Filtern
Erscheinungsjahr
Dokumenttyp
- Zeitschriftenartikel (143)
- Vortrag (51)
- Beitrag zu einem Tagungsband (30)
- Beitrag zu einem Sammelband (28)
- Posterpräsentation (13)
- Buchkapitel (10)
Schlagworte
- Femtosecond laser (28)
- Laser-induced periodic surface structures (LIPSS) (26)
- Femtosecond laser ablation (24)
- Laser ablation (23)
- Laser processing (14)
- Radiation protection (12)
- Silicon (11)
- Laser cleaning (10)
- Ablation (9)
- Materialbearbeitung (9)
- Surface functionalization (9)
- Laser-induced X-ray emission (8)
- Nanosecond laser (8)
- Nanostructures (8)
- Ultrashort laser pulses (7)
- Laser (6)
- Röntgenstrahlung (6)
- Titanium (6)
- Ultrakurze Laserpulse (6)
- Femtosecond pulse laser (5)
- Femtosekundenlaser (5)
- High-speed optical techniques (5)
- Laser beam effects (5)
- Laser safety (5)
- Laser-induced periodic surface structures (5)
- Paper (5)
- Steel (5)
- Strahlenschutz (5)
- CIGSe (4)
- Chalcopyrite (4)
- DDT (4)
- Double-pulse experiments (4)
- Femtosecond laser processing (4)
- Friction (4)
- Laser-induced periodic surface structures, LIPSS (4)
- Laserreinigung (4)
- Micro solar cell (4)
- Microstructures (4)
- Polymer (4)
- Semiconductors (4)
- Tribology (4)
- Ultrafast optical techniques (4)
- Ultrakurzpulslaser (4)
- Ultrashort laser material interaction (4)
- X-ray emission (4)
- Abschirmung (3)
- Aluminium (3)
- Applications (3)
- Biofilms (3)
- Bone implant (3)
- Cleaning (3)
- Copper-indium-gallium-diselenide (3)
- Damage (3)
- Damage threshold (3)
- Dielectrics (3)
- Femtosecond (3)
- Femtosecond laser patterning (3)
- Fused silica (3)
- Incubation (3)
- Laser-induced damage threshold (3)
- Laser-induced forward transfer (3)
- Laser-induced forward transfer (LIFT) (3)
- Laser-induzierte Röntgenstrahlung (3)
- Laserschutz (3)
- Light concentration (3)
- Mach-Zehnder interferometer (3)
- Micromachining (3)
- Microphone (3)
- Oxidation (3)
- Photovoltaics (3)
- Secondary hazard (3)
- Silicon compounds (3)
- Silk (3)
- Surface morphology (3)
- Surface structure (3)
- Threshold (3)
- Titanium alloy (3)
- Titanium nitride (3)
- Ultrakurze Laserimpulse (3)
- Ultrashort pulse laser processing (3)
- Ultrashort pulsed laser (3)
- Wear (3)
- Acoustic measurement (2)
- Aluminium oxide (2)
- Auge (2)
- Auger electron spectroscopy (2)
- Bioceramic coating (2)
- Calcium phosphate (2)
- Cell adhesion (2)
- Decontamination (2)
- Doping (2)
- Elemental semiconductors (2)
- Femtosecond-Pulse Laser (2)
- Fluid transport (2)
- Glass (2)
- Glasses (2)
- Image enhancement (2)
- Image restoration (2)
- Indium phosphide (2)
- Laser damage (2)
- Laser impact on surfaces (2)
- Laser micromachining (2)
- Laser-beam impact phenomena (79.20.Ds) (2)
- Laser-induced x-ray emission (2)
- Lasersicherheit (2)
- Material processing (2)
- Medizinische Anwendung (2)
- Micro solar cells (2)
- Micro-concentrator solar cell (2)
- Multimode fiber (2)
- Multispectral imaging (2)
- Nanosekundenlaser (2)
- Niobium (2)
- Optical fiber (2)
- Optical multimode fiber (2)
- Optical properties (2)
- Pacemaker (2)
- Physical radiation damage (2)
- Physical radiation damage (61.80.-x) (2)
- Polaritons (2)
- Pulslaser (2)
- Radiation treatment (2)
- Röntgenemission (2)
- Scanning electron microscopy (2)
- Schutzbrille (2)
- Second harmonic generation (SHG) (2)
- Selective emitter (2)
- Silica (2)
- Silica glass (2)
- Silicon oxide (2)
- Solar cell (2)
- Subpicosecond laser ablation (2)
- Surface plasmon polaritons (2)
- Surface plasmons (2)
- Surface texture (2)
- Surface wetting (2)
- Textiles (2)
- Ultra-short pulse laser processing (2)
- Ultrafast phenomena (2)
- Wooden artworks (2)
- X-ray photoelectron spectroscopy (2)
- Zahn (2)
- (LIPSS) (1)
- Ab initio calculations (1)
- Absorber optimization (1)
- Acoustical measurement (1)
- Ageing (1)
- Aluminium alloys (1)
- Amorphization (1)
- Amorphous (1)
- Ancient manuscripts (1)
- Anodic oxidation (1)
- Anodization (1)
- Antibacterial surfaces (1)
- Application (1)
- Arbeitsschutz (1)
- Artificial soiling (1)
- Atomic force microscopy (1)
- Bacterial adhesion (1)
- Barium aluminium borosilicate glass (1)
- Bariumalumoborosilicate glass (1)
