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Accurate characterisation of the morphology (size) and chemistry of graphene-related 2D materials (GR2M) is key in understanding their extraordinary functionalities. Hence, not only the tailoring of these functionalities aiming at applications of increased-performance becomes possible, but also the correlation of the physico-chemical properties with the understanding of the potential toxicity eventually enables a safe and sustainable development of the GR2M for new applications. Whilst AFM and Raman Spectroscopy are recommended to measure the thickness of GO flakes, Scanning Electron Microscopy (SEM) is the most suited method to assess their lateral size, which varies between tens of µm down to below 100 nm. In this paper, procedures for the accurate determination of lateral size of graphene oxide (GO) flakes by SEM are presented. The prerequisite for accurate flake size analysis is the proper sample preparation, i.e. deposition of ideally isolated flakes on a substrate, with the flakes being unfolded, non-overlapped, parallel with the substrate, and having a high coverage density. Examples of optimum image caption conditions and image analysis procedures will be presented. The size descriptors and their measurement are described in the context of the corresponding analysis approach: i) length and width of the flakes with a quick and rough, but robust procedure, and ii) exact contouring of the flakes as part of a highly accurate, but more time-consuming measurement approach. The possibility of application of automated image analysis is discussed as the alternative to the manual flakes analysis.
The basic principles of generation of electrons and X-rays and the operation of SEM/EDS instruments are presented. Examples, recent successes and challenges in the analysis of nano-structures are given. Multi-method analytical approaches with the focus on imaging the nanoscale are highlighted. Details on the sample preparation and persepective on the automated analysis (sample preparation, measurement, data analyis and storage) are given. Metrological aspects, standardisation, and reference materials are also emphasized by examples.
More and more sub-micro and nano-materials shall be "quickly", but accurately characterized with respect to their morphology, shape, size or size distribution, but also to the chemical composition as well by means of an SEM/EDX (Scanning Electron Microscopy / X-Ray Energy Dispersive Spectrometry) system. This undertaking is becoming successful indeed if the transmission mode at low voltages such as those at a SEM, i. e. mostly up to 30 kV, and EDX, respectively is employed. The transmission mode at conventional SEM can e "activated" firstly by re-defining the specimen to be analyzed and preparing it as a thin specimen, which is quasi-transparent to electrons and by finding a way of collecting only the transmitted electrons for analysis. The first issue can be easily realized by using the conventional TEM grids (and the respective sample preparation); the second one becomes feasible either (i) by placing a socalled STEM semiconductor detector directly under the thin specimen or (ii) by using a Special transmission set-up, which enables to the conventional Everhart-Thornley detector to collect only transmitted electrons by blocking the direct collection of secondary electrons and guiding only the transmitted electrons onto it.
This presentation is structured in two parts: i) Hybrid metrology by combining SEM with AFM (N. Feltin) and ii) hybridization and corelative microscopy by SEM, STEM-in-SEM, TEM, EDS, Auger Electron Microscopy, TKD and more (D. Hodoroaba).
The first part is focused on the metrological part of the hybrid measurement SEM-AFM, the second part offers some further possibilities of correlative microscopy of nanoparticles based on practical examples.
he main objective of the nPSize project is to improve the measurement capabilities for nanoparticle size based on both measurement methods traceable to SI units and new reference materials. Two basic approaches have been used in order to develop measurement procedures resulting in traceable results of the nanoparticle size distribution: physical modelling for the methods used in the project (TSEM, SEM, AFM and SAXS) and machine learning.
Physical modelling: In this part, the physical models associated with different shape measurements for the techniques TSEM, SEM, AFM and SAXS have been collected and further developed with the aim to simulate the resulting signal as measured by the individual methods. Uncertainties and traceability associated with each model were investigated and evaluated. In the following, the progress on these physical models is reported for each individual method.
Machine Learning modelling: The aim of this part is to use machine learning to enable automatic measurement of nanoparticle shape from expert a-priori information only. No physical model will be used as a-priori information in this task.
The accuracy and traceability of the size results obtained by each technique will be analyzed and compared with the physical modelling. A machine learning database will then be used to create automatic detection algorithms.
