X-ray Fluorescence (XRF) with a scanning electron microscope (SEM) is a valuable completion of the analytical capabilities of SEMs. Small and compact micro-focus x-ray sources are mounted to the microscope chamber, and the x-ray spectra are monitored with conventional EDS systems. Up to now the x-ray tubes used for the micro-focus x-ray sources are equipped with beryllium windows about 100 µm thick. The poly-capillary x-ray lenses have their transmission maximum at photon energies around 10 keV. It drops down in both low- and high-energy ranges. Hence, L-radiation from an Mo or Rh target will be strongly attenuated, and the excitation of fluorescence in the soft x-ray range becomes very ineffective. A new micro-focus x-ray source was developed. It is characterised by a lower self-absorption in the tube target, thin beryllium windows and an x-ray optics having a large distance between its foci and the maximum of transmission at about 5 keV. Thus K line fluorescence of light elements becomes effectively excited by the L-radiation from Mo or Rh tube targets. The detection limit for sodium oxide in glass was found to be below 1 mass%.
The propagation of synchrotron radiation through nanocapillary structures with channel sizes of 200 nm and periods in the micrometer size has been studied experimentally. It was shown that the propagation through individual capillary channels has a mode formation character. Furthermore it was shown that during the propagation through capillary channels the coherence of synchrotron radiation is partially conserved. Interference of beams propagating through different capillary channels is observed which leads to a periodically modulated distribution of the radiation intensity in a plane far from the exit of the structure. These investigations are of high relevance for the understanding of X-ray transmission through nanocapillaries and the appearance of wave properties at this size scale.