- Bariumalumoborosilicate glass surfaces (1)
- Bending strength (1)
- Bioaktives Material (1)
- Bioceramics (1)
- Biochemical reaction mechanisms and kinetics (1)
- Biofilm (1)
- Bioinspiration (1)
- Biologische Anwendungen (1)
- Biomedizin (1)
- Biomimetic surfaces (1)
- Biomometics (1)
- Bionic materials (1)
- Biosensor (1)
- Bone (1)
- Bor (1)
- Bug (1)
- CHOCLAB (1)
- CIGSe micro solar cells (1)
- Calcium compounds (1)
- Calcium phosphate coating (1)
- Carbon (81.05.Uw) (1)
- Carrier excitation (1)
- Central Asia (1)
- Cleaning threshold (1)
- Coatings (1)
- Cold atmospheric pressure plasma (1)
- Colorimetry (1)
- Conduction bands (1)
- Conservation (1)
- Copper indium gallium diselenide (CIGSe) (1)
- Copper-indium-gallium-diselenide (CIGSe) (1)
- Crystallization (1)
- Cu(In,Ga)Se2 (1)
- CuInSe2 (1)
- Cultural heritage (1)
- Defect model (1)
- Degree of polymerization (1)
- Dentistry (1)
- Diamond-like carbon (1)
- Diffusion (1)
- Doping thin films (1)
- Double-pulse (1)
- Dry Etching (1)
- Dünnfilm, diamantartig (1)
- Dünnfilmtechnologie (1)
- Dünnschicht, halbleitend (1)
- Dünnschicht, metallisch (1)
- EN 12254 (1)
- EN 207 (1)
- EN 208 (1)
- Editorial (1)
- Electrochemistry (1)
- Electromagnetic scattering (1)
- Ellipsometrie (1)
- Etch Process (1)
- European Materials Research Society (E-MRS) (1)
- European standard (1)
- Eye protection (1)
- FS-laser ablation (1)
- Farbmessung (1)
- Fatigue (1)
- Fatigue testing (1)
- Femtosecond pulses (1)
- Femtosekunden (1)
- Femtosekundenpulslaser (1)
- Fermi-Level Pinning (1)
- Fiber waveguides (1)
- Fiber waveguides (42.81.Qb) (1)
- Fictive temperature (1)
- Filter (1)
- Filterpapier (1)
- Fourier transforms (1)
- Fs-laser patterning (1)
- Glasfilter (1)
- Glass transitions (1)
- Glasses (81.05.Kf) (1)
- Glucose (1)
- Gold films (1)
- Hadernpapier (1)
- Hard X-ray photoelectron spectroscopy (HAXPES) (1)
- Heat affected zone (1)
- Hierarchical micro-nanostructures (1)
- Holz (1)
- Holzhaltiges Papier (1)
- Hydrocarbons (1)
- ISO 11254-2 (1)
- Implantat (1)
- Indium (1)
- Indium islands (1)
- Indium preferential nucleation (1)
- Industrial applications (1)
- Interfacial Electronic States (1)
- Interferometer (1)
- Justierbrille (1)
- Knochenersatz (1)
- Kohlenstoffschichten (1)
- Kunststoffschicht (1)
- Kurzpulslaser (1)
- LIDT (1)
- LIFT (1)
- Laser Machining (1)
- Laser Processing (1)
- Laser beam machining (1)
- Laser induced damage (1)
- Laser irradiation surface effects (1)
- Laser materials (1)
- Laser materials processing (1)
- Laser pulses (1)
- Laser spallation (1)
- Laser treatment (1)
- Laser-Ablation (1)
- Laser-Material-Bearbeitung (1)
- Laser-Materialbearbeitung (1)
- Laser-beam impact phenomena (1)
- Laser-induced damage (1)
- Laser-induced fixation (1)
- Laser-induced nanostructures (1)
- Laser-induced oxide layer (1)
- Laser-induced periodic surface strctures (LIPSS) (1)
- Laser-induced periodic surface strcutures (LIPSS) (1)
- Laser-material interactions (1)
- Laser-modified surface (1)
- Laserinduzierte Zerstörschwelle (1)
- Lasermaterialbearbeitung (1)
- Lasermikrobearbeitung (1)
- Lasersintern (1)
- Lasertechnik (1)
- Lichtwellenleiter (1)
- Lizard (1)
- MOS Diode (1)
- Materials processing (1)
- Mechanical stress (1)
- Melting (1)
- Membrane perforation (1)
- Metallprothese (1)
- Metals (1)
- Michelson interferometer (1)
- Micro-concentrator (1)
- Microbial adhesion tests (1)
- Microbial adhesions (1)
- Microconcentrator solar cell (1)
- Microscopy (1)
- Microsecond laser (1)
- Microstructuring (1)
- Mikrobearbeitung (1)
- Mikroskopie (1)
- Molybdenum substrate (1)
- Multi-Photon Absorption (1)
- Multicrystalline silicon (1)
- Multiple-pulse damage (1)
- Nanosecond Pulses (1)
- Nanosecond laser cleaning (1)
- Nanostrcutures (1)
- Nd:YAG laser (1)
- Nd:YAG-Laser (1)
- Nonlinear Electroreflectance (1)
- Oberflächenstrukturierung (1)
- Ophthalmology (1)
- Optical breakdown (1)
- Optical coatings (1)
- Optical constants (78.20.Ci) (1)
- Optical fibers (1)
- Optical microscopy (1)
- Optical proper (1)
- Optics at surfaces (1)
- Optische Konstanten (1)
- Optische Multimodefaser (1)
- Orthopaedics (1)
- Oxide (1)
- Oxide growth (1)
- Papery (1)
- Parchment (1)
