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Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene

  • We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collectedWe report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.zeige mehrzeige weniger

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Metadaten
Autor*innen:B. P. Reed, D.J.H. Cant, J. Spencer, A. J. Carmona-Carmona, A. Bushell, A. Herrara-Gómez, A. Kurokawa, A. Thissen, A.G. Thomas, A.J. Britton, A. Bernasik, A. Fuchs, A. P. Baddorf, B. Bock, B. Thellacker, B. Cheng, D.G. Castner, D.J. Morgan, D. Valley, E.A. Willneff, E.F. Smith, E. Nolot, F. Xie, G. Zorn, G.C. Smith, H. Yasukufu, J. L. Fenton, J. Chen, J..D.P. Counsell, Jörg RadnikORCiD, K.J. Gaskell, K. Artyushkova, L. Yang, L. Zhang, M. Eguchi, M. Walker, M. Hajdyla, M.M. Marzec, M.R. Linford, N. Kubota, O. Cartazar-Martínez, P. Dietrich, R. Satoh, S.L.M. Schroeder, T.G. Avval, T. Nagatomi, V. Fernandez, W. Lake, Y. Azuma, Y. Yoshikawa, A.G. Shard
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Journal of Vacuum Science & Technology A
Jahr der Erstveröffentlichung:2020
Organisationseinheit der BAM:6 Materialchemie
6 Materialchemie / 6.1 Oberflächen- und Dünnschichtanalyse
Herausgeber (Institution):American Vacuum Society
Jahrgang/Band:38
Ausgabe/Heft:6
Erste Seite:063208
DDC-Klassifikation:Naturwissenschaften und Mathematik / Chemie / Analytische Chemie
Freie Schlagwörter:Intensity scale calibration; Low-density polyethylene (LDPE); Reference spectra; Transmission function; X-ray photoelectron spectroscopy
Themenfelder/Aktivitätsfelder der BAM:Chemie und Prozesstechnik
DOI:10.1116/6.0000577
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:26.11.2020
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:14.12.2020
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