Analysis of mesoporous iridium oxide thin films by the combined methodical approach SEM/EDS/STRATAGem
- For the determination of porosity of Ir oxide thin films, electron probe microanalysis (EPMA) can be used as part of a combined SEM/EDS/STRATAGem analysis. The mass deposition (in μg cm-2) of films was calculated with the analysis software STRATAGem via k-values measured with EDS. The average density of coated films was obtained from the mass deposition and the film thickness as measured by the cross-section SEM. The porosity was calculated by dividing the average film density by the bulk (theoretical) density of the film material. Film porosities were counterchecked by spectroscopic ellipsometry (SE) using the Bruggeman effective medium approximation (BEMA). The results obtained by both analytical approaches/methods used, SEM/EDS/STRATAGem and SE were in good agreement.
Autor*innen: | René SachseORCiD, Andreas HertwigORCiD, R. Kraehnert, Vasile-Dan HodoroabaORCiD |
---|---|
Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Microscopy and Microanalysis |
Jahr der Erstveröffentlichung: | 2018 |
Organisationseinheit der BAM: | 6 Materialchemie |
6 Materialchemie / 6.1 Oberflächen- und Dünnschichtanalyse | |
6 Materialchemie / 6.7 Materialsynthese und Design | |
Verlag: | Cambridge University Press |
Verlagsort: | New York, NY, U.S.A. |
Jahrgang/Band: | 24 |
Ausgabe/Heft: | S1 (August) |
Erste Seite: | 762 |
Letzte Seite: | 763 |
DDC-Klassifikation: | Naturwissenschaften und Mathematik / Chemie / Analytische Chemie |
Freie Schlagwörter: | Electron probe microanalysis (EPMA); Iridium oxide; Porous thin films; Spectroscopic ellipsometry |
Themenfelder/Aktivitätsfelder der BAM: | Chemie und Prozesstechnik |
DOI: | 10.1017/S1431927618004300 |
URL: | https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/analysis-of-mesoporous-iridium-oxide-thin-films-by-the-combined-methodical-approach-semedsstratagem/7607018338B542D8B8C4D944392781EF |
ISSN: | 1431-9276 |
ISSN: | 1435-8115 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 17.09.2018 |
Referierte Publikation: | Nein |