- Personal protective equipment (1)
- Photochemical reactions of biomolecules (1)
- Photoelektron spectroscopy (1)
- Photovoltaik (1)
- Physical vapor deposition (1)
- Picture Post Card (1)
- Pigments (1)
- Polarisation (1)
- Poly(methylmetacrylate) (1)
- Polycarbonate (1)
- Polyethylene (1)
- Polymer ablation (1)
- Polymerfilter (1)
- Polymers (1)
- Polymers-radiation effects (1)
- Polymethylmethacrylate (1)
- Probekörper (1)
- Prosthetics (1)
- Protection housing (1)
- Pulse Laser (1)
- Pulse duration (1)
- Radiation treatment (81.40.Wx) (1)
- Refractive index (1)
- Reproducibility (1)
- Ripples (1)
- Rods (structures) (1)
- Round-robin experiment (1)
- S on 1-LIDT (1)
- SHG (1)
- SIMS (1)
- Scanning Auger electron microscopy (1)
- Second-Harmonic Generation (1)
- Sekundärstrahlung (1)
- Semiconductor (1)
- Semiconductor electrode (1)
- Silicon nitride (1)
- Silicon solar cell (1)
- Silk Road (1)
- Simulation (1)
- Single- and multi-shot ablation (1)
- Solid electrolyte interface (1)
- Solid-state plasma (1)
- Spectroscopic imaging ellipsometry (1)
- Spectroscopy (1)
- Spot size (1)
- Spring Meeting 2016 (1)
- Structuring (1)
- Sub-Picosecond-Pulse Laser (1)
- Subpicosecond-Pulse Laser (1)
- Superconductivity (1)
- Surface and interface chemistry of polymers (1)
- Surface plasmon polariton (1)
- Surface processing (1)
- Surface superconductivity (1)
- Surface treatment (1)
- Technische Materialien (1)
- Textile (1)
- Thin films (1)
- Threshold fluence (1)
- Threshold of silicon (1)
- Ti-6Al-4V alloy (1)
- Ti6Al4V alloys (1)
- Ti:sapphire laser (1)
- Time-of-flight secondary ion mass spectrometry (ToF-SIMS) (1)
- Time-resolved measurements (1)
- Time-resolved reflectivity measurements (1)
- Titanium alloys (1)
- Titanium nitride films (1)
- Treshold (1)
- Tungsten (1)
- Ultrashort lasers (1)
- Ultrashort pulse laser (1)
- Vanadium alloys (1)
- Verrußung (1)
- Viscometry (1)
- Wall paintings (1)
- Wandmalerei (1)
- Water (1)
- Wetting (1)
- Wood (1)
- X-ray (1)
- X-ray diffraction (1)
- X-ray emission hazards (1)
- X-ray energies (1)
- X-ray spectrum (1)
- fused silica (1)
- laser damage (1)
- lossy materials (1)
- nanosecond laser (1)
- optical fiber (1)
- plasmon lifetime (1)
- surface plasmon polaritons (1)
Organisationseinheit der BAM
- 6 Materialchemie (56)
- 6.2 Material- und Oberflächentechnologien (56)
- 9 Komponentensicherheit (4)
- 9.5 Tribologie und Verschleißschutz (4)
- 6.7 Materialsynthese und Design (3)
- 4 Material und Umwelt (2)
- 4.1 Biologische Materialschädigung und Referenzorganismen (2)
- 6.1 Oberflächen- und Dünnschichtanalyse (2)
- 5 Werkstofftechnik (1)
- 5.1 Mikrostruktur Design und Degradation (1)
Paper des Monats
- ja (3)
Periodic self-organization of matter beyond the diffraction limit is a puzzling phenomenon, typical both for surface and bulk ultrashort laser processing. Here we compare the mechanisms of periodic nanostructure formation on the surface and in the bulk of fused silica. We show that volume nanogratings and surface nanoripples having subwavelength periodicity and oriented perpendicular to the laser polarization share the same electromagnetic origin. The nanostructure orientation is defined by the near-field local enhancement in the vicinity of the inhomogeneous scattering centers. The periodicity is attributed to the coherent superposition of the waves scattered at inhomogeneities. Numerical calculations also support the multipulse accumulation nature of nanogratings formation on the surface and inside fused silica. Laser surface processing by multiple laser pulses promotes the transition from the high spatial frequency perpendicularly oriented nanoripples to the low spatial frequency ripples, parallel or perpendicular to the laser polarization. The latter structures also share the electromagnetic origin, but are related to the incident field interference with the scattered far-field of rough non-metallic or transiently metallic surfaces. The characteristic ripple appearances are predicted by combined electromagnetic and thermo-mechanical approaches and supported by SEM images of the final surface morphology and by time-resolved pump-probe diffraction measurements.
