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- Compound refractive lens (3) (entfernen)
This manuscript reviews the most used optical systems for X-ray microprobes and summarizes the experiences in research with synchrotron radiation as well as with X-ray tube generators.
The need for smaller beam spot sizes for various applications and the unique properties of X-rays have induced a remarkable and fast development in X-ray optical systems. These systems are divided into three main categories: diffractive, reflective and refractive. Examples of the three will be covered in this paper, highlighting the properties that allow having spot sizes down to sub-micrometer regime.
However, the extraordinary capabilities of such systems are always relative. Therefore, an overview of the techniques that use such optical systems will be given, emphasizing their applicability on several case studies.
A study regarding the possibility to use compound refractive lenses (CRLs) for X-ray absorption spectroscopy (XAS) was conducted. For XAS measurements the energy of the monochromatic incident beam has to be tuned over an energy range which is broader than the energy bandwidth of a CRL. To prove that µ-XAS with compound refractive lenses is possible, it had to be investigated how changes in the energy influence the beam parameters. This was done by tuning the energy around the nominal energy of the lens and recording images with a high resolution X-ray imaging setup. To investigate the changes in the spot size the scintillator was placed at the nominal focal distance and scans along the beam axis were performed. The effect on the photon flux of the incident beam due to absorption in the lens was investigated by performing XANES measurement on different reference materials with and without CRL. The results of these measurements using a CRL designed for 9 keV are shown and discussed.
We report on the trace analysis of copper and iron impurities in multicrystalline silicon wafers with the microbeam X-ray fluorescence (µ-XRF) technique. The efficiency of solar cells, which are based on multicrystalline silicon wafers, is strongly influenced by minor contamination with metals such as copper and iron. Application of compound refractive lenses (CRLs) in µ-XRF allows versatile two-dimensional mapping of relevant contaminations and localization of their sites of deposition. In this context, the measured bulk average limit of detection (LOD) was one picogram of iron and copper per gram of silicon. We suggest that µ-XRF is a valuable tool for non-destructive spatial (3D) quantification of metal impurities in a wide range of materials and devices whose functioning could be critically affected by impurities.