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Air-coupled ultrasound sensors have advantages over contact ultrasound sensors when a sample should not become contaminated or influenced by the couplant or the measurement has to be a fast and automated inline process. Thereby, air-coupled transducers must emit high-energy pulses due to the low air-to-solid power transmission ratios (10−3 to 10−8). Currently used resonant transducers trade bandwidth—a prerequisite for material parameter analysis—against pulse energy. Here we show that a combination of a non-resonant ultrasound emitter and a non-resonant detector enables the generation and detection of pulses that are both high in amplitude (130 dB) and bandwidth (2 µs pulse width). We further show an initial application: the detection of reflections inside of a carbon fiber reinforced plastic plate with thicknesses between 1.7 mm and 10 mm. As the sensors work contact-free, the time of flight and the period of the in-plate reflections are independent parameters. Hence, a variation of ultrasound velocity is distinguishable from a variation of plate thickness and both properties are determined simultaneously. The sensor combination is likely to find numerous industrial applications necessitating high automation capacity and opens possibilities for air-coupled, single-side ultrasonic inspection.
Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range
(2002)
The thickness of thin films of platinum and nickel on fused silica and silicon substrates has been determined by EPMA using the commercial software STRATAGEM for calculation of film thickness. Film thickness ranged in the order 10 nm. An attempt was made to estimate the confidence range of the method by comparison with results from other methods of analysis. The data show that in addition to the uncertainty of the spectral intensity measurement and the complicated fitting routine, systematic deviation caused by the underlying model should be added. The scattering in the results from other methods does not enable specification of a range of uncertainty, but deviations from the real thickness are estimated to be less than 20%.