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k-values (k-ratio, K-value) is defined as ratio of the X-ray photon intensity I measured for a particular characteristic peak from the unknown sample to the value measured for the same X-ray peak from a reference material of known composition under identical conditions of beam energy, spectrometer efficiency and electron dose.
A short overview of thin film analysis by SEM/EDX is presented. Relevant steps such as optimization of instrumnetal parameters, extraction of net peak areas, use of standards, calculation of k-values and quantification with the dedicated thin film analysis software (Stratagem) are explained. Examples of different layered aystems are given together with validation of the results.