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Organisationseinheit der BAM
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The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges.