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Eingeladener Vortrag
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We present dynamic plowing nanolithography on polymethylmethacrylate films, performed with a scan-linearized atomic force microscope able to scan up to 250 μm with high resolution. Modifications of the surface are obtained by plastically indenting the film surface with a vibrating tip. By changing the oscillation amplitude of the cantilever, i.e., the indentation depth, surfaces can be either imaged or modified. A program devoted to the control of the scanning process is also presented. The software basically converts the gray scale of pixel images into voltages used to control the dither piezo driving cantilever oscillations. The advantages of our experimental setup and the dependence of lithography efficiency on scanning parameters are discussed. Some insights into the process of surface modifications are presented.
Antimony clusters of different shapes and dimensions have been obtained by evaporating antimony on graphite. The dependence of the shape and dimensions of the particles on the evaporation parameters (effective layer thickness, temperature, pressure) is discussed. A characterisation of the different structures is presented. In particular, the decoration of graphite steps is discussed. Clusters have been dislocated by means of dynamic plowing nanolithography, both in vector and in image pattern mode. The dependence of the energy needed to dislocate a cluster on its dimensions and position is discussed.
Dynamic Plowing Lithography is employed to carve holes in a PMMA surface by indenting the sample during Tapping Mode imaging. The dependence of the dimensions of the holes on the tip shape, on the modulation voltage amplitude, and on the number of contacts between the tip and sample is studied. The results give some insights in the physico-chemical mechanisms accompanying such rapid modifications. Two-dimensional arrays of holes have also been carved, in order to study the result of the superposition of single holes.
Dynamic Plowing Lithography
(2001)
Two different methods of nanolithography, namely dynamic plowing lithography (DPL) and indentation by means of force-displacement curves (FDI), have been compared by performing them on two different polymers, poly (methylmethacrylate) and polystyrene. No fundamental differences can be found out in the efficiency of the two methods, i.e., in the depth of the lithographed structure as a function of the scanning parameters. The main drawback of FDI is that it is much more time consuming than DPL. On the other hand, when the sample is lithographed with DPL, the border walls that surround the lithographed structure are very much bigger than the border walls created through FDI. The physicochemical properties of the border walls created through DPL have been investigated. Several experimental data reveal that such border walls are very much softer and looser than unmodified polymers and suggest that during DPL the fast oscillating tip is able to break polymer chains. This does not happen with FDI, where border walls are simply made up of the material carved out by the tip. A method to eliminate these undesirable border walls is suggested.