Filtern
Dokumenttyp
Sprache
- Englisch (2)
Referierte Publikation
- ja (2) (entfernen)
Schlagworte
- LTCC (1)
- Permittivity reduction (1)
- Porosification (1)
- Wet chemical etching (1)
Organisationseinheit der BAM
In the last years, a lot of research work has been performed in the field of surface coatings and thin films technology, often supported by governmental research programs, as i.e. in Germany, the Thin Film Technology and OSTec research programs. But up until now, there is still a lack in transfer of this large amount of knowledge created by research activities on to industrial application and commercialization. To overcome this problem, a new web based information system has been developed (http://www.schichttechnik.net), which in a first step will make the whole content of the German OSTec research program (approx. 180 research reports) of the last 10 years available. In further steps, data from products of coating suppliers and other research programs will be taken into account. The database contains the following sections: definition of the coating system, deposition equipment, deposition processes, application properties, test procedures and test equipment, information about standardization and base information about coating processes etc. It will be possible to search for coatings by material properties and functions of coatings, considering also restriction on the substrate. In addition, searching regarding combination of properties, e.g. for wear-resistant, conductive, decorative coatings etc. will also be possible.
The wireless high-frequency technology requires a robust, cost-effective, and highly integrated substrate technology offering the capability for areas of tailored permittivity. The wet-chemical porosification of low temperature co-fired ceramics (LTCC) substrates offers such an approach by locally embedding air. Porosification of LTCC in both extremely acidic and alkaline media has been investigated in previous works. However, for improving the available knowledge on the porosification of LTCC with H3PO4 as a standard and a widely used etching solution, the impact of solution concentration was systematically investigated and a substantial improvement in the etching performance was achieved. Moreover, in the present study, for the first time, the intermediate pH values, and the impact of pH as a key parameter on the etching process have been investigated. For this purpose, the applicability of phosphate buffer solution (PBS) as a prospective novel etchant mixture for the porosification of a commercially available LTCC tape (Ceramtape GC) was explored. Valuable information about surface morphology, crystalline composition, and the pore structure of the etched LTCCs was gathered employing scanning electron microscopy, transmission electron microscopy, X-ray diffraction analysis, and mercury porosimetry measurements. Based on these findings, the performance of PBS-based etchant systems towards the generation of porous LTCCs combining high depths of porosification with acceptable surface characteristics for subsequent metallization is demonstrated. Based on the obtained results, by application of a 0.2 mol L−1 solution of PBS, the effective relative permittivity of test samples with a thickness of approximately 600 µm and a porosification depth of 186 µm from each side, could be reduced up to 10% of its initial “as fired” value. Also, based on the measurement results and by measuring the depth of porosification, the permittivity of the etched layer was estimated to show a reduction of up to 22% compared to the initial “as fired” value.