Commercially available absorption filters (Schott BG18 and BG36) were investigated with respect to their single- and
multi-pulse ablation threshold using laser pulses from a Ti:Sapphire laser in the range between 30 and 340 fs. It could be
observed, that the threshold fluence decreases for shorter pulse durations. The similarity of the measured multi-pulse
threshold fluences with those of undoped glass material (around 1 J/cm^2 for a pulse duration of 30 fs) suggests that, for
very short pulses, the threshold is independent on the doping level and therefore, linear absorption does not significantly
contribute to laser-induced damage. For >100 pulses per spot and all pulse durations applied, the threshold fluences
saturate. This independence on the number of applied pulses leads to technically relevant damage threshold values.
Ablation experiments employing Ti:sapphire laser pulses with durations from 30 to 340 fs (centre wavelength 800 nm, repetition rate 1 kHz) were performed in air. Absorbing filters (Schott BG18 and BG36) served as targets. The direct focusing technique was used under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter versus laser fluence. The threshold fluence decreases for a shorter pulse duration and an increasing number of pulses. The multi-pulse ablation threshold fluences are similar to those of undoped glass material (~1 J cm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence is practically constant. This leads to technically relevant ablation threshold values.
Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon
(2021)
Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn.
The European laser safety standards EN 207, EN 208, and EN 12254 each contain an annex B, which serves as a guidance for the selection of products. These annexes are informative only and are therefore not binding. As there are a variety of hazard scenarios, it is not recommended to change these annexes to a normative status, through which they would become mandatory. Instead, it is recommended to allow users to apply their own skills and know-how in selecting appropriate products, justifying where and why they deviate from the guidance in the standards. This paper explains the background on which the guidance for selection in the annexes of the standards is based and shows physically meaningful leeway.
Die Laserbearbeitung von Materialien mit ultrakurzen Laserpulsen kann zu einer sekundären Emission gefährlicher Röntgenstrahlen führen. Dieser Effekt wurde bisher bei der Bearbeitung von technischen Materialien wie Metallen beobachtet. Die Röntgenemission bei der abtragenden Bearbeitung von biologischen Geweben ist noch weitgehend unerforscht. Der Vortrag präsentiert erste Untersuchungen und Ergebnisse des radiologischen Gefährdungspotentials bei der medizinischen Anwendung von Ultrakurzpulslasern am Menschen.
The formation of laser-induced periodic surface structures (LIPSS, ripples) upon irradiation of silicon with multiple irradiation sequences consisting of femtosecond laser pulse pairs (pulse duration 150 fs, central wavelength 800 nm) is studied numerically using a rate equation system along with a two-temperature model accounting for one- and two-photon absorption and subsequent carrier diffusion and Auger recombination processes. The temporal delay between the individual equal-energy fs-laser pulses was varied between 0 and ~4 ps for quantification of the transient carrier densities in the conduction band of the laser-excited silicon. The results of the numerical analysis reveal the importance of carrier generation and relaxation processes in fs-LIPSS formation on silicon and quantitatively explain the two time constants of the delay-dependent decrease of the low spatial frequency LIPSS (LSFL) area observed experimentally. The role of carrier generation, diffusion and recombination is quantified individually.
The formation of near-wavelength laser-induced periodic surface structures (LIPSS) on silicon upon irradiation with sequences of Ti:sapphire femtosecond laser pulse pairs (pulse duration 150 fs, central wavelength 800 nm) is studied theoretically. For this purpose, the nonlinear generation of conduction band electrons in silicon and their relaxation is numerically calculated using a two-temperature model approach including intrapulse changes of optical properties, transport, diffusion and recombination effects. Following the idea that surface plasmon polaritons (SPP) can be excited when the material turns from semiconducting to metallic state, the 'SPP active area' is calculated as function of fluence and double-pulse delay up to several picoseconds and compared to the experimentally observed rippled surface areas. Evidence is presented that multi-photon absorption explains the large increase of the rippled area for temporally overlapping pulses. For longer double-pulse delays, relevant relaxation processes are identified. The results demonstrate that femtosecond LIPSS on silicon are caused by the excitation of SPP and can be controlled by temporal pulse shaping.
