ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam-based methods with a range from nanometres to micrometres revises ISO 18516:2006 Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution. It implements three different methods delivering parameters useful to express the lateral resolution: (1) the straight edge method, (2) the narrow line method and (3) the grating method. The theoretical background of these methods is introduced in ISO/TR 19319:2013 Surface chemical analysis—Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods. The revised International Standard ISO 18516 delivers standardized procedures for the determination of the (1) effective lateral resolution by imaging of square-wave gratings, the (2) lateral resolution expressed as the parameter D12–88 characterizing the steepness of the sigmoidal edge spread function (ESF) determined by imaging a straight edge and (3) the lateral resolution expressed as the full width of half maximum of the line spread function (LSF), wLSF, determined by imaging a narrow line. The last method also delivers information on the shape of the LSF, which characterizes an individual imaging instrument. Finally, the implementation of all three standardized methods in the field of imaging laboratory X-ray photoelectron spectroscopy (XPS) is shortly presented. This part of the letter is based on the use of a new test sample developed at ETH Zurich, Switzerland. This test sample displays a micrometre scaled pattern motivated by the resolving power of recent imaging XPS instruments.
Es wird die Anwendung des Objektrasterverfahrens zur Untersuchung des elastischen und inelastischen, anisotropen und inhomogenen Verformungsverhaltens parallelepipedischer, metallischer Einkristall-Zugproben im Ergebnis unterbrochener Belastungsstufen von ca. 0,01%, 0,05%, 0,10% und 0,20% Restdehnung beschrieben. Diese Vorgehensweise ermöglicht die gleichzeitige Bestimmung aktivierter Gleitsysteme mit einem optischen Nano-Topografiesystem nach der Weißlichtinterferenzmethode. Aus den Verformungsdaten im elastischen Bereich können flächen- und richtungsabhängige Materialkennwerte ermittelt werden.
A special grating method has been applied for three-dimensional investigation of elastic and inelastic, anisotropic and inhomogeneous deformation of parallelepipedal metallic single crystal specimen by interrupted tensile tests in steps of 0,01%, 0,05%, 0,10% and 0,20% residual strain. This procedure gives the ability to determine activated slip systems by white light interferometric nanoscale topometry. Elastic anisotropic material parameters of cubic crystals can be calculated from experimental data.