Potential candidates of reference nano-materials are manufactured and systematically characterized in particular with respect to their morphology (shape, size and size distribution) in the frame of the running large European project NanoValid. By exploiting the transmission operation mode in a SEM, known as T-SEM, it is demonstrated by means of three representative examples of nanoparticles how a quick morphological inspection up to a complete, metrological characterization is feasible.
Advances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass - thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has become possible. This is demonstrated by means of various examples of nanostructures. Advanced data processing of T-SEM/EDS results sets the stage for the automated classification of NPs by feature analysis. This method combines the detection of morphological structures of interest by image processing of T-SEM micrographs with the chemical classification by EDS.
Advances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass – thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has become possible. This is demonstrated by means of various examples of nanostructures. Advanced data processing of T-SEM/EDS results sets the stage for the automated classification of NPs by feature analysis. This method combines the detection of morphological structures of interest by image processing of T-SEM micrographs with the chemical classification by EDS.
In the frame of the European project NanoValid, potential candidates of reference nanomaterials are manufactured and systematically characterized in particular with respect to their morphology (shape, size and size distribution). In this study, by exploiting the transmission operation mode in a high-resolution SEM, known as transmission SEM, the potential of this methodical approach is demonstrated by means of representative examples of nanoparticles. The method enables quick and accurate morphological inspection and systematic characterization. Energy dispersive X-ray spectroscopy imaging of single nanoparticles by using the transmission mode is demonstrated as feasible, too.
The test material EDS-TM001 together with an accompanying software package, “EDX spectrometer check”, have been made available in 2009 by BAM to be employed by EDS (energy dispersive spectrometer) users to check the performance of an EDS attached to the SEM. Particularly for test laboratories operating under accreditation schemes like ISO/IEC 17025, a periodical control of the critical instrumental parameters in end-user laboratories is required. With EDS-TM001 or EDS-TM002 (second generation) test material, this periodical check is simplified to the acquisition of only one 10 kV spectrum. The software “EDX spectrometer check” is destined to evaluate automatically this spectrum and determine the performance of the EDS in terms of energy resolution and calibration as well as possible alteration of low-energy efficiency due to detector contamination. Energy resolution can be compared with the specified values according to the international ISO standard ISO 15632:2012. EDS-TM is a synthetic material consisting of a thick layer of C, Al, Mn, Cu and Zr in a well-defined composition, deposited on a steel (in case of EDS-TM001) or silicon (in case of EDS-TM002) substrate. Meanwhile, more than one hundred laboratories use the EDS-TM001 or EDS-TM002 test material for the periodical check of their EDS. A detailed description of the test material and software together with examples of application was published recently. New results and gained experiences will be presented as well.
When the FWHM of lines appearing in the EDS-TM spectrum are determined, the spectrum background must be subtracted accurately. The applied physical background subtraction procedure is robust and takes into account the transmission of the detector window. While the previous version considers only Moxtek AP windows, the new version includes selection of silicon nitride window and the case of windowless detector. Moreover, the new version allows importing of spectra in Bruker spx format and EMSA/MSA files from EDAX TEAM software.
The roughness as a property of core–shell (CS) microparticles plays a key role in their functionality. Quantitative evaluation of the roughness of CS microparticles is, however, a challenging task with approaches using electron microscopy images being scarce and showing pronounced differences in terms of methodology and results. This work presents a generalized method for the reliable roughness determination of nonplanar specimens such as CS particles from electron microscopic images, the method being robust and reproducible with a high accuracy. It involves a self-written software package (Python) that analyzes the recorded images, extracts corresponding data, and calculates the roughness based on the deviation of the identified contour. Images of single particles are taken by a dual mode scanning electron microscopy (SEM) setup which permits imaging of the same field-of-view of the sample with high resolution and surface sensitive in SE InLens mode as well as in transmission mode (TSEM). Herein, a new type of polystyrene core–iron oxide shell–silica shell particles is developed to serve as a set of lower micrometer-sized study objects with different surface roughness; the analysis of their images by the semiautomatic workflow is demonstrating that the particles’ profile roughness can be quantitatively obtained.
