A method to test the performance of an energy-dispersive X-ray spectrometer (EDS)
- A test material for routine performance evaluation of energy-dispersive X-ray spectrometers (EDS) is presented. It consists of a synthetic, thick coating of C, Al, Mn, Cu, and Zr, in an elemental composition that provides interference-free characteristic X-ray lines of similar intensities at 10 kV scanning electron microscope voltage. The EDS energy resolution at the C-K, Mn-Lα, Cu-Lα, Al-K, Zr-Lα, and Mn-Kα lines, the calibration state of the energy scale, and the Mn-Lα/Mn-Kα intensity ratio as a measure for the low-energy detection efficiency are calculated by a dedicated software package from the 10 kV spectrum. Measurements at various input count rates and processor shaping times enable an estimation of the operation conditions for which the X-ray spectrum is not yet corrupted by pile-up events. Representative examples of EDS systems characterized with the test material and the related software are presented and discussed.
| Autor*innen: | Vasile-Dan HodoroabaORCiD, M. Procop |
|---|---|
| Dokumenttyp: | Zeitschriftenartikel |
| Veröffentlichungsform: | Verlagsliteratur |
| Sprache: | Englisch |
| Titel des übergeordneten Werkes (Englisch): | Microscopy and microanalysis |
| Jahr der Erstveröffentlichung: | 2014 |
| Herausgeber (Institution): | Microscopy Society of America |
| Verlag: | Cambridge University Press |
| Verlagsort: | New York, NY |
| Jahrgang/Band: | 20 |
| Ausgabe/Heft: | 05 |
| Erste Seite: | 1556 |
| Letzte Seite: | 1564 |
| Freie Schlagwörter: | Energy resolution; Energy-dispersive X-ray spectrometer (EDS); Energy-dispersive X-ray spectroscopy (EDX, XEDS); ISO 15632; Performance check; Scanning electron microscope (SEM); Test material |
| DOI: | 10.1017/S1431927614001652 |
| ISSN: | 1431-9276 |
| ISSN: | 1435-8115 |
| Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
| Datum der Freischaltung: | 20.02.2016 |
| Referierte Publikation: | Ja |
| Datum der Eintragung als referierte Publikation: | 08.10.2014 |

