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- XPS (6)
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- NEXAFS (3)
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Eingeladener Vortrag
- nein (120)
Ageing studies of plasma deposited organic films by surface chemical analysis (ESCA, ToF-SIMS, XAS)
(2006)
Aminated functional organic surfaces as viewed by XPS, X-ray absorption spectroscopy and ToF-SIMS
(2011)
Unsaturated carbon species at polymer surfaces: The potential of X-ray absorption spectroscopy
(2001)
Surface Analysis
(2008)
Surface chemical analysis - Determination of lateral resolution and sharpness in beam-based methods
(2012)
Metrology for Nano-Analysis: Establishing Reference Methods for Characterizing Nano-Materials
(2013)
Research and Standardisaton Efforts in Surface Characterisation at BAM in Support of New Technology
(2013)
Summaries of achievements and future activities of the CCQM Surface Analysis Working Group (SAWG)
(2013)
A comprehensive characterization of plasma modified polymer surfaces or plasma-polymerized thin films needs access to parameters as
- concentration of saturated/unsaturated carbon species (e.g. aromaticity) or other double bonds as C=N or C=O,
- branching, and
- losses of crystallinty or other degrees of structural order.
Furthermore the complex ageing phenomena of plasma modified polymers/plasma-polymers and the measurement of an in-depth distribution of chemical species are challenges for the analyst. The talk will display selected examples where such challenges have been met by using advanced methods of surface chemical analyses as Photoelectron Spectroscopy with variable excitation energy (“SyncXPS”), X-ray Absorption Spectroscopy (NEXAFS) at C, N and O K-edges and Time-of-Flight Secondary Mass Spectroscopy (ToF-SIMS) combined with Principal Component analysis (PCA).
Reference-free XRF is a SI traceable technique for the
determination of the mass deposition (mass per unit area) of elements in films on the nano- and micro scale. The method is radiometrically calibrated instrumentation (PTB@BESSY II, Germany) and based on reliable knowledge of all relevant atomic fundamental, experimental and instrumental parameters. No calibration sample or reference materials are necessary. The approach had been validated in the CCQM-P140 pilot study and the K129 key comparison by determination of mole fractions in Cu(In,Ga)Se2 thin films.
The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1-xAs and InxGa1 xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers a plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too.
BAM-L200 fully supports the implementation of the revised International Standard ISO 18516 (in preparation) which is based on knowledge outlined in the Technical Report ISO/TR 19319:2013.