Requirements on glasses for femtosecond-laser based micro-structuring
- In this work, glasses with systematically varied compositions were manufactured and irradiated by single Ti:sapphire fs-laserpulses (800 nm, 120 fs), focused at the surface and into the bulk of the glass materials. The samples were tested for their ablation threshold fluence as well as for structural changes using µ-Raman-spectroscopy. Correlations between the glass composition, the material-ablation on the glass surface and the permanent changes of the refractive index inside the glass volume after the irradiation by fs-laser pulses were obtained. The results show, that the structural modifications found at the surface of the glasses and inside its volume are closely related. However, while the ablation threshold fluence of the glass surface primarily depends on the glass dissociation energy, the permanent refractive index change inside the volume is rather determined by its ability for absorbing the fs-laser pulses and the subsequent relaxation processes. The results of this workIn this work, glasses with systematically varied compositions were manufactured and irradiated by single Ti:sapphire fs-laserpulses (800 nm, 120 fs), focused at the surface and into the bulk of the glass materials. The samples were tested for their ablation threshold fluence as well as for structural changes using µ-Raman-spectroscopy. Correlations between the glass composition, the material-ablation on the glass surface and the permanent changes of the refractive index inside the glass volume after the irradiation by fs-laser pulses were obtained. The results show, that the structural modifications found at the surface of the glasses and inside its volume are closely related. However, while the ablation threshold fluence of the glass surface primarily depends on the glass dissociation energy, the permanent refractive index change inside the volume is rather determined by its ability for absorbing the fs-laser pulses and the subsequent relaxation processes. The results of this work provide some guidance on how the glass composition can be varied in order to optimize the fs-laser induced modification of dielectrics.…
Autor*innen: | T. Seuthe, M. Grehn, A. Mermillod-Blondin, Jörn BonseORCiD, M. Eberstein |
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Dokumenttyp: | Beitrag zu einem Tagungsband |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | CICMT 2015 - 11th International conference on ceramic interconnect & ceramic microsystems technologies (Proceedings) |
Jahr der Erstveröffentlichung: | 2015 |
Herausgeber (Institution): | International Microelectronics and Packaging Society |
Verlag: | Curran |
Verlagsort: | Red Hook, NY, USA |
Erste Seite: | 47 |
Letzte Seite: | 53 |
Veranstaltung: | 11th International Conference on Ceramic Interconnect & Ceramic Microsystems Technologies |
Veranstaltungsort: | Dresden, Germany |
Beginndatum der Veranstaltung: | 20.04.2015 |
Enddatum der Veranstaltung: | 23.04.2015 |
DOI: | 10.4071/CICMT-TA24 |
ISBN: | 978-1-5108-0456-2 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Nein |