New Test Specimen for the Determination of the Field of View of Small-Area XPS
- Small-area/spot photoelectron spectroscopy (SAXPS) is a powerful tool for the investigation of small surface features like microstructures of electronic devices, sensors or other functional surfaces. For evaluating the quality of such microstructures, it is crucial to know whether a small signal in a spectrum is an unwanted contamination of the field of view (FoV), defined by the instrument settings, or it originated from outside. The aperture has a major influence on the signal-contribution from the outside. For the evaluation of the FoV, we determined the Au4f intensities measured with the center of the FoV aligned with the center of the spot and normalized to the Au4f intensity determined on the Au-film. With this test specimen, it was possible to characterize the FoV: The signal-contribution from the outside is reduceable down to lower than 50 %, when the aperture is 30 % of the structure dimension for our Kratos AXIS Ultra DLD system.
Autor*innen: | Jörg M. Stockmann |
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Weitere Person: | Jörg RadnikORCiD, S. Bütefisch, I. Busch, T. Weimann, C. Passiu, A. Rossi, Wolfgang UngerORCiD |
Dokumenttyp: | Posterpräsentation |
Veröffentlichungsform: | Präsentation |
Sprache: | Englisch |
Jahr der Erstveröffentlichung: | 2020 |
Organisationseinheit der BAM: | 6 Materialchemie |
6 Materialchemie / 6.1 Oberflächen- und Dünnschichtanalyse | |
Freie Schlagwörter: | Field of View; Imaging XPS; Reference Material; Small Area XPS |
Themenfelder/Aktivitätsfelder der BAM: | Chemie und Prozesstechnik |
Material | |
Veranstaltung: | Kratos User's Meeting 2020 |
Veranstaltungsort: | Online meeting |
Beginndatum der Veranstaltung: | 21.09.2020 |
Enddatum der Veranstaltung: | 22.09.2020 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 12.10.2020 |
Referierte Publikation: | Nein |