aufgebrachte Au-Schicht, wurde an der BAM umfassend bewertet. Die Schichten sind untereinander und mit der Keramik weitgehend defektfrei verbunden, die lokale Schichtdicke schwankt jedoch bedingt durch Abschattungseffekte während der Beschichtungsvorgang. Es wurden Schichtwiderstände zwischen 50 und 90 Ohm und damit die Zielvorgabe des Projektes (< 100 Ohm) erreicht. In statischen und dynamischen Belastungstests wurden keine Veränderungen der Leitungswiderstände festgestellt.
- Zur Erhöhung der Kapazität des Kondensators kann der Raum zwischen den Federwindungen statt mit Luft mit einer Flüssigkeit mit hoher Dielektrizitätskonstante gefüllt werden. Als geeignete Flüssigkeit wurde Propylencarbonat mit einer Dielektrizitätskonstante von 65, einem hohen Siedepunkt und einer geringen Viskosität identifiziert. Um eine noch höhere Dielektrizitätskonstante zwischen den Federwindungen zu erreichen. wurden Suspensionen aus Silikonöl und nanokristallinem Bariumtitanat hergestellt und bezüglich ihrer Langzeitstabiltät charakterisiert.
- Gemäß den Anforderungen des Projektpartners KOMPASS wurden maßgeschneiderte Al2O3-Federn mit einer Federkonstante < 0,1 N/mm hergestellt und für den Aufbau des finalen Demonstrator eingesetzt.
Die prinzipielle Funktionsfähigkeit des neuen Sensorkonzeptes auf Basis keramischer Federn wurde mit dem im Projekt aufgebauten Demonstrator nachgewiesen. Die Umsetzung der F+E-ergebnisse in eine industrielle Nutzung zur Herstellung von Gravimetern wird vom Projektpartner KOMPASS angestrebt und ist bereits mit detaillierten Zeitplänen untersetzt.