Review of x-ray exposure and safety issues arising from ultra-short pulse laser material processing
(2021)
Laser processing with ultra-short laser pulses enables machining of materials
with high accuracy and throughput. The development of novel laser Technologies with laser pulse repetition rates up to the MHz range opened the way for industrial manufacturing processes. From a radiological point of view this evolution is important, because x-ray radiation can be generated as an unwanted side effect in laser material processing. Even if the emitted x-ray dose per pulse is comparably low, the x-ray dose can become hazardous to health at high laser repetition rates. Therefore, radiation protection must be considered. This article provides an overview on the generation and detection of x-rays in laser material processing, as well as on the handling of this radiation risk in the framework of radiological protection.
Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses
(2004)
The influence of different laser pulse lengths on the removal of a polymer layer from metal substrates was investigated. As model systems, doped poly(methylmetacrylate) (PMMA) on titanium and tungsten substrates were selected.
The ablation threshold and irradiation spot morphology of titanium and tungsten were compared for femtosecond (fs) and nanosecond (ns) laser irradiation and different pulse numbers. Nanosecond laser treatment resulted in a non-homogeneous surface morphology for both titanium and tungsten substrates. Femtosecond irradiation of tungsten revealed a homogeneous ablation spot with little changes in the surface morphology. For titanium, the formation of columnar structures within the irradiation spot was observed.
Two different dopant concentrations were used for PMMA to achieve an equal linear absorption coefficient for the femto- and nanosecond laser wavelengths of 790 and 1064 nm. The best results were achieved for the removal of doped PMMA by femtosecond laser irradiation, where only a minimal modification of the metal surface was detected. In the case of nanosecond laser exposure, a pronounced change of the structure was observed, suggesting that damage-free cleaning of the selected metal may only be possible using femtosecond laser pulses. Different experimental parameters, such as laser fluence, pulse repetition rate and sample speed were also investigated to optimize the cleaning quality of doped PMMA from tungsten substrates with femtosecond laser pulses.
A bottom-up approach is presented for the production of arrays of indium islands on a molybdenum layer on glass, which can serve as micro-sized precursors for indium compounds such as copper-indium-gallium-diselenide used in photovoltaics. Femtosecond laser ablation of glass and a subsequent deposition of a molybdenum film or direct laser processing of the molybdenum film both allow the preferential nucleation and growth of indium islands at the predefined locations in a following indium-based physical vapor deposition (PVD) process. A proper choice of laser and deposition parameters ensures the controlled growth of indium islands exclusively at the laser ablated spots. Based on a statistical analysis, these results are compared to the non-structured molybdenum surface, leading to randomly grown indium islands after PVD.
Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the femtosecond to picosecond range. During the past years significantly increasing industrial and research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical or chemical surface properties. In this contribution the mechanisms of formation and current trends and applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting properties, the mimicry of the natural texture of animals, the tailoring of surface colonization by bacterial biofilms, the advancement of leadless medical pacemakers, and the improvement of the tribological performance of nanostructured metal surfaces.
The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on
single-crystalline silicon upon irradiation with single (N = 1) and multiple (N ≤ 1000) linearly
polarized femtosecond (fs) laser pulses (pulse duration τ = 130 fs, central wavelength λ = 800 nm)
in air is studied experimentally. Scanning electron microscopy (SEM) and optical microscopy are
used for imaging of the ablated surface morphologies, both revealing LIPSS with periodicities close
to the laser wavelength and an orientation always perpendicular to the polarization of the fs-laser
beam. It is experimentally demonstrated that these LIPSS can be formed in silicon upon irradiation
by single fs-laser pulses—a result that is additionally supported by a recent theoretical model.
Two-dimensional Fourier transforms of the SEM images allow the detailed analysis of the
distribution of the spatial frequencies of the LIPSS and indicate, at a fixed peak fluence, a
monotonous decrease in their mean spatial period between ~770 nm (N = 1) and 560 nm (N
= 1000). The characteristic decrease in the LIPSS period is caused by a feedback-mechanism acting
upon excitation of surface plasmon polaritons at the rough silicon surface which is developing under
the action of multiple pulses into a periodically corrugated surface.
The possibility to excite surface plasmon polaritons (SPPs) at the interface between two media depends on the optical properties of both media and geometrical aspects. Specific conditions allowing the coupling of light with a plasmon-active interface must be satisfied. Plasmonic effects are well described in noble metals where the imaginary part of the dielectric permittivity is often neglected ('perfect medium approximation (PMA)'). However, some systems exist for which such approximation cannot be applied, hence requiring a refinement of the common SPP theory. In this context, several properties of SPPs such as excitation conditions, period of the electromagnetic field modulation and SPP lifetime then may strongly deviate from that of the PMA. In this paper, calculations taking into account the imaginary part of the dielectric permittivities are presented. The model identifies analytical terms which should not be neglected in the mathematical description of SPPs on lossy materials. These calculations are applied to numerous material combinations resulting in a prediction of the corresponding SPP features. A list of plasmon-active interfaces is provided along with a quantification of the above mentioned SPP properties in the regime where the PMA is not applicable.
