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Quantitative analysis of a bulk sample requires that the
composition of the sample is homogeneous over the analyzed
volume. For inhomogenous samples the calculation of
the matrix effects is not correct and this can lead to wrong results in the element concentrations. For samples containing a layer structure a different quantitative evaluation has to be applied. This can be provided with the standard-based analysis in ESPRIT in combination with the STRATAGem software.
A short overview of thin film analysis by SEM/EDX is presented. Relevant steps such as optimization of instrumnetal parameters, extraction of net peak areas, use of standards, calculation of k-values and quantification with the dedicated thin film analysis software (Stratagem) are explained. Examples of different layered aystems are given together with validation of the results.
k-values (k-ratio, K-value) is defined as ratio of the X-ray photon intensity I measured for a particular characteristic peak from the unknown sample to the value measured for the same X-ray peak from a reference material of known composition under identical conditions of beam energy, spectrometer efficiency and electron dose.
The elemental composition of thin Fe-Ni alloy films deposited on silicon substrates were determined by electron probe microanalysis with an energy dispersive spectrometer using the STRATAGem software. The work was part of ample inter-laboratory comparisons organized in the frame of CCQM/SAWG (Consultative Committee for Amount of Substance/Surface Analysis Working Group). Therefore, the evaluation of the measurement uncertainties is treated in detail. By having the mass coverage and estimating a layer density, the layer thickness could be derived.