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- High throughput screening (2)
- Alloy (1)
- ED-EPMA (1)
- Elemental composition (1)
- Film thickness (1)
- H2 sensor (1)
- K-values (1)
- LAPS (1)
- MEIS sensor (1)
- Macroscope (1)
A new high throughput screening method to characterise alloys used as gate metal of Metal/solid Electrolyte/Insulator/Semiconductor (MEIS) gas-sensors was developed. Samples with continuous gradients in alloy concentration for the system Pd1-x-yNiyCoy were analysed regarding H2 sensitivity. First results showed reduced poisoning effects of H2S for Ni concentrations between 4-11 at-% in Pd.
Characterization of Pd-Ni-Co alloy thin films by ED-EPMA with application of the STRATAGEM software
(2012)
Ternary thin film alloys based on Pd, Ni and Co on silicon wafers have been characterized in order to determine elemental composition and thickness. A broad variety of alloy compositions was obtained on one and the same substrate by magnetron dc-co-sputter deposition. Energy-dispersive electron probe X-ray microanalysis of these 'multi' alloy composition samples is performed in a non-destructive, precise and, if optimized, also in a time-saving way. The local thickness of the layers under study was in between 50 nm and 250 nm. Pure element bulk materials have been employed as reference specimens. The results attained in this study are compared to those obtained by other analytical methods as Auger electron spectroscopy and X-ray photo electron spectroscopy.
Ternary alloys have been studied as the gate metal of chemical sensors based on the field effect in silicon. The investigation of reduced poisoning of hydrogen sensors by H2S is presented in the alloy system PdxNiyCo1-x-y. A new method in high throughput screening of alloys is applied. Not singular sample compositions but a continuous gradient in alloy concentrations was produced on a semiconductor sample. A laser scanning system produces a photo current in the semiconductor to map the sensor signal and provide a quasi continuous alloy characterization. The new system is therefore called Continuous Gradient—High Throughput Screening Macroscope (CG-HTSM). Typically 625 alloys are characterized in 15 minutes. The resolution of our set-up allows distinguishing 100.000 alloy compositions.