Filtern
Dokumenttyp
- Zeitschriftenartikel (6) (entfernen)
Schlagworte
- Steriltechnik (3)
- Haftung (2)
- Reinigung (2)
- Cross-sectional transmission electron microscopy (XTEM) (1)
- Magnetron sputtering (1)
- Mechanical properties (1)
- Multilayer (1)
- Oberflächenmesstechnik (1)
- Oberflächentechnik (1)
- Partikel-Haftung (1)
Ti/TiN multilayer coatings with multilayer periods in the range 550 nm and a final thickness of 2 µm were deposited on steel substrates by cyclic modulation of nitrogen gas flow into the chamber of a PVD sputtering device. Coating characterization was performed by cross-sectional transmission electron microscopy, glancing-angle X-ray diffraction and instrumental indentation testing. Individual a-titanium and titanium nitride layers were always observed, although for the finer microstructures, the TiN layers were thicker than the Ti layers by a factor three. The plastic hardness of the films increased steadily with decreasing layer spacing, following a HallPetch relationship. Finally, a hardness value of 42 GPa was reached, which is similar to that of a thick TiN monolayer, prepared under the same coating conditions.