Plasma Compatibility of Particles for Functional PVD-coatings by ex-situ Injection - Stability of Particles under Plasma Conditions
- The validation of the plasma compatibility of particles is a prerequisite for their application in plasma dispersion layers. The goal is the realization of functional add-on features on surfaces, in films and coatings. Although intended applications primarily address nanoparticles, the compatibility tests were carried out at first with particles in the lower micrometer range in order to investigate material-, fluorescent marker- or surface-based degradation effects in a simple manner. Plasma compatibility implies at least the short-term acceptance of charged species, plasma-UV radiation, vacuum and elevated temperatures. Otherwise, effects on geometrical dimensions, chemical bonds, fluorescence efficiency and plastic-elastic properties are expected. The plasma compatibility of monodisperse fluorescent-labeled particles to microwave excitation was evaluated by means of microscopic and spectroscopic investigation methods (light, fluorescence, confocal, atomic force microscopy andThe validation of the plasma compatibility of particles is a prerequisite for their application in plasma dispersion layers. The goal is the realization of functional add-on features on surfaces, in films and coatings. Although intended applications primarily address nanoparticles, the compatibility tests were carried out at first with particles in the lower micrometer range in order to investigate material-, fluorescent marker- or surface-based degradation effects in a simple manner. Plasma compatibility implies at least the short-term acceptance of charged species, plasma-UV radiation, vacuum and elevated temperatures. Otherwise, effects on geometrical dimensions, chemical bonds, fluorescence efficiency and plastic-elastic properties are expected. The plasma compatibility of monodisperse fluorescent-labeled particles to microwave excitation was evaluated by means of microscopic and spectroscopic investigation methods (light, fluorescence, confocal, atomic force microscopy and FTIR). This study comprises particles of different materials (SiO2, PMMA, PS, MF) and sizes (from 50 nm to 10 μm). A special preparation technique ensures that smallest geometry changes of particles can be measured by atomic force microscopy. For the selected plasma conditions (P = 600 W, f = 2.46 GHz, d = 10 cm) and an exposure time of 10 minutes, the geometry of SiO2 particles (approx. 1.7 μm) remains nearly unchanged, whereas PS particles shrink in diameter by 6% and PMMA particles by 11%. For selected core-particles (SiO2, MF) with fluorescencemarked (rhodamine) shell-polyelectrolytes no remarkable plasma degradation of the fluorescence intensity was observed for the above mentioned plasma conditions, however a doubling of exposure time already results in a significant decrease in intensity. Two different injection systems have been studied for the particle injection into the plasma deposition process. One of the selected systems also proves process compatibility regarding the expected pressure differences upon injection.…
Autor*innen: | Uwe Beck |
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Persönliche Herausgeber*innen: | Jennifa Baier, Mario Sahre, Matthias Weise, L. Dähne, K.-H. Lerche |
Dokumenttyp: | Beitrag zu einem Tagungsband |
Veröffentlichungsform: | Graue Literatur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | PARTEC 2016 - International congress on Particle Technology, Book of Abstracts |
Jahr der Erstveröffentlichung: | 2016 |
Verlag: | VDI Wissensforum GmbH |
Verlagsort: | Düsseldorf |
Erste Seite: | 6. Applications of Particle Technology/6.11_Beck_Uwe |
DDC-Klassifikation: | Naturwissenschaften und Mathematik / Chemie / Analytische Chemie |
Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten | |
Freie Schlagwörter: | functional PVD coatings; particle injection; plasma dispersion layers |
Veranstaltung: | PARTEC 2016, International Congress on Particle Technology |
Veranstaltungsort: | Nürnberg, Germany |
Beginndatum der Veranstaltung: | 19.04.2016 |
Enddatum der Veranstaltung: | 21.04.2016 |
ISSN: | 0083-5560 |
ISBN: | 978-3-18-092283-6 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 05.09.2016 |
Referierte Publikation: | Nein |