Determination of Thin Film Thickness and Composition using Energy Dispersive EPMA
- Electron Probe Microanalysis (EPMA) provides a non-destructive approach in the dedicated thin film analysis mode with the commercial StrataGem software. Recently, the open-source programme BadgerFilm by Moy and Fournelle became available. Similarly to StrataGem, it is based on the algorithm of Pouchou and Pichoir and needs intensity ratios of the unknown sample and standards (k-values). We have evaluated the k-values measured for the FeNi and SiGe film systems using the BadgerFilm software package and compared the thickness and composition with the results obtained with the established StrataGem software and other reference methods. The thicknesses of the SiGe films obtained by the BadgerFilm software agree within 20% with the StrataGem and TEM results; the elemental compositions BadgerFilm-StrataGEM agree within 2% with one exception (9%).
Autor*innen: | R. Terborg, Vasile-Dan HodoroabaORCiD |
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Weitere Person: | K. J. Kim |
Dokumenttyp: | Posterpräsentation |
Veröffentlichungsform: | Präsentation |
Sprache: | Englisch |
Jahr der Erstveröffentlichung: | 2022 |
Organisationseinheit der BAM: | 6 Materialchemie |
6 Materialchemie / 6.1 Oberflächen- und Dünnschichtanalyse | |
DDC-Klassifikation: | Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten |
Freie Schlagwörter: | BadgerFilm; Electron Probe Microanalysis (EPMA); Elemental composition; FeNi; SiGe; Thickness; Thin films |
Themenfelder/Aktivitätsfelder der BAM: | Material |
Material / Nano | |
Veranstaltung: | Microscopy and Microanalysis 2022 |
Veranstaltungsort: | Portland, OR, USA |
Beginndatum der Veranstaltung: | 31.07.2022 |
Enddatum der Veranstaltung: | 4.8.2022 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 19.08.2022 |
Referierte Publikation: | Nein |