Zitieren Sie bitte immer diesen URN: urn:nbn:de:kobv:b43-551026
Multilevel effective material approximation for modeling ellipsometric measurements on complex porous thin films
- Catalysts are important components in chemical processes because they lower the activation energy and thus determine the rate, efficiency and selectivity of a chemical reaction. This property plays an important role in many of today’s processes, including the electrochemical splitting of water. Due to the continuous development of catalyst materials, they are becoming more complex, which makes a reliable evaluation of physicochemical properties challenging even for modern analytical measurement techniques and industrial manufacturing. We present a fast, vacuum-free and non-destructive analytical approach using multi-sample spectroscopic ellipsometry to determine relevant material parameters such as film thickness, porosity and composition of mesoporous IrOx–TiOy films. Mesoporous IrOx–TiOy films were deposited on Si wafers by sol–gel synthesis, varying the composition of the mixed oxide films between 0 and 100 wt%Ir. The ellipsometric modeling is based on an anisotropic BruggemanCatalysts are important components in chemical processes because they lower the activation energy and thus determine the rate, efficiency and selectivity of a chemical reaction. This property plays an important role in many of today’s processes, including the electrochemical splitting of water. Due to the continuous development of catalyst materials, they are becoming more complex, which makes a reliable evaluation of physicochemical properties challenging even for modern analytical measurement techniques and industrial manufacturing. We present a fast, vacuum-free and non-destructive analytical approach using multi-sample spectroscopic ellipsometry to determine relevant material parameters such as film thickness, porosity and composition of mesoporous IrOx–TiOy films. Mesoporous IrOx–TiOy films were deposited on Si wafers by sol–gel synthesis, varying the composition of the mixed oxide films between 0 and 100 wt%Ir. The ellipsometric modeling is based on an anisotropic Bruggeman effective medium approximation (a-BEMA) to determine the film thickness and volume fraction of the material and pores. The volume fraction of the material was again modeled using a Bruggeman EMA to determine the chemical composition of the materials. The ellipsometric fitting results were compared with complementary methods, such as scanning electron microscopy (SEM), electron probe microanalysis (EPMA) as well as environmental ellipsometric porosimetry (EEP).…
Autor*innen: | René SachseORCiD, Vasile-Dan HodoroabaORCiD, R. KraehnertORCiD, Andreas HertwigORCiD |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Advanced optical technologies |
Jahr der Erstveröffentlichung: | 2022 |
Organisationseinheit der BAM: | 6 Materialchemie |
6 Materialchemie / 6.1 Oberflächen- und Dünnschichtanalyse | |
Veröffentlichende Institution: | Bundesanstalt für Materialforschung und -prüfung (BAM) |
Verlag: | De Gruyter |
Verlagsort: | Berlin |
Jahrgang/Band: | 11 |
Ausgabe/Heft: | 3-4 (Topical issue: Ellipsometry) |
Erste Seite: | 137 |
Letzte Seite: | 147 |
DDC-Klassifikation: | Naturwissenschaften und Mathematik / Chemie / Analytische Chemie |
Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten | |
Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Angewandte Physik | |
Freie Schlagwörter: | Electrochemical catalysts; Mixed metal oxide; Multi-sample analysis; Spectroscopic ellipsometry; Thin mesoporous films |
Themenfelder/Aktivitätsfelder der BAM: | Chemie und Prozesstechnik |
Energie | |
Energie / Wasserstoff | |
Material | |
Material / Nano | |
DOI: | 10.1515/aot-2022-0007 |
URN: | urn:nbn:de:kobv:b43-551026 |
ISSN: | 2192-8584 |
ISSN: | 2192-8576 |
Zugehöriger Identifikator: | https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/55468 |
Verfügbarkeit des Dokuments: | Datei für die Öffentlichkeit verfügbar ("Open Access") |
Lizenz (Deutsch): | Creative Commons - CC BY - Namensnennung 4.0 International |
Datum der Freischaltung: | 23.06.2022 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 04.07.2022 |
Schriftenreihen ohne Nummerierung: | Wissenschaftliche Artikel der BAM |