Single-pulse femtosecond laser-induced forward transfer (LIFT, 30 fs, 790 nm) is used to deposit micron-sized dots of copper and/or indium onto a molybdenum layer on glass. Such systems can serve as precursors for the bottom-up manufacturing of micro-concentrator solar cells based on copper-indium-gallium-diselenide. The influence of the thickness of the copper, indium and combined copper-indium donor layers on the quality of the transferred dots was qualified by scanning electron microscopy, energy-dispersive X-ray analysis, and optical microscopy. The potential for manufacturing of a spatial arrangement adapted to the geometry of micro-lens arrays needed for micro-concentrator solar cells is demonstrated.
A promising technology in photovoltaics is based on micro-concentrator solar cells, where the photovoltaic active area is realized as an array of sub-millimeter sized thin-film solar cells. For copper-indium-gallium-diselenide (CIGSe), the solar cells can be arranged in the foci of a regular arrangement of micro-lenses to enhance their efficiency by light concentration, to allow a better heat dissipation and to save expensive raw material (indium). Different approaches to produce micro-sized precursors of CIGSe absorbers on molybdenum are presented using 30-fs laser pulses at 790 nm wavelength. On the one hand, a multi pulse surface structuring of the molybdenum or the underlying glass substrate and a subsequent physical vapor deposition (PVD) process were used for a site-selective aggregation of indium droplets. On the other hand, a single pulse laser-induced forward transfer (LIFT) was utilized to selectively deposit combined copper/indium/gallium precursor pixels on the molybdenum back contact of the solar cell. It was demonstrated that a postprocessing (selenization, isolation, contacting) of the laser-generated micro-sized precursors results in an array of working CIGSe solar cells with an efficiency of 2.8% for 1 sun illumination.
A new approach is presented to quantify the so-called "heat affected zone" (HAZ) during
femtosecond laser pulse processing. Ablation of titanium nitride (TiN) thin films (~3 μm
thickness) by multiple femtosecond laser pulses (τ=130 fs, λ=800 nm) in air environment was
studied by means of two different surface analytical methods both being sensitive to chemical
alterations at the surface. Scanning Auger electron microscopy was applied for a visualization of the
spatial distribution of specific elements (Ti, O) within the laser-modified areas. The chemical state
of the irradiated surface was revealed by complementary x-ray photoelectron spectroscopy. Both
methods were used for a depth-profiling chemical analysis (tracking the elements Ti, N, O, and C)
using an Ar-ion beam for surface sputtering. In a narrow laser fluence range slightly below the
ablation threshold of TiN significant superficial oxidation can be observed leading to the formation
of substoichiometric TiO2-x. At fluences above the ablation threshold, an increased titanium
concentration is observed within the entire ablation craters. Following upon sputter removal the
elemental distribution into the depth of the nonablated material, the results allow an estimation of
the heat-affected zone for femtosecond laser ablation in air environment. According to our analyses,
the HAZ extends up to a few hundreds of nanometers into the nonablated material.
Femtosecond laser pulses are close to industrial use. The advantages of ultrashort laser pulses for micromachining applications especially in the case of dielectric and biological samples down to pulse durations of 5 fs have been established. The current international standards of laser safety are primarily concerned with CW and pulsed lasers down to the nanosecond range. Therefore, human tissue and laser-protection equipment was investigated with respect to its resistance and protection performance for femtosecond laser illumination down to 30 fs. This included filter glasses for laser protection eyewear, polymer and textile materials used in curtains and guards. Bulk absorber filters can provide enough protection against laser radiation, give a sufficiently broad absorption spectrum. Materials are damaged more easily by femtosecond laser radiation. The need for sufficient spectral broadness as well as the different damage thresholds have to be included in international laser safety standards. This work should trigger the development of novel eye-protection devices that are lighter and ergonomically more acceptable than present commercial models.
Zusammenfassung
Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively.
The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon by multiple (N = 100) linearly polarized Ti:sapphire femtosecond laser pulses (duration τ = 30 fs, center wavelength λ0 ~ 790 nm) is studied experimentally in air and water environment. The LIPSS surface morphologies are characterized by scanning electron microscopy and their spatial periods are quantified by two-dimensional Fourier analyses. It is demonstrated that the irradiation environment significantly influences the periodicity of the LIPSS. In air, so-called low-spatial frequency LIPSS (LSFL) were found with periods somewhat smaller than the laser wavelength (ΛLSFL ~ 0.7 × λ0) and an orientation perpendicular to the laser polarization. In contrast, for laser processing in water a reduced ablation threshold and LIPSS with approximately five times smaller periods ΛLIPSS ~ 0.15 × λ0 were observed in the same direction as in air. The results are discussed within the frame of recent LIPSS theories and complemented by a thin film based surface plasmon polariton model, which successfully describes the tremendously reduced LIPSS periods in water.
Recent publications indicate that the order of electrochemical anodization (before or after the laser processing step) plays an important role for the response of bone-forming osteoblasts—an effect that can be utilized for improving permanent dental or removable bone implants. For exploring these different surface functionalities, multimethod morphological, structural, and chemical characterizations are performed in combination with electrochemical pre- and postanodization for two different characteristic microspikes covered by nanometric laser-induced periodic surface structures on Ti–6Al–4V upon irradiation with near-infrared ps-laser pulses (1030 nm wavelength, ≈1 ps pulse duration, 67 and 80 kHz pulse repetition frequency) at two distinct sets of laser fluence and beam scanning parameters. This work involves morphological and topographical investigations by scanning electron microscopy and white light interference microscopy, structural material examinations via X-ray diffraction, and micro-Raman spectroscopy, as well as near-surface chemical analyses by X-ray photoelectron spectroscopy and hard X-ray photoelectron spectroscopy. The results allow to qualify the mean laser ablation depth, assess the spike geometry and surface roughness parameters, and provide new detailed insights into the near-surface oxidation that may affect the different cell growth behavior for pre- or postanodized medical implants.
Near-ablation threshold investigations focusing on the generation of periodic nanostructures and their correlation with physico-chemical
properties of the solid phase such as e.g., the material-dependent surface energy, were conducted. Molecular dynamic modelling in the
sub-picosecond time domain was used to consider ultrafast opto-electronic processes triggering surface reorganization reactions.
Fluid containment of solid interfaces showed strong influence on the resulting micro- and nanostructures due to its drastic reduction of the
surface energy. The phenomena are discussed in respect to the minimization of the surface free energy in dependence of material composition
and interfacial structure.
Ablation experiments in several glasses with single and multishot irradiation by laser pulses in the 10-fs pulse duration domain are presented; physical and technological implications are discussed. We demonstrate that these short pulses offer the potential for lateral and vertical machining precision of the order of 100 nm.
In situ optical second-harmonic generation (SHG) on centrosymmetric crystalline semiconductor electrodes opens up a new field of in situ investigations of hurried solid state interfaces and metal front contacts relevant to electronic and photovoltaic devices, which are rarely accessible by other methods. Photoelectrochemical nanosecond- and femtosecond-pulse laser investigations of silicon (111) electrodes show that in situ SHG is feasible in such complex interfacial systems. In a p-p polarization configuration, the azimuthal dependence of the SHG from oxide-covered and bare n-Si (111) electrodes, with and without Ni contact deposits, have been studied. Etching and regrowth of silicon oxides as well as burried interfacial electric field distributions were monitored. In situ SHG is shown to be extremely sensitive to trapped interfacial charge, crystal misorientations and surface step arrays. An advantage of femtosecond-pulses is the fact that illumination fluences that are well below the damage threshold, but still with sufficient power density, can be applied. (Author)
The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSSs) on single-crystalline silicon upon irradiation with single or multiple femtosecond-laser pulses (pulse duration τ=130 fs and central wavelength λ=800 nm) in air is studied experimentally and theoretically. In our theoretical approach, we model the LIPSS formation by combining the generally accepted first-principles theory of Sipe and co-workers with a Drude model in order to account for transient intrapulse changes in the optical properties of the material due to the excitation of a dense electron-hole plasma. Our results are capable to explain quantitatively the spatial periods of the LIPSSs being somewhat smaller than the laser wavelength, their orientation perpendicular to the laser beam polarization, and their characteristic fluence dependence. Moreover, evidence is presented that surface plasmon polaritons play a dominant role during the initial stage of near-wavelength-sized periodic surface structures in femtosecond-laser irradiated silicon, and it is demonstrated that these LIPSSs can be formed in silicon upon irradiation by single femtosecond-laser pulses.
On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses
(2005)
The physical effects reducing the damage threshold of dielectric films when exposed to multiple femtosecond pulses are investigated.
The measured temperature increase of a Ta2O5 film scales exponentially with the pulse fluence. A polarized luminescence signal is observed that
depends quadratically on the pulse fluence and is attributed to twophoton excitation of self-trapped excitons that form after band-to-band
excitation. The damage fluence decreases with increasing pulse number, but is independent of the repetition rate from 1 Hz to 1 kHz at a constant
pulse number. The repetition rate dependence of the breakdown threshold is also measured for TiO2 , HfO2,
Al2O3, and SiO2 films. A theoretical model is presented that explains these findings.
High-power optical multimode fibers are essential components for materials processing and surgery and can limit the performance of expensive systems due to breakdown at the end faces. The aim of this paper is the determination of laser-induced damage thresholds (LIDT) of fibers (FiberTech) and preforms (Heraeus Suprasil F300). Preforms served as models. They were heated up to maximum temperatures of 1100, 1300 and 1500°C and cooled down to room temperature at rates of 10 K min-1 (oven) and ~105 K min-1 (quenched in air) to freeze in various structural states simulating different conditions similar to a drawing process during the production of fibers. Single- and multi-pulse LIDT measurements were done in accordance with the relevant ISO standards. Nd:YAG laser pulses with durations of 15 ns (1064 nm wavelength) and 8.5 ns (532 nm) at a repetition rate of 10 Hz were used. For the preforms, LIDT values (1-on-1) ranged from 220 to 350 J/cm² (1064 nm) and from 80 to 110 J/cm² (532 nm), respectively. A multi-pulse impact changed the thresholds to lower values. The LIDT (1064 nm wavelength) of the preforms can be regarded as a lower limit for those of the fibers.
Optical multimode fibers are applied in materials processing (e.g. automotive industry), defense, aviation technology, medicine and biotechnology. One challenging task concerning the production of multimode fibers is the enhancement of laser-induced damage thresholds. A higher damage threshold enables a higher transmitted average power at a given fiber diameter or the same power inside a thinner fiber to obtain smaller focus spots.
In principle, different material parameters affect the damage threshold. Besides the quality of the preform bulk material itself, the drawing process during the production of the fiber and the preparation of the fiber end surfaces influence the resistance. Therefore, the change of the laser-induced damage threshold of preform materials was investigated in dependence on a varying thermal treatment and preparation procedure.
Single and multi-pulse laser-induced damage thresholds of preforms (F300, Heraeus) were measured using a Q-switched Nd:YAG laser at 1064 nm wavelength emitting pulses with a duration of 15 ns, a pulse energy of 12 mJ and a repetition rate of 10 Hz. The temporal and spatial shape of the laser pulses were controlled accurately.
Laser-induced damage thresholds in a range from 150 J cm-2 to 350 J cm-2 were determined depending on the number of pulses applied to the same spot, the thermal history and the polishing quality of the samples, respectively.
For pulse laser materials processing often optical step index and gradient index multimode fibers with core diameters ranging from 100 to 600 μm are used. The design of a high power fiber transmission system must take into account limitations resulting from both surface and volume damage effects. Especially, breakdown at the fiber end faces and self-focusing in the fiber volume critically influence the fiber performance. At least operation charts are desirable to select the appropriate fiber type for given laser parameters.
In industry-relevant studies the influence of fiber core diameter and end face preparation on laser-induced (surface) damage thresholds (LIDT) was investigated for frequently used all-silica fiber types (manufacturer LEONI). Experiments on preform material (initial fiber material) and compact specimens (models of the cladding and coating material) accompanied the tests performed in accordance with the relevant LIDT standards ISO 21254-1 and ISO 21254 2 for 1-on-1 and S-on-1 irradiation conditions, respectively. The relation beam diameter vs. LIDT was investigated for fused silica fibers. Additionally, laser-induced (bulk) damage thresholds of fused silica preform material F300 (manufacturer Heraeus) in dependence on external mechanical stress simulating fiber bending were measured. All experiments were performed with 10-ns laser pulses at 1064 and 532 nm wavelength with a Gaussian beam profile.
For pulse laser materials processing often optical step index and gradient index multimode fibers with core diameters ranging from 100 to 600 μm are used. The design of a high power fiber transmission system must take into account limitations resulting from both surface and volume damage effects. Especially, breakdown at the fiber end faces and self-focusing in the fiber volume critically influence the fiber performance. At least operation charts are desirable to select the appropriate fiber type for given laser parameters.
In industry-relevant studies the influence of fiber core diameter and end face preparation on laser-induced (surface) damage thresholds (LIDT) was investigated for frequently used all-silica fiber types (manufacturer LEONI). Experiments on preform material (initial fiber material) and compact specimens (models of the cladding and coating material) accompanied the tests performed in accordance with the relevant LIDT standards ISO 11254-1 and ISO 11254-2 for 1-on-1 and S-on-1 illumination conditions, respectively. The relation beam diameter vs. LIDT was investigated for fused silica fibers and preforms. Additionally, the laser-induced (bulk) damage threshold of fused silica preform material F300 (manufacturer Heraeus) in dependence on external mechanical stress simulating fiber bending was measured. All experiments were performed with 10-ns laser pulses at 1064 and 532 nm wavelength with a Gaussian beam profile.
The chemical characteristics of two different types of laser-induced periodic surface structures (LIPSS), so-called high and low spatial frequency LIPSS (HSFL and LSFL), formed upon irradiation of titanium surfaces by multiple femtosecond laser pulses in air (30 fs, 790 nm, 1 kHz), are analyzed by various optical and electron beam based surface analytical techniques, including micro-Raman spectroscopy, energy dispersive X-ray analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. The latter method was employed in a high-resolution mode being capable of spatially resolving even the smallest HSFL structures featuring spatial periods below 100 nm. In combination with an ion sputtering technique, depths-resolved chemical information of superficial oxidation processes was obtained, revealing characteristic differences between the two different types of LIPSS. Our results indicate that a few tens of nanometer shallow HSFL are formed on top of a ∼150 nm thick graded superficial oxide layer without sharp interfaces, consisting of amorphous TiO2 and partially crystallized Ti2O3. The larger LSFL structures with periods close to the irradiation wavelength originate from the laser-interaction with metallic titanium. They are covered by a ∼200 nm thick amorphous oxide layer, which consists mainly of TiO2 (at the surface) and other titanium oxide species of lower oxidation states underneath.