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- X-rays (2) (entfernen)
The results of an interlaboratory comparison of energy dispersive X-ray microanalysis of TiN0.84 and ZrN were presented. The microprobe group of the German Physical Society (DPG) and the Federal Institute for Materials Research and Testing (BAM) had initiated the interlaboratory comparison. The primary aim was to test modern EDX systems equipped with ultrathin windows concerning the accuracy and reliability of the analysis of compounds containing light elements. The participants from 23 laboratories performed the analysis at different primary energies, in the standard-less mode as well as on the base of own standards, and considering Ti-K or Ti-L in case of TiN0.84. The results show a slight overestimation of the nitrogen content and a large standard deviation from the mean value. Reasons for the scattering of the results are discussed.
Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range
(2002)
The thickness of thin films of platinum and nickel on fused silica and silicon substrates has been determined by EPMA using the commercial software STRATAGEM for calculation of film thickness. Film thickness ranged in the order 10 nm. An attempt was made to estimate the confidence range of the method by comparison with results from other methods of analysis. The data show that in addition to the uncertainty of the spectral intensity measurement and the complicated fitting routine, systematic deviation caused by the underlying model should be added. The scattering in the results from other methods does not enable specification of a range of uncertainty, but deviations from the real thickness are estimated to be less than 20%.