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Polydimethylsiloxane (PDMS)is one of the most appearing
contamination of medical devices.Dedicated analysis of PDMS on surfaces necessary, but the lack of calibration samples provides a bottle neck. There is a demand for metrological tools ensuring traceable and reliable analysis of mass deposition and of the chemical species of
contaminants. Photoelectron spectroscopy (PES) and reference-free GIXRF can be used to qualify bench top instrumentation.
Comparison of PES data and GIXRF data enable the establishment of a traceability chain.