Nanosafety is becoming increasingly important as nanomaterials are widely used in industrial processes and consumer products. For nanotoxicity measurements prior sterilization of the samples is necessary, but as structure activity relationships are made with properties of pristine particles, the question arises, if the sterilization process has an impact on the physico-chemical properties of nanoparticles and thus on the biological behavior.
This question will be addressed in this talk. For this purpose, results from SEM and EDS measurements are combined with those of a novel lab-based HAXPES spectrometer in order to obtain a more complete picture. At the end, an influence of sterilization will be evident, which indicates a restructuring of the nanoparticles owing to sterilization.
The potential of electrospray deposition, for the controlled preparation of particles for imaging in electron microscopes, is evaluated on various materials: from mono-modal suspensions of spherical particles to multimodal suspensions and to real-world industrial materials. It is shown that agglomeration is reduced substantially on the sample carrier, compared with conventional sample preparation techniques. For the first time, it is possible to assess the number concentration of a tri-modal polystyrene suspension by electron microscopy, due to the high deposition efficiency of the electrospray. We discovered that some suspension stabilizing surfactants form artifact particles during electrospraying. These can be avoided by optimizing the sprayed suspension.
The potential of electrospray deposition, for the controlled preparation of particles for imaging in electron microscopes, is evaluated on various materials: from mono-modal suspensions of spherical particles to multimodal suspensions and to real-world industrial materials. It is shown that agglomeration is reduced substantially on the sample carrier, compared with conventional sample preparation techniques. For the first time, it is possible to assess the number concentration of a tri-modal polystyrene suspension by electron microscopy, due to the high Deposition efficiency of the electrospray. We discovered that some suspension stabilizing surfactants form artifact particles during electrospraying. These can be avoided by optimizing the sprayed suspension.
Singlet oxygen generation potential of two novel free-base-porphyrin photocatalysts was investigated. The freebase-porphyrin-sensitized Fe3O4 magnetic nanoparticles (MNPs) were tested for the degradation of the model pollutant Bisphenol A (BPA) in aqueous solution, for the first time. MNPs with either cubic or spherical shape were synthesized using the sonochemical approach, followed by sensitizing with photoactive 4,4′,4′′,4′′′- (Porphine-5,10,15,20-tetrayl)tetrakis(benzoic acid) (TCPP). The resulted photocatalysts were characterized in detail by scanning and transmission electron microscopy, Brunauer–Emmett–Teller analysis, spectral techniques and vibrating sample magnetometry. The electron spin resonance experiments have confirmed the high activity of the photocatalysts through the efficient formation of singlet oxygen in solution. The optimum operational parameters for BPA degradation were established as follows: 1.0 μmol L−1 BPA, 1.0 g L−1 of photocatalyst, 100 μmol L−1 H2O2, under UVA irradiation. In these conditions, the results for both photocatalysts revealed that after only 10 min of reaction, over 64% and ca. 90% of BPA have been removed from solution in the absence and presence of H2O2, respectively. Whereas after 60 minutes of treatment, only 24% of BPA in real wastewater effluent samples were removed under UVA irradiation in the absence of H2O2, showing the high complexity of real wastewater. Moreover, both photocatalysts were successfully used for BPA removal in three consecutive runs, without significant loss of catalytic features.
Various applications such as automotive catalysts, photocatalysis and sensors rely on thin coatings with high active surface area. The development of new and improved coatings requires in-depth understanding of the film morphology and texture. Especially the film porosity is a key parameter to identify structure-property relationships in applications. However, an accurate porosity determination of thin porous coatings is a challenging. In this contribution we present and discuss a new approach for determining the porosity of films by x-rays at SEM.
X-ray Fluorescence (XRF) with a scanning electron microscope (SEM) is a valuable completion of the analytical capabilities of SEMs. Small and compact micro-focus x-ray sources are mounted to the microscope chamber, and the x-ray spectra are monitored with conventional EDS systems. Up to now the x-ray tubes used for the micro-focus x-ray sources are equipped with beryllium windows about 100 µm thick. The poly-capillary x-ray lenses have their transmission maximum at photon energies around 10 keV. It drops down in both low- and high-energy ranges. Hence, L-radiation from an Mo or Rh target will be strongly attenuated, and the excitation of fluorescence in the soft x-ray range becomes very ineffective. A new micro-focus x-ray source was developed. It is characterised by a lower self-absorption in the tube target, thin beryllium windows and an x-ray optics having a large distance between its foci and the maximum of transmission at about 5 keV. Thus K line fluorescence of light elements becomes effectively excited by the L-radiation from Mo or Rh tube targets. The detection limit for sodium oxide in glass was found to be below 1 mass%.
Checking the performance of energy dispersive X-ray spectrometers as well as validation of the results obtained with energy dispersive X-ray spectrometry (EDX) at a scanning electron microscope (SEM) involve the use of (certified) reference and dedicated test materials. This paper gives an overview on the test materials mostly employed by SEM/EDX users and accredited laboratories as well as on those recommended in international standards. The new BAM reference material EDS-CRM, which is currently in the process of certification, is specifically designed for the characterization of EDS systems at a SEM through calibration of the spectrometer efficiency in analytical laboratories in a simple manner. The certification of the spectra by means of a reference EDS is described. The focus is on the traceability of EDS efficiency which is ensured by measurements of the absolute detection efficiency of silicon drift detectors (SDD) and Si(Li) detectors at the laboratory of the PTB using the electron storage ring BESSY II as a primary X-ray source standard. A new test material in development at BAM for testing the performance of an EDS in the energy range below 1 keV is also briefly presented.
The accurate knowledge of the properties of polycapillary X-ray semi-lenses has a significant influence on the quantitative results in a widespread field of applications involving microfocus X-ray beams. A routine procedure for the characterisation of a polycapillary X-ray semi-lens with a scanning electron microscope (SEM) having attached an energy dispersive spectrometer (EDS) is presented in this paper. A key issue of the procedure consists of fitting the semi-lens in front of the EDS for spectra acquisition. Relevant semi-lens parameters such as focal distance, full width at half maximum (FWHM) of the acceptance area, and transmission are determined in parallelising mode of the semi-lens. Special attention has been paid to the calculation of the transmission.
Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM
(2009)
Both electron and polychromatic photon excitations (micro-focus X-ray source) at a scanning electron microscope (SEM) are used to determine the efficiency of an energy dispersive X-ray spectrometer up to 50 keV by means of a calibrated X-ray spectrometer and reference materials (RM) specially selected for this purpose.
Manufacturing of new perovskite layered solar cells with constant high light conversion Efficiency over time may be hampered by the loss of efficiency caused by structural and/or chemical alterations of the complex layered system. SEM/EDX combined with XPS were chosen as an appropriate methodical approach to characterize perovskite laboratory cells in depth and at surface, before and after light exposure. The layered perovskite system investigated here is based on glass covered with fluorine doped tin oxide, followed by thin films of TiO2, ZrO2, and a thick monolithic carbon. TiO2 film is subdivided into a dense layer covered by porous one constituted of nanoparticles of truncated bipyramidal shape. This layered system serves as the matrix for the perovskite. EDX spectral maps on cross sections of specimen have shown that Pb and I are distributed homogeneously throughout the porous layers C, ZrO2, and TiO2. SEM/EDX data show that 20 weeks of ambient daylight did not change significantly the in‐depth distribution of the elemental composition of Pb and I throughout the entire solar cell system. It was confirmed with EDX that nanoparticles identified in high‐resolution SEM micrographs contain mainly Pb and I, indicating these to be the perovskite crystals. However, a compositional and chemical altering began in the near‐surface region of the outermost ~10 nm after 2 months of illumination which was observed with XPS.
Need for large-area EDS detectors for imaging nanoparticles in a SEM operating in transmission mode
(2014)
In this chapter sample preparation, image acquisition, and nanoparticle size and shape characterization methods using the scanning electron microscope (SEM) in reflective and transmitted working modes are described. These help in obtaining reliable, highly repeatable results. The best solutions vary case-by-case and depend on the raw (powdered or suspension) nanoparticle material, the required measurement uncertainty and on the performance of the SEM.