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The thickness measurement of transparent layers with optical techniques is very problematic. The observed deviations can easily reach 100% of the layer thickness to be measured. In order to analyse these deviations, tactile reference measurements have been developed. The proposed method is based on contact mode measurements with low contact pressure. With stylus instruments, this can be realized either by using the recommended tip radius of 2 µm and very small probing forces in the micronewton range (and low scanning speeds of 50 µm s-1) or by using the recommended probing force of 750 µN, but a large probing tip radius. Three metal layers on silicon or silicon dioxide and two polymer resist materials on a thin chromium adhesive layer on silicon are used as artefacts. The comparison of the optical measurements with the tactile reference values disclosed deviations of the optical measurements of up to 195% of the layer thickness. Layer thicknesses were between 200 nm and 4 µm. This paper analyses the deviations of two white light interference microscopes, one phase shift interference microscope, one confocal microscope, one autofocus sensor, a chromatic sensor, an interferometric film thickness sensor and one spectroscopic ellipsometer. Simple and well-known expressions for the description of the observed deviations are presented and discussed. The order of magnitude of the observed deviations can be described well by these correction formulas but further investigations are necessary in order to better understand the systematic deviations of optical surface measuring instruments on non-cooperating surfaces.
The contactless measurement of temperatures with pyrometers is state of the art and a number of different commercial devices are available. Alternatively, these temperature measurements can be performed by means of infrared cameras. In light of permanently falling costs, the application of IR cameras simply as contactless thermometers appears to be an alternative to the use of pyrometers. For a current study, the surface temperature development of a sample has to be measured and recorded with at least 20 Hz sampling rate in a temperature range between 0°C and 70°C and with a temperature resolution of 0.1 K. The absolute value of the temperature is not as important as relative changes. Due to disturbing irradiation in the SWIR and MWIR regions, the sensor should work in the LWIR. We compared two pyrometers and a low-cost infrared camera with regard to the requirements defined above. In this paper we describe the setup, the results and the data evaluation. Both, raw data and post processed data, were considered. Surprisingly, the infrared camera had by far the best performance of the considered devices. Particularly, due to the large number of pixel (160 x 120), the S/N could be reduced considerably compared to the pyrometers. We also studied the stability of the frame rate and the related time steps of the IR camera. Although the frame rate is unstable (running under Windows operating system), the output data for the time steps were found to be correct and the required time resolution was achieved.
The application of IR cameras simply as contactless thermometers appears to be an alternative to the use of pyrometers. For a current study, the surface temperature development of a sample has to be measured and recorded with at least 20 Hz sampling rate in a temperature range between 0°C and 70°C and with a temperature resolution of 0.1 K. We compared two pyrometers and a low-cost infrared camera both sensitive in the LWIR only. Surprisingly, the infrared camera had by far the best performance of the considered devices.
Contactless temperature sensing is state of the art and essential part of countless applications in the field of process control and automation. This contribution presents the case of a nondestructive thickness measurement method for polymeric coatings on concrete ground. Two pyrometers and a low-cost infrared camera were taken into account. The particular measurement results were compared with those of a more sophisticated infrared camera. It was found that the low-cost infrared camera has a lower noise level than the pyrometers, even for a single pixel. The opportunity to average over a large number of pixels and to establish a bias correction enables a further noise reduction by almost factor of 10.
Furthermore, the temporal resolution of the infrared camera was investigated by means of a well-defined thermal oscillation. It could be demonstrated that the averaged time stamps are correct and the requirement of a Minimum framerate of 50 Hz is met. Finally, the temperature transient on a polymer coated concrete block during and after a 10 s heating period was recorded with a pyrometer and the infrared camera. This experiment confirmed the suitability of the camera for the intended measurement method.
Bei der Realisierung von Oberflächen-Schutz-System (OSS) auf Betonflächen ist die tatsächlich erreichte Dicke der Beschichtung ein wesentlicher Parameter, der über die Funktionalität und Langzeitstabilität der aufgetragenen Schicht entscheidet. Die Firma IBOS und die BAM haben in den letzten Jahren gemeinsam einen funktionstüchtigen Prototyp eines Messgeräts zur zerstörungsfreien Schichtdickenmessung für Bodenbeschichtungen entwickelt. Hierin wird die Abkühlkurve eines vorher erwärmten Bereichs berührungslos mit einer IR-Kamera erfasst und mit einem Modell verglichen, was die Bestimmung der Schichtdicke ermöglicht. Im Rahmen dieses Beitrags wird die Umsetzung der Methode unter Laborbedingungen und in der Praxis auf der Baustelle erläutert und diskutiert.