Filtern
Erscheinungsjahr
Dokumenttyp
- Zeitschriftenartikel (128)
- Vortrag (67)
- Posterpräsentation (30)
- Beitrag zu einem Tagungsband (29)
- Buchkapitel (10)
- Beitrag zu einem Sammelband (4)
- Monografie (1)
- Video (1)
Schlagworte
- Laser-induced periodic surface structures (LIPSS) (67)
- Femtosecond laser ablation (40)
- Femtosecond laser (32)
- Surface functionalization (30)
- Laser processing (23)
- Laser ablation (19)
- Laser-induced periodic surface structures, LIPSS (12)
- Silicon (12)
- Applications (10)
- Nanostructures (10)
- Oxidation (10)
- Friction (9)
- Radiation protection (9)
- Tribology (9)
- Wear (9)
- Ablation (7)
- Femtosecond laser processing (7)
- Laser-induced X-ray emission (7)
- Laser-induced periodic surface structures (7)
- Microstructures (7)
- Steel (7)
- High-speed optical techniques (6)
- Indium phosphide (6)
- Laser beam effects (6)
- Atomic force microscopy (5)
- Dielectrics (5)
- Electromagnetic scattering (5)
- Raman spectroscopy (5)
- Silicon compounds (5)
- Capillary waves (4)
- Chalcopyrite (4)
- Double-pulse experiments (4)
- Titanium (4)
- Ultrafast optical techniques (4)
- Ultrashort laser material interaction (4)
- Ultrashort laser pulses (4)
- Biofilms (3)
- Damage threshold (3)
- Fluid transport (3)
- Free electron laser (3)
- Glass (3)
- Hard X-ray photoelectron spectroscopy (HAXPES) (3)
- Industrial applications (3)
- LIPSS (3)
- Mach-Zehnder interferometer (3)
- Oberflächenfunktionalisierung (3)
- Optical properties (3)
- Polycarbonate (3)
- Polymer (3)
- Refractive index (3)
- Scanning electron microscopy (3)
- Semiconductor (3)
- Surface morphology (3)
- Surface plasmon polaritons (3)
- Surface structure (3)
- Time-resolved scattering (3)
- Titanium alloy (3)
- Titanium nitride (3)
- Ultrashort pulsed laser (3)
- Wetting (3)
- XANES (3)
- Auger electron spectroscopy (2)
- Cell adhesion (2)
- Chemical analysis (2)
- Cribellate spiders (2)
- Cu(InGa)Se2 (2)
- Direct laser interference patterning (DLIP) (2)
- Doping (2)
- Elemental semiconductors (2)
- Femtosecond (2)
- Femtosecond laser irradiation (2)
- Femtosecond laser patterning (2)
- Finite-difference time-domain calculations (2)
- Fused silica (2)
- Glasses (2)
- Incubation (2)
- Laser (2)
- Laser damage (2)
- Laser-Materialbearbeitung (2)
- Laser-induced forward transfer (2)
- Laser-induced forward transfer (LIFT) (2)
- Laser-induced oxide layer (2)
- Laser-induced x-ray emission (2)
- Light concentration (2)
- Lizard (2)
- Magnesium compounds (2)
- Metals (2)
- Micro solar cell (2)
- Micro solar cells (2)
- Micro-concentrator solar cell (2)
- Microscopy (2)
- Microstructure (2)
- Modelling (2)
- Nanosecond laser (2)
- Nanosecond laser ablation (2)
- Nanostrukturen (2)
- Niobium (2)
- Optical breakdown (2)
- Pacemaker (2)
- Photovoltaics (2)
- Polaritons (2)
- Potassium compounds (2)
- Pump-probe experiments (2)
- Scanning force microscopy (2)
- Secondary hazard (2)
- Selective emitter (2)
- Self-organization (2)
- Semiconductors (2)
- Silica (2)
- Spectroscopic imaging ellipsometry (2)
- Surface modification (2)
- Surface plasmons (2)
- Surface texture (2)
- Surface wetting (2)
- TeO2 (2)
- Tellurium dioxide crystals (2)
- Ti6Al4V alloy (2)
- Time-of-flight mass spectroscopy (2)
- Time-of-flight secondary ion mass spectrometry (ToF-SIMS) (2)
- Time-resolved measurements (2)
- Transmission electron microscopy (2)
- Ultra-short pulse laser processing (2)
- Ultrashort laser processing (2)
- Ultrashort pulse laser processing (2)
- X-ray (2)
- (LIPSS) (1)
- 100Cr6 (1)
- 532 nm wavelength (1)
- ASTM (1)
- Ab initio calculations (1)
- Absorber optimization (1)
- Additive (1)
- Additives (1)
- Advanced applications (1)
- Aluminium (1)
- Amorphization (1)
- Analysis (1)
- Anodic oxidation (1)
- Anodization (1)
- Antiadhesive surfaces (1)
- Antibacterial surfaces (1)
- Antibakterielle Oberflächen (1)
- Antimicrobial (1)
- Application (1)
- Bacteria (1)
- Bacteria-repellent surfaces (1)
- Bacterial adhesion (1)
- Bacterial adhesion tests (1)
- Bariumalumoborosilicate glass (1)
- Bessel-Strahlen (1)
- Biofilm (1)
- Biofilm formation (1)
- Biofilm growth (1)
- Biofilme (1)
- Bioinspiration (1)
- Biomimetic (1)
- Biomimetic surfaces (1)
- Biomometics (1)
- Bionic materials (1)
- Bond lengths (1)
- Bug (1)
- Bulk metallic glasses (1)
- Bulk temperature (1)
- CIGS (1)
- CIGSe (1)
- CIGSe micro solar cells (1)
- Calamistrum (1)
- Carbon fibers (1)
- Carrier excitation (1)
- Carrier plasmas (1)
- Cell appendages (1)
- Cell-repellent surfaces (1)
- Ceramic matrix composites (1)
- Chalkopyrite (1)
- Coefficient of thermal expansion (1)
- Coherent scattering (1)
- Conduction bands (1)
- Copper indium gallium diselenide (CIGSe) (1)
- Copper-indium-gallium-diselenide (1)
- Crystallization (1)
- Cu(In,Ga)Se2 (1)
- CuInSe2 (1)
- D7755-11 (1)
- Darkfield microscopy (1)
- Debris (1)
- Dentistry (1)
- Diffusion (1)
- Direct laser interference patterning (1)
- Double-pulse (1)
- Drude model (1)
- Dünnschichtsolarzellen (1)
- EDX (1)
- Editorial (1)
- Electrical properties (1)
- Electrochemical treatment (1)
- Electromagnetic radiation (1)
- Electromagnetic theories (1)
- Electron backscattering diffraction (EBSD) (1)
- Electron microscopy (1)
- Electrospinning (1)
- European funding strategies (1)
- F pili (1)
- FS-laser ablation (1)
- Femtosecond laser modifications (1)
- Femtosecond laser pulse (1)
- Femtosecond laser-processing (1)
- Femtosecond phenomena (1)
- Femtosecond pulse laser (1)
- Femtosekunden-Laserablation (1)
- Femtosekundenlaser (1)
- Fluid-flow (1)
- Force distance curve (1)
- Fourier transforms (1)
- Free electron laser (FEL) (1)
- Free electron lasers (1)
- Fs-Laser (1)
- Fs-laser patterning (1)
- Fs-time resolved microscopy (1)
- Functional properties (1)
- Glass structure (1)
- Glass transformation temperature (1)
- Glow-discharge optical emission spectroscopy (1)
- Grain orientation (1)
- Grating (1)
- Heat affected zone (1)
- Heat diffusion (1)
- Hexagonally-arranged nano-protrusions (1)
- Hierarchical structures (1)
- Hydrodynamics (1)
- Indium (1)
- Indium Phosphide (1)
- Indium islands (1)
- Industrial application (1)
- Interferometer (1)
- Ionic liquid (1)
- Isotopes (1)
- LIFT (1)
- Large area structuring (1)
- Laser Machining (1)
- Laser Processing (1)
- Laser induced periodic surface structures (1)
- Laser induced periodic surface structures (LIPSS) (1)
- Laser irradiation (1)
- Laser material processing (1)
- Laser materials processing (1)
- Laser materials-processing applications (1)
- Laser nanostructuring (1)
- Laser radiation effects (1)
- Laser safety (1)
- Laser scanning microscopy (1)
- Laser scribing (1)
- Laser-induced Periodic Surface Structures (LIPSS) (1)
- Laser-induced amorphization (1)
- Laser-induced damage threshold (1)
- Laser-induced micro- and nanostructures (1)
- Laser-induced nanostructures (1)
- Laser-induced periodic surface strctures (LIPSS) (1)
- Laser-induced periodic surface strcutures (LIPSS) (1)
- Laser-induced periodic surface strcutures, LIPSS (1)
- Laser-induzierte periodische Oberflächen-Nanostrukturen (1)
- Laser-induzierte periodische Oberflächenstrukturen (1)
- Laser-modified surface (1)
- Lasers (1)
- Laserschutz (1)
- Laserstrukturierung (1)
- Light transmission (1)
- Literature survey (1)
- Lizards (1)
- Lubrication (1)
- Material sciences (1)
- Materialbearbeitung (1)
- Matter reorganization (1)
- Matter reorganization theories (1)
- Medical implants (1)
- Melting (1)
- Michelson interferometer (1)
- Micro raman spectroscopy (1)
- Microbial adhesion tests (1)
- Microbial adhesions (1)
- Microconcentrator solar cell (1)
- Micromachining (1)
- Mikrostrukturen (1)
- Molybdenum (1)
- Molybdenum substrate (1)
- Monochromators (1)
- Multicrystalline silicon (1)
- Multiphoton absorption (1)
- Nanofibers (1)
- Nanometrology (1)
- Nanosecond laser irradiation (1)
- Nanosecond pulses (1)
- Nanostrcutures (1)
- Nanostructuring (1)
- Native oxide layer (1)
- Neodymium (1)
- Networks (1)
- Nonlinear lithography (1)
- Nonlinear refractive index (1)
- Oberflächenmodifikation (1)
- Ophthalmology (1)
- Optical coatings (1)
- Optical components (1)
- Optical harmonic generation (1)
- Optical microscopy (1)
- Optical pulse shaping (1)
- Optical scattering (1)
- Optical storage (1)
- Optics at surfaces (1)
- PAG (1)
- Phase mask (1)
- Phase-contrast microscopy (1)
- Photoelektron spectroscopy (1)
- Photovoltaik (1)
- Physical vapor deposition (1)
- Picosecond (1)
- Plasma formation (1)
- Plasma processing (1)
- Polarisation (1)
- Polyethylene (1)
- Polyethylene terephthalate (1)
- Polyimide (1)
- Polymethylmethacrylate (1)
- Potassium-magnesium silicate glass (1)
- Protection housing (1)
- Pulse Laser (1)
- Pulse duration (1)
- Pulse shaping (1)
- Pump-probe (1)
- Quantitative phase-contrast microscopy (1)
- Quarzglas (1)
- Reactive oxygen species (1)
- Reflectivity measurements (1)
- Refractive index engineering (1)
- Reibung (1)
- Reibungsreduktion (1)
- Ripples (1)
- Röntgenemission (1)
- SEM (1)
- Saphir (1)
- Sapphire (1)
- Scanning Auger electron microscopy (1)
- Scanning Force Microscopy (1)
- Scanning/atomic force microscopy (SFM/AFM) (1)
- Scattering (1)
- Second harmonic generation (SHG) (1)
- Second-generation high temperature superconductor technology (1)
- Sekundärstrahlung (1)
- Self-induced transparency (1)
- Semiconductor materials (1)
- Silicate glass systems (1)
- Silicate glasses (1)
- Silicon nitride (1)
- Silicon oxide (1)
- Silicon solar cell (1)
- Simulation (1)
- Sliding (1)
- Solar cell (1)
- Solid lasers (1)
- Solid-state plasma (1)
- Spatial light interference microscopy (1)
- Sputter deposition (1)
- Stiffness (1)
- Strain (1)
- Structural relaxation (1)
- Superconductivity (1)
- Surface (1)
- Surface chemistry (1)
- Surface engineering (1)
- Surface oxidation (1)
- Surface plasmon polariton (1)
- Surface processing (1)
- Surface reflectivity (1)
- Surface structures (1)
- Surface superconductivity (1)
- Theoretical modelling (1)
- Thin films (1)
- Thin-film solar cells (1)
- Threshold of silicon (1)
- Ti6Al4V alloys (1)
- TiAl64V (1)
- Time-of-flight mass spectrometry (TOF-MS) (1)
- Time-offlight secondary ion mass spectrometry (ToF-SIMS) (1)
- Time-resolved coherent XUV scattering (1)
- Time-resolved coherent scattering (1)
- Time-resolved microscopy (1)
- Time-resolved reflectivity measurements (1)
- Titanium nitride films (1)
- ToF-SIMS (1)
- Transmission measurements (1)
- Tribologie (1)
- Ultrafast laser excitation (1)
- Ultrafast laser processing (1)
- Ultrafast microscopy (1)
- Ultrafast optics (1)
- Ultrafast phenomena (1)
- Ultrafast scattering (1)
- Ultrakurze Laserpulse (1)
- Ultrakurzpuls-Laser (1)
- Ultrakurzpuls-Laserbearbeitung (1)
- Ultrashort (1)
- Ultrashort lasers (1)
- VUV nanosecond laser ablation (1)
- Verschleiß (1)
- Verschleißreduktion (1)
- X-ray emission (1)
- X-ray emission hazards (1)
- X-ray energies (1)
- X-ray photoelectron spectroscopy (1)
- X-ray spectrum (1)
- XUV scattering (1)
- a-Si/my-Si (1)
- lossy materials (1)
- plasmon lifetime (1)
- second laser (1)
- surface plasmon polaritons (1)
Organisationseinheit der BAM
- 6 Materialchemie (103)
- 6.2 Material- und Oberflächentechnologien (103)
- 9 Komponentensicherheit (16)
- 9.5 Tribologie und Verschleißschutz (16)
- 4 Material und Umwelt (8)
- 4.1 Biologische Materialschädigung und Referenzorganismen (8)
- 6.1 Oberflächen- und Dünnschichtanalyse (8)
- 6.7 Materialsynthese und Design (4)
- 6.6 Physik und chemische Analytik der Polymere (3)
- 5 Werkstofftechnik (1)
Paper des Monats
- ja (1)
Some applications of polymer films require the microstructuring of partly uneven substrates. This cannot be achieved by conventional photolithography, usually performed with ultraviolet short-pulse lasers (excimer, fourth harmonic Nd:YAG). When processing thermally sensitive or undoped polymers with low optical absorption, the use of femtosecond laser pulses can improve the ablation precision, also reducing the heat-affected zone. Therefore, a Ti:sapphire laser system was employed to perform ablation experiments on polyimide (PI). The irradiated areas were evaluated by means of optical and scanning electron microscopy. Highly oriented ripple structures, which are related to the polarization state of the laser pulses, were observed in the cavities. The relationship between the ablation threshold fluence and the number of laser pulses applied to the same spot is described in accordance with an incubation model.
Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case.
Physical and chemical phenomena resulting from irradiation of silicon and indium phosphide with ultrashort laser pulses (~100fs) were investigated
with respect to the difference between single- and multiple-pulse treatment. In the single-pulse case, several processes were identified: modification,
recrystallization and ablation. All processes exhibit a distinct treshold behaviour. A two photon-absorption coefficient can be determined from a single
spatial ablation profile. Accumulation effects were observed for multi-pulse illumination. Different morphological features like bubbles, rippels and
microcolumns were found.
Multiple pulse investigations of 130-fs Ti:sapphire laser-induced damage of a high reflecting mirror consisting of alternating ?/4-layers of Ta2O5 and SiO2 and a single 500-nm Ta2O5 film were performed. In both cases, fused silica served as the substrate. For a fixed number of 1000 laser pulses per spot, a decrease in the damage threshold fluence of the mirror by a factor of two was observed by changing the repetition rate from 10 Hz to 1 kHz. A single 500-nm Ta2O5 film shows higher damage resistance compared to the mirror. The mirror and the Ta2O5 film samples were partially coated with a 300-nm-thick aluminium layer. The aluminium coating does not influence the damage threshold of the dielectrics underneath.
Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses
(2005)
Laser-induced periodic surface structures (LIPSS; ripples) with different spatial characteristics have been observed after irradiation of single-crystalline indium phosphide (c-InP) with multiple linearly polarized femtosecond pulses (130 fs, 800 nm) in air. With an increasing number of pulses per spot, N, up to 100, a characteristic evolution of two different types of ripples has been observed, i.e., (i) the growth of a grating perpendicular to the polarization vector consisting of nearly wavelength-sized periodic lines and (ii), in a specific pulse number regime (N = 530), the additional formation of equally oriented ripples with a spatial period close to half of the laser wavelength. For pulse numbers higher than 50, the formation of micrometer-spaced grooves has been found, which are oriented perpendicular to the ripples. These topographical surface alterations are discussed in the frame of existing LIPSS theories.
Multi-shot investigations of Ti:sapphire laser (wavelength (lambda) approximately equals 800 nm) induced damage were performed in three different laboratories (BAM, Berlin; LZH, Hannover; UNM, Albuquerque). The ablation behavior of a high reflecting mirror consisting of alternating (lambda) /4- layers of Ta2O5 and SiO2 was studied. Fused silica served as substrate. The influence of the pulse duration ((tau) equals 13 - 130 fs), the pulse number (30 - (infinity) ) and the repetition rate (10 Hz - 100 MHz) on the damage threshold will be discussed.
The effects of single femtosecond laser pulse irradiation (130 fs pulse duration, 800 nm center wavelength) on the structure of binary lithium silicate glasses of varying chemical compositions were investigated by micro-Raman spectroscopy. Permanent modifications were generated at the surface of the glass samples with varying laser fluences in the ablative regime and evaluated for changes in the corresponding Raman band positions and bandwidths. For increasing laser fluences, the position of certain Raman bands changed, indicating an increase in the mass density of the glass inside the irradiated area. Simultaneously, the widths of all investigated bands increased, indicating a higher degree of disorder in the glass structure with respect to bond-angle and bond-length variations.