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The physical plasma parameters, temperature and electron number density, are studied in the RF-IC (RF inductively coupled) discharge at a reduced pressure of 3 Torr in mixtures of MoF6 with Ar, H2 and CH4. The emission spectra of mixtures are investigated. It is shown that in the presence of argon, the concentration of free electrons in plasma and dissociation rate of MoF6 increase. A main role of molecular hydrogen is the generation of atomic hydrogen that binds atomic fuorine and leads to the formation of gaseous and solid products. Exhaust gas mixtures exiting the reactor are analyzed by mass spectrometry. It is shown that for all cases, the conversion of MoF6 into reaction products is close to 100%.
A thermodynamic analysis of the equilibrium composition of MoF6 systems with Ar, H2 and CH4 was carried out and the obtained results are in good agreement with experimentally observed composition of the solid and gas phases. Analysis of solid deposits from mixture MoF6/H2/Ar revealed the presence of molybdenum powder and large amount of amorphous MoFx. The deposit obtained from mixtures with methane, MoF6/H2/Ar/CH4, contained crystalline molybdenum carbide, Mo3C2.
We run two pilot LIP experiments in reactive gas mixtures. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, materials that are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4+SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES) and IR and mass spectrometry (MS). We also model the laser induced plasma by performing static equilibrium chemistry calculations to see whether desired reaction products are thermodynamically favorable and dynamic calculations of the expanding plasma plume to see how and where the products form.
Spatiotemporal spectroscopic characterization of plasmas induced by non-orthogonal laser ablation
(2020)
Ablation geometry significantly affects the plasma parameters and the consequent spectroscopic observations in laser-induced breakdown spectroscopy. Nevertheless, plasmas induced by laser ablation under inclined incidence angles are studied to a significantly lesser extent compared to plasmas induced by standard orthogonal ablation. However, inclined ablation is prominent in stand-off applications, such as the Curiosity Mars rover, where the orthogonality of the ablation laser pulse cannot be always secured.
Thus, in this work, we characterize non-orthogonal ablation plasmas by applying plasma imaging, tomography, and spectral measurements. We confirm earlier observations according to which non-orthogonal ablation leads to a laser-induced plasma that consists of two distinct parts: one expanding primarily along the incident laser pulse and one expanding along the normal of the sample surface. Moreover, we confirm that the former emits mainly continuum radiation, while the latter emits mainly sample-specific characteristic radiation. We further investigate and compare the homogeneity of the plasmas and report that inclined ablation affects principally the ionic emissivity of laser-induced plasmas. Overall, our results imply that the decreased fluence resulting from inclined angle ablation and the resulting inhomogeneities of the plasmas must be considered for quantitative LIBS employing non-orthogonal ablation.
Die räumlich aufgelöste Heterodyn-Spektroskopie (SHS) kombiniert dispersive und interferometrische Techniken zur Gewinnung spektroskopischer Informationen und kann in einem anpassbaren Instrument realisiert werden. SHS wird für die chemische Analyse von verschiedenen Materialien mit Hilfe der Laser-induzierten Plasmaspektroskopie (LIBS) und der Raman-Spektroskopie eingesetzt.
Tetrafluorosilane (SF4) and tetrachlorosilane (SiCl4) plasmas have been widely used as a source of either F or Cl for etching silicon or as a source of silicon for deposition of Si-based materials.
Using different combinations of F and Cl in molecules of chlorofluorosilane SiFxCly adds additional flexibility in realization of these processes. Direct synthesis of SiFxCl4-x (x=1, 2, 3) from SiF4 and SiCl4 is thermodynamically forbidden under standard conditions. This restriction is removed in low-temperature plasmas studied in this work: a laser induced dielectric breakdown (LIDB) plasma and steady-state inductively-coupled plasma (ICP). The plasmas differ in many respects including energy content, temperature, and electron density that lead to different ionization/excitation states of plasma species, which are observed from plasma optical emission spectra. IR spectroscopy and mass-spectrometry confirm the formation of three chlorofluorosilanes, SiF3Cl, SiF2Cl2, and SiFCl3 that constitute ~60% in products of LIDB plasma and split 50/50 between SiF3Cl, SiFCl3 and SiF2Cl2. Experimental observations are verified by equilibrium static calculations via the minimization of Gibbs free energy and by dynamic calculations via the chemical-hydrodynamic plasma model of a spherically expanding plasma plume. The both types of calculations qualitatively agree with the results of spectroscopic
analysis and reproduce dominant presence of SiF2Cl2 as the temperature of the gas approaches the room temperature.
The effect of particle grain sizes in different cement-based mixtures on the laser-induced plasma evolution is studied using two experimental methods: (i) temporal and spatial evolution of the laser-induced shock wave is investigated using shadowgraphy and two-dimensional plasma imaging, and (ii) temporal and spatial distribution of elements in the plasma is investigated using two-dimensional spectral imaging. This study is motivated by the interest in applying laser-induced breakdown spectroscopy (LIBS) for chemical analysis of concrete, and subsequently obtain information related to damage assessment of structures like bridges and parking decks. The distribution of grain sizes is of major interest in civil engineering as for making concrete different aggregate grain sizes defined by a sieving curve (64mm to 0.125 mm) are needed. Aggregates up to a size of 180 μm can be excluded from the data set, therefore only the amount of small aggregates with a grain size below 180 μm must be considered with LIBS. All components of the concrete with a grain size smaller than 0.125mm are related to the flour grain content. Tested samples consisted of dry and hardened cement paste (water-cement ratio w/z=0.5), which served as a reference. Aggregate mixtures were made by adding flour grains (size 40 μm) and silica fume (size 0.1 μm) in different ratios to cement: 10%, 30%, 50% and 60%, all combined to the remaining percentage of dry or hydrated cement. The visualization results show that a dependance in the evolution of the plasma as a function of sample grain size can be detected only in the initial stages of the plasma formation, that is, at the initial 3 μs of the plasma life. Spectral information reveals the elemental distribution of the silicon and calcium in plasma, in both neutral and ionized form. Here also, a significant effect is observed in the first 1 μs of the plasma lifetime.
This course will provide an introduction to plasma diagnostic techniques. The major focus of the course will be on the discussions of the practical procedures as well as the underlying physical principles for the measurements of plasma fundamental characteristics (e.g., temperatures, thermodynamic properties, and electron number density). Particular emphasis will be placed on inductively coupled plasma–atomic emission spectrometry, but other analytical plasmas will also be used as examples when appropriate. Selected examples on how one can manipulate the operating conditions of the plasma source, based on the results of plasma diagnostic measurements, to improve its performance used for spectrochemical analysis will also be covered. Topics to be covered include thermal equilibrium, line profiles, temperatures, electron densities, excitation processes, microreactions, pump and probe diagnostics, tomography, temporal and spatial resolution. Basis of plasma computer modeling will be presented.
Laser-induced plasmas are widely used in many areas of science and technology; examples include spectrochemical analysis, thin film deposition, material processing, and even jet propulsion. Several topics will be addressed. First, general phenomenology of laser-induced plasmas will be discussed. Then, a chemical model will be presented based on a coupled solution of Navier-Stokes, state, radiative transfer, material transport, and chemical (Guldberg-Waage) equations. Results of computer simulations for several chemical systems will be shown and compared to experimental observations obtained by optical imaging, spectroscopy, and tomography. The latter diagnostic tools will also be briefly discussed.
In this paper experimental temperature and density maps of the laser induced plasma in water during Pulsed Laser ablation in Liquid (PLAL) for the production of metallic nanoparticles (NPs) has been determined. A detection system based on the simultaneous acquisition of two emission images at 515 and 410 nm has been constructed and the obtained images have been processed simultaneously by imaging software. The results of the data analysis show a variation of the temperature between 4000 and 7000 K over the plasma volume. Moreover, by the study of the temperature distribution and of the number densities along the plasma expansion axis it is possible to observe the condensation zone of the plasma where NPs can be formed.
Finally, the time associated to the electron processes is estimated and the plasma charging effect on NPs is demonstrated. The set of observations retrieved from these experiments suggests the importance of the plasma phase for the growth of NPs and the necessity of considering the spatial distribution of plasma parameters for the understanding of one of the most important issues of the PLAL process, that is the source of solid material in the plasma phase.
Stimulated emission observed experimentally in aluminum laser induced plasma is modeled via a kinetic approach. The simulated emission at several cascade transitions is created by a pump laser guided through the plasma at several microseconds after its creation and tuned in resonance with the strong transition at 266 nm. A two-dimensional space-time collisional radiative plasma model explains the creation of the population inversion and lasing at wavelengths 2.1 μm and 396.1 nm. The population inversion for lasing at 2.1 μm is created by depopulation of the ground state and population of the upper state via absorption of resonant radiation at 266 nm. The population inversion for lasing at 396.1 nm occurs during the laser pulse via the decay of the population of the pumped upper state to the lasing state via cascade transitions driven optically and by collisions. The model predicts that the population inversion and corresponding gain may reach high values even at moderate pump energies of several μJ per pulse. The efficiency of lasing at 2.1 μm and 396.1 nm is estimated to be on the order of a percent of laser pump energy. The polarization effect that the pump radiation at 266 nm imposes on the stimulated emission at 396.1 nm is discussed. The calculated results are favorably compared to experiment.
Spatial heterodyne spectroscopy (SHS) is used for quantitative analysis and classification of liquid samples. SHS is a version of a Michelson interferometer with no moving parts and with diffraction gratings in place of mirrors. The instrument converts frequency-resolved information into spatially resolved one and records it in the form of interferograms. The back-extraction of spectral information is done by the Fast Fourier transform. A SHS instrument is constructed with the resolving power 5000 and spectral range 522 - 593 nm. Two original technical solutions are used as compared to previous SHS instruments: the use of a high frequency diode pumped solid state (DPSS) laser for excitation of Raman spectra and a microscope-based collection system. Raman spectra are excited at 532 nm at the repetition rate 80 kHz. Raman shifts between 330 cm-1 and 1600 cm-1 are measured. A new application of SHS is demonstrated: for the first time it is used for quantitative Raman analysis to determine concentrations of cyclohexane in isopropanol and glycerol in water. Two calibration strategies are employed: univariate based on the construction of a calibration plot and multivariate based on partial least square regression (PLSR). The detection limits for both cyclohexane in isopropanol and glycerol in water are at a 0.5 mass% level. In addition to the Raman-SHS chemical analysis, classification of industrial oils (biodiesel, poly(1-decene), gasoline, heavy oil IFO380, polybutenes, and lubricant) is performed using their Raman-fluorescence spectra and principal component analysis (PCA). The oils are easily discriminated as they show distinct non-overlapping patterns in the space of principal components.
An improved algorithm for calibration-free laser induced breakdown spectroscopy (CF LIBS) is presented which includes several novel features in comparison with previously proposed similar algorithms. In particular, it allows using spectral lines with arbitrary optical thickness for the construction of Saha-Boltzmann plots, retrieves the absorption path length (plasma diameter) directly from a spectrum, replaces the Lorentzian line profile function by the Voigt function, and allows for self-absorption correction using pre-calculated and tabulated data rather than approximating functions. The tabulated data embody the solutions of the radiative transfer equation for numerous combinations of optical thicknesses and line widths. The algorithm is used to analyze 100 low alloy steel spectra.
The spatial heterodyne detection principle has a great potential in spectroscopy. It has an optical setup similar to that of a Michelson interferometer, with the mirrors replaced by diffraction gratings positioned at fixed, equal distances from the beamsplitter and are slightly tilted. The resulting interference pattern is recorded by a digital camera and the spectrum is recovered by using Fourier transformation. Although SHS was initially developed for astronomical and satellite-based atmospheric measurements, but in recent years it has been started to be applied in other branches of spectroscopy too. Recently the area of laser-induced breakdown spectroscopy (LIBS) has also discovered the potential of SHS. The main appeal of SHS detection in LIBS includes the compactness and robustness of the setup (in view of field applications) and the flexibility to optimize the setup for either high sensitivity or for high resolution, which can be benficially exploited in applications like stand-off measurements, quantitative analysis with isotope resolution, etc.
In the present work, we have improved and further optimized our initial LIBS-SHS setup described in a previous conference. By using optical simulations, we have modelled the light transmission efficiency, instrumental function and imaging properties of the system. We significantly improved and automated the spectral and image data processing sequence. The optimizations carried out resulted in an improved spectral resolution and repeatability, a lower spectral background and the elimination of the central line artifact originating from the Fourier transformation procedure. A detailed characterization of the LIBS spectroscopy performance (e.g. resolution, spectral coverage, tuning range, linearity, etc.), including a comparison with that of a LIBS setup based on a conventional dispersion CCD spectrometer was also performed.
A goal of this work is to apply the model, which was initially developed for laser induced plasmas, to plasmas used in chemical reactors, in particular, the inductively-coupled-RF discharge plasma. The model predicts equilibrium chemical compositions of reaction mixtures as functions of plasma temperature and stoichiometry of reactants. The mixtures investigated are BCl3/H2/Ar and BF3/H2/Ar where Ar serves as the plasma-forming gas and H2 as a binding agent which binds the active species Cl and F and Cl- and F-containing intermediates to produce gaseous B and its condensate. An additional goal is to obtain information about intermediate reaction products for different ratios of BCl3/H2 and BF3/H2 and at different temperatures and different Ar flow rates. Also, chemical reactions in laser induced plasmas (LIPs) created on calcium hydrate and calcium carbonate targets in argon are modeled. The results are compared with those obtained by means of the equilibrium model based on the minimization of Gibbs free energy.
Molecule formation in calcium carbonate and calcium hydroxide libs plasmas: model and experiment
(2019)
Analysis of calcium hydrate and calcium carbonate samples and their mixtures is important for archeology, anthropology, and geology. Laser-induced plasma spectroscopy (LIBS) is a suitable tool for such the analysis as it allows for in- and on-line real time chemical assays. LIBS is inherently a technique for atomic analysis; however, since recently, it is also used for molecular analysis. The information attained by the latter is mainly related to “secondary” chemistry that deals with re-association of atoms and ions into molecules at long delay times (≥10 μs) after the initial breakdown. Even though the direct information about the initial molecular content in the target may be lost, the molecular analysis by LIBS can still be useful to assess the composition of samples.
In this work, chemical reactions in laser induced plasmas (LIPs) created on calcium hydrate and calcium carbonate targets in argon are modeled and compared to experiment. The model is based on the assumption that all ionization processes and chemical reactions are at local thermodynamic equilibrium. A chemical composition of argon-calcium-oxygen and argon-calcium-hydrogen plasmas is studied as a function of plasma temperature and pressure. It is established that more than twenty simple and composite molecules and ions can be formed in the course of chemical reactions. The results are compared with those obtained by means of the equilibrium model based on the minimization of Gibbs free energy.
A goal of this work is to apply the model, which was initially developed for laser induced plasmas, to plasmas used in chemical reactors, in particular, the inductively-coupled-RF discharge plasma. The model predicts equilibrium chemical compositions of reaction mixtures as functions of plasma temperature and stoichiometry of reactants. The mixtures investigated are BCl3/H2/Ar and BF3/H2/Ar where Ar serves as the plasma-forming gas and H2 as a binding agent which binds the active species Cl and F and Cl- and F-containing intermediates to produce gaseous B and its condensate. An additional goal is to obtain information about intermediate reaction products for different ratios of BCl3/H2 and BF3/H2 and at different temperatures and different Ar flow rates. Also, chemical reactions in laser induced plasmas (LIPs) created on calcium hydrate and calcium carbonate targets in argon are modeled. The results are compared with those obtained by means of the equilibrium model based on the minimization of Gibbs free energy.
High purity halides of III-VI group elements, especially chloride and fluorides, are used in gas phase technologies for obtaining high purity materials and coatings. The reduction of halides in hydrogen-halide mixtures can be achieved in various discharge plasmas, e.g. inductively coupled, ark, and even laser-induced plasmas. Existing models of such plasmas are not sufficiently accurate to predict a yield of the targeted compounds and to describe the plasma processes involved in formation of these compounds. Besides, a construction of costly plasma-chemical reactors can be alleviated by the prior modeling of plasma processes that may occur in such reactors.
A goal of this work is to extend the model, which was initially developed for laser induced Plasmas, to plasmas used in chemical reactors, in particular, the inductively-coupled-RF discharge Plasma. The model predicts equilibrium chemical compositions of reaction mixtures as functions of plasma temperature and stoichiometry of reactants. The mixtures investigated are BCl3/H2/Ar and BF3/H2/Ar where Ar serves as the plasma-forming gas and H2 as a binding agent which binds the active species Cl and F and Cl- and F-containing intermediates to produce gaseous B and its condensate. An additional goal is to obtain information about intermediate reaction products for different ratios of BCl3/H2 and BF3/H2 and at different temperatures and different Ar flow rates.
It is found that the desired components B and B2 appear at appreciable concentrations of >0.1% and ~0.01% respectively only at temperatures above 3000 K. It is also established that the effect of charged species on the reaction products is miniscule for temperatures below 5000 K. The expected yield of boron as a function of the original mole fraction H2/BCl3 and H2/BF3 is calculated. The mole fractions are varied in the range 0.1-1000 and the temperature in the range 1000-10000 K. It is shown that the yield of boron increases with increasing the molar ratio H2/BCl3 and H2/BF3 up to ~100 in the temperature range 2000-5000 K. At higher temperatures, T>5000 K, the boron concentration reaches its maximum and does not depend on the concentration of hydrogen; all molecules dissociate and chemical reactions proceed only between charged particles (mostly elemental ions) and electrons. The calculated plasma parameters and composition are compared with experimental data obtained by optical emission spectroscopy. The calculated plasma temperature and electron density are shown to be in good agreement with the measured ones.
A goal of this work is to extend the model, which was initially developed for laser induced plasmas, to plasmas used in chemical reactors, in particular, the inductively-coupled-RF discharge plasma. The model predicts equilibrium chemical compositions of reaction mixtures as functions of plasma temperature and stoichiometry of reactants. The mixtures investigated are BCl3/H2/Ar and BF3/H2/Ar where Ar serves as the plasma-forming gas and H2 as a binding agent which binds the active species Cl and F and Cl- and F-containing intermediates to produce gaseous B and its condensate. An additional goal is to obtain information about intermediate reaction products for different ratios of BCl3/H2 and BF3/H2 and at different temperatures and different Ar flow rates.
It is found that the desired components B and B2 appear at appreciable concentrations of >0.1% and ~0.01% respectively only at temperatures above 3000 K. It is also established that the effect of charged species on the reaction products is miniscule for temperatures below 5000 K. The expected yield of boron as a function of the original mole fraction H2/BCl3 and H2/BF3 is calculated. The mole fractions are varied in the range 0.1-1000 and the temperature in the range 1000-10000 K. It is shown that the yield of boron increases with increasing the molar ratio H2/BCl3 and H2/BF3 up to ~100 in the temperature range 2000-5000 K. At higher temperatures, T>5000 K, the boron concentration reaches its maximum and does not depend on the concentration of hydrogen; all molecules dissociate and chemical reactions proceed only between charged particles (mostly elemental ions) and electrons. The calculated plasma parameters and composition are compared with experimental data obtained by optical emission spectroscopy. The calculated plasma temperature and electron density are shown to be in good agreement with the measured ones.
The approach, which was developed earlier for modeling chemical reactions in laser induced plasmas, is applied to radio-frequency discharge plasmas. The model is based on the assumption that all ionization processes and chemical reactions are at local thermodynamic equilibrium. A chemical composition of an argon-hydrogen plasma with an Addition of boron trichloride is studied as a function of plasma temperature and mole ratio H2∕BCl3. It is established that more than twenty simple and composite molecules and ions can be formed in the course of chemical reactions. The results are compared with those obtained earlier by means of another equilibrium model that uses ab-initio quantum chemical computations of thermochemical and kinetic data and a 0D thermochemical quilibrium solver.