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- Ellipsometry (8)
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- Thin films (5)
- Coatings (4)
- Gas sensing (4)
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- Bonding strength (3)
- Depth profiling (3)
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Organisationseinheit der BAM
Owing primarily to speed, low cost and ease of use relative to competing surface analysis techniques, glow discharge spectrometry (GDS) has become an economically important depth profiling method for certain niche industries in Europe and Japan. For the industrial application of this method, layered certified reference materials (CRMs) are needed to ensure accuracy, as well as comparability between individual users. A survey of existing CRMs has been conducted to evaluate the availability of layered CRMs with appropriate characteristics. No materials with the desirable characteristics necessary for efficient implementation were found. These results indicate a need for the production of new layered CRMs. The survey was conducted by an advisory group assembled as part of the activities of the Glow Discharge Spectrometry Subcommittee (ISO TC201/SC8) associated with the ISO Technical Committee on Surface Chemical Analysis (ISO TC201).
High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force microscopy (SFM), grazing incidence X-ray reflectometry (GIXR), or X-ray fluorescence analysis (XRF). The measurement results achieved with these methods are based on different interactions between the film and the probe. A key question in nanotechnology is how to achieve consistent results on a level of uncertainty below one nanometre with different techniques.
Two different types of thickness standards are realised. Metal film standards for X-ray techniques in the thickness range 10 to 50 nm are calibrated by GIXR with monochromatised synchrotron radiation of 8048 eV. The results obtained at four different facilities show excellent agreement. SiO2 on Si standards for SE and SFM in the thickness range 6 to 1000 nm are calibrated by GIXR with monochromatised synchrotron radiation of 1841 eV and with a metrological SFM. Consistent results within the combined uncertainties are obtained with the two methods. Surfaces and interfaces of both types of standards are additionally investigated by transmission electron microscopy (TEM).
Visualization of surface modifications may be very challenging for coating/substrate systems of either almost identical optical constants, e.g. transparent films on substrates of the same material, or minor film thickness, substance quantity and affected area, e.g. ultra-thin or island films. Methods for visualization are optical microscopy (OM), imaging ellipsometry (IE), and referenced spectroscopic ellipsometry (RSE). Imaging ellipsometry operates at oblique incidence near Brewster angle of the bare, clean or unmodified substrate. In this configuration, reflected intensities are rather weak. However, the contrast to add-on and sub-off features may be superior. Referenced spectroscopic ellipsometry operates in a two-sample configuration but with much higher intensities. In many cases, both ellipsometric techniques reveal and visualize thin films, printed-pattern, laser-induced changes, and impurities better than optical microscopy. In particular for stratified homogeneous modifications, ellipsometric techniques give access to modelling and hence thickness determination. Modifications under investigation are polymer foil residue on silicon, laser-induced changes of ta-C:H coatings on 100Cr6 steel, imperfections of ta-C:H on thermal silicon oxide, degradation of glass, thin film tin oxide pattern on silicon, printed and dried pattern of liquids such as deionized water, cleaning agents, and dissolved silicone. © 2016 Elsevier B.V. All rights reserved.
Materialien mit Maß
(2005)
An auto-validation tool for the reliability quantification of materials integrated fiber Bragg grating (FBG) strain sensors have been developed and tested. The FBG strain sensor was jacketed with a magnetostrictive layer based on iron-nickel which, when excited by a specific magnetic field, adds an artificial strain to the sensor. The fixed relationship between magnetic induction and wavelength shift of the FBG strain sensor characterizes the bond strength and adhesion between the sensor and the surrounding structure. Due to an easily applicable magnetic field, it is possible to validate the sensor performance in a non-contact, fast way without disturbing the data-acquisition process.