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Ellipsometry is a valuable surface analysis tool with an unmatched sensitivity towards surface layer properties. In this presentation, an initiative is discussed to make ellipsometry also a metrological tool. This is usually seen as very difficult due to the model-based nature of the analysis process. By establishing standardisation and reference materials, ellipsometry can be made traceable and can also become a valuable part of the traceable thin film metrology landscape. This is important because this technique has much potential to determine complex material parameters much needed in the production of high-tech products.
The paper addresses the “Functional coatings for mechanical applications: characterization and standardization” and the following points are discussed in more detail:
1. Mechanic alapplications (coatings for tools and components, system features vs. material parameters)
2. Mechanical characterization (instrumented indentation testing (IIT), centrifugal adhesion testing (CAT), state of standardization)
3. Topometric characterization (white light interference microscopy (WLIM, 3D), mechanical stylus (MS, 2D), state of standardization)
4. Optical characterization (spectroscopic ellipsometry (SE), inter-laboratory comparison, state of standardization)