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The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon wafer surfaces by linearly polarized Ti:sapphire femtosecond laser pulses (pulse duration 130 fs, central wavelength 800 nm) is studied experimentally and theoretically. In the experiments, so-called low-spatial frequency LIPSS (LSFL) were found with periods smaller than the laser wavelength and an orientation perpendicular to the polarization. The experimental results are analyzed by means of a new theoretical approach, which combines the widely accepted LIPSS theory of Sipe et al. with a Drude model, in order to account for transient (intra-pulse) changes of the optical properties of the irradiated materials. It is found that the LSFL formation is caused by the excitation of surface plasmon polaritons, SPPs, once the initially semiconducting material turns to a metallic state upon formation of a dense free-electron-plasma in the material and the subsequent interference between its electrical field with that of the incident laser beam resulting in a spatially modulated energy deposition at the surface. Moreover, the influence of the laser-excited carrier density and the role of the feedback upon the multi-pulse irradiation and its relation to the excitation of SPP in a grating-like surface structure is discussed.
Surface nanostructuring enables the manipulation of many essential surface properties. With the recent rapid advancements in laser technology, a contactless large‐area processing at rates of up to m2 s−1 becomes feasible that allows new industrial applications in medicine, optics, tribology, biology, etc. On the other hand, the last two decades enable extremely successful and intense research in the field of so‐called laser‐induced periodic surface structures (LIPSS, ripples). Different types of these structures featuring periods of hundreds of nanometers only—far beyond the optical diffraction limit—up to several micrometers are easily manufactured in a single‐step process and can be widely controlled by a proper choice of the laser processing conditions. From a theoretical point of view, however, a vivid and very controversial debate emerges, whether LIPSS originate from electromagnetic effects or are caused by matter reorganization. This article aims to close a gap in the available literature on LIPSS by reviewing the currently existent theories of LIPSS along with their numerical implementations and by providing a comparison and critical assessment of these approaches.