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Eingeladener Vortrag
- nein (5)
A new high throughput screening method to characterise alloys used as gate metal of Metal/solid Electrolyte/Insulator/Semiconductor (MEIS) gas-sensors was developed. Samples with continuous gradients in alloy concentration for the system Pd1-x-yNiyCoy were analysed regarding H2 sensitivity. First results showed reduced poisoning effects of H2S for Ni concentrations between 4-11 at-% in Pd.
Characterization of Pd-Ni-Co alloy thin films by ED-EPMA with application of the STRATAGEM software
(2012)
Ternary thin film alloys based on Pd, Ni and Co on silicon wafers have been characterized in order to determine elemental composition and thickness. A broad variety of alloy compositions was obtained on one and the same substrate by magnetron dc-co-sputter deposition. Energy-dispersive electron probe X-ray microanalysis of these 'multi' alloy composition samples is performed in a non-destructive, precise and, if optimized, also in a time-saving way. The local thickness of the layers under study was in between 50 nm and 250 nm. Pure element bulk materials have been employed as reference specimens. The results attained in this study are compared to those obtained by other analytical methods as Auger electron spectroscopy and X-ray photo electron spectroscopy.