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Referierte Publikation
- ja (73) (entfernen)
Schlagworte
- Femtosecond laser ablation (17)
- Laser-induced periodic surface structures (LIPSS) (17)
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- Laser ablation (7)
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Organisationseinheit der BAM
- 6 Materialchemie (24)
- 6.2 Material- und Oberflächentechnologien (24)
- 6.7 Materialsynthese und Design (3)
- 9 Komponentensicherheit (3)
- 9.5 Tribologie und Verschleißschutz (3)
- 4 Material und Umwelt (2)
- 4.1 Biologische Materialschädigung und Referenzorganismen (2)
- 5 Werkstofftechnik (1)
- 5.1 Mikrostruktur Design und Degradation (1)
- 6.6 Physik und chemische Analytik der Polymere (1)
Paper des Monats
- ja (2)
Ultrashort pulse laser microstructuring (pulse duration 130 fs, wavelength 800 nm, repetition rate 2 Hz) of titanium nitride (TiN) films on silicon substrates was performed in air using the direct focusing technique. The lateral and vertical precision of laser ablation was evaluated. The TiN ablation threshold changed with the number of pulses applied to the surface due to an incubation effect. An ablation depth per pulse below the penetration depth of light was observed. Columnar structures were formed in the silicon substrate after drilling through the TiN layer.
Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.52.5 J/cm2 and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